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List of Instruments

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  • Nanofabrication

  • Update Date：2024-06-12
  • Units：Instrumentation Resource Center
Cold Field Emission Scanning Electron Microscope & Energy Dispersive
Cold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrument
  • SEM SU-8010
    Brand Model: Hitachi SU-8010
  • Instrument expert: Prof. Tan, Chih-Shan
    ext 54146
  • Instrument consulting and operation services: Ms. Fan, Hsiu-Lan
    Ext. 55337, 55672
    Email shiulan@nycu.edu.tw
  • Instrument location: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus
    ext 55337
Link to Nano Center Introduction Page

Instrument Information
  1. Brand Model: Hitachi SU-8010
  2. Purchase period: October 2013
  3. Place of placement: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus (TEL: 55337) 
  4. Function:
    • Electron Microscope Observation (SEM): High-magnification magnification to observe the microstructure or cross-sectional structure of components, films, etc.
    • Surface energy level analysis (EDS): electron energy level spectrum analysis of surface material composition at a specific location to determine the composition of surface material or pollution
    • Pre-treatment of test piece: newly purchased ion mill, with section grinding & surface grinding function, to help make the surface of the test piece smoother and facilitate SEM observation
  5. Important specs:
    • Electron source: cold cathode electron gun
    • Operating voltage: 0.1kV~30kV
    • Specimen size: 50mm diameter x 50mm diameter
    • Resolution: 10A° (at 15kV) or 13A° (at 1kV)
    • The magnification is 20 times to 800,000 times (depending on the test piece itself)
    • Secondary electron resolution 1.0nm (under 15kV)
    • EDS can provide full spectrum qualitative analysis (Be4~U92), semi-quantitative analysis and element distribution map
    • Gas used in the ion mill: Argon (Ar)
    • Profile grinding range X: ≥ 7mm Y: ≥ 3mm
    • Surface grinding speed: 0°: ≥2μm/hr 60°: ≥20μm/hr
  6. The instrument can be used with special process material
Materials restricted by SEM
  1. Magnetic materials (including iron, cobalt, nickel components)
  2. Organics, polymers, powders and other materials
  3. All materials that decompose or release highly volatile substances or gases upon exposure to electron beams
self-operated instrument
  1. Instructions for obtaining the permission to use the instrument:
  2. Instrument opening level and number of people3. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
Commissioning the operation of the instrument
  1. If there is a National Academy of Sciences, please come first National Science Council Basic Research Core Facility Reservation Service Manage system reservations and get the reservation number, then download SEM8010 OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
  2. For those without a national science account, please download directly SEM8010 OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
Charge information
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
  2. Please bring your own conductive tape or thermal paper (K65HM).
  3. charging method
    • Self-operation: Set-up fee is charged (excluding sample surface coating/EDS)
    • Entrusted operation: start-up fee + OEM fee (excluding sample surface coating/EDS)
  4. Cost inquiry link
List of Instruments Basic Service-Nanofabrication
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