List of Instruments
中文Nanofabrication
- Update Date：2024-06-12
- Units：Instrumentation Resource Center
Dielectric Active Ion Etching System A
- Dielectric Materials Reactive Ion Etching System, RIE-400iP
Brand model: RIE-400iP made by SamCo, Japan - Instrument expert: Prof. Tsui, Bing-Yue
ext 31570 - Equipment management personnel: Mr. Hu, Jack
Extension 55607, 55666
Email jackhu@nycu.edu.tw - Equipment management personnel: Mr. Lee, James
Extension 55660, 55666
Email cwlee@nycu.edu.tw - Instrument location: Laboratory 121, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
ext 55610
- Brand model: RIE-400iP manufactured by SamCo Corporation of Japan.
- Purchase period: March 4, 2019.
- Location: Laboratory 121, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55610).
- Function: dry etching, mainly etching silicon carbide (SiC), and can etch dielectric (SiO2, Si3N4) material, 4″ wafer-based.
- Important specifications: This etching system can be fed with C4F8, O2, SF6, CHF3 and other gases to etch silicon carbide (SiC) and dielectric (SiO2, Si3N4).
- The instrument can be used with special process material.
Precautions
- Material Restrictions:
- (1) Limited to silicon carbide (SiC) substrates and Si substrates.
- (2). The test piece shall not be doped with metal elements or plated with metal films.
- (3). The test piece shall not pass through the post-processing machine.
- Please explain in detail what substances are on the substrate (such as Poly-Si, SiO2, Si3N4, photoresist, etc.), and whether to clean the wafer.
- If there is no special requirement for etching, it will be done according to the standard process parameters of the center.
self-operated instrument
- Instructions for obtaining the permission to use the instrument:
- Daytime permission application process description (Using permission is Monday to Friday 8:00~17:00)
- 24-hour application process description (You need to have daytime permission to apply)
- Precautions (Be sure to read carefully, so as not to lose your own rights)
- RIE-400iP instrument Operating Specifications & Exam record sheet
- Instrument opening level and number of people.
- After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
- National Science Council Basic Research Core Facility Reservation Service Management System (get serial number)
- Nano Center Instrument Reservation System (Use time slot reservation)
Commissioning the operation of the instrument
- If there is a National Academy of Sciences, please come firstNational Science Council Basic Research Core Facility Reservation Service Management SystemMake an appointment and get the appointment number, then download RIE-400iP OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
- For those without a national science account, please download directly RIE-400iP OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
Charge information
- Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
- charging method
- Do it yourself: charge a fee
- Entrusted operation: charging usage fee + OEM fee
- Cost inquiry link
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