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NYCU Office of Research and Development

Electron Microscope

  • Update Date:2025-02-20
  • Units:Instrumentation Resource Center
[Guangfu] FE-SEM: JSM-6700F
Field Emission Scanning Electron Microscope
  • Field Emission Scanning Electron Microscope
    • Abbreviation: FE-SEM
    • Brand Model: JEOL, JSM-6700F
  • Instrument expert: Prof. Wu, Pu-Wei
    • Ext 31227
  • Instrument operation technician: Ms. Chien, Shu-Chun
  • Instrument Location: Room 103, Engineering Building Sixth
Instrument brand, model, year of purchase:
Brand: JEOL
Model: JSM-6700F
Year of purchase: December 2005

Important Specifications
  1. Electron gun: cold cathode type
  2. Resolution 1.0 nm (15KV) 2.2 nm (1KV)
  3. Electron gun vacuum degree is below 10-8 Pa
  4. Magnification 25 to 650,000 times
  5. Acceleration voltage 0.5 to 30 KV
  6. Probe current 10-13 to 2×10-9 A
  7. Test piece size limit Diameter Φ25 mm × Height 10 mm
  8. Specimen carrier center-type specimen stage, X-Y movement range: 70 mm x 50 mm, rotation range: 360°, working distance: 1.5 mm to 25 mm, tilt angle: -5° to +60°
Services
Specimen microstructure observation (SEM), surface energy level analysis (EDS)

Opening hours:
Monday to Sunday
Period (I) 09:00 ~ 12:00
Period (III) 13:00 ~ 16:00
Period (III) 17:00 ~ 20:00
Period (iV) 20:00 ~ 23:00
Charge Standard: A session of 3 hours.
Charging standards
  Delegated operation Self-Operation
Unit Academic unit
Non-savings/savings members
Manufacturers and research units
Non-savings/savings members
Academic units
Non-savings/savings members
Manufacturers and research units
Non-savings/savings members
SEI NT$1,500/session NT$6,000/session NT$600/session Not open
EDS NT$300/session NT$1,200/session NT$120/session Not open
Gold plating NT$100/time NT$200/time NT$100/time Not open

Remarks: Academic units refer to colleges and universities. A session is counted as 3 hours. If you use exceeds 3 hours, the excess time will be NT$200 per hour.
Management methods and usage methods:
  1. Reservations are only open to students who have passed Qualify. Please fill in the laboratory, personal names, and contact numbers on the reservation form. Qualified Students cannot lend their personal access cards to others. Otherwise, both parties will be suspended for one month.
  2. If the reservation session conflicts with the teaching assistant training period, the training period will take priority.
  3. If the reservation session conflicts with the instrument maintenance period, instrument maintenance will take priority.
  4. Those who want to participate in the training and oral examination should first go to the Office Notice Board of the Department of Materials and fill in their personal information.
  5. you will be suspended for one month when the warnings accumulate thrice.
  6. Please work together to maintain the cleanliness of the room. Food is not allowed in the laboratory. Please arrange tools and chairs neatly when leaving. If you do not comply, you will be given a warning.
  7. Do not shut down the access control computer arbitrarily. It is strictly prohibited to install any games and illegal software. You cannot change system settings or access the Internet. If you do not comply, you will be suspended.
  8. All equipment and software in the laboratory are material properties and cannot be stolen or damaged. Otherwise, you will be held responsible.
  9. If an individual allows students who have not been trained by teaching assistants to operate the computer during the computer use period, they will be given two warnings. If the person making the appointment and the user are different, both will be given two warnings.
Instrument training operation application instructions
 
  1. If you have obtained instruments of the same brand and model from an external school or department and want to apply for training instruments directly, please first attach a signature certificate from the professor or researcher responsible for the instrument. Approval of the application requires one training and oral.
  2. Those who pass the JSM-6700F cold field emission assessment will be required to use the machine once within three months from the assessment's date (based on the usage record book). Otherwise, you need to undergo training and re-examination again.
  3. Education and training will be charged for an additional session.
Self-operation: go to EF103 to fill in the appointment form
  1. Reservation registration is only open to qualified users (who have passed the assessment and set access control). Those who do not have the right to use the site should not fill out this reservation form.
  2. Register: Please confirm the user name, laboratory, and extension. Anyone who fails to comply will be given a warning.
  3. Qualified users can register for one session at a time (one session is three hours). The next session can be registered only after the current operation is completed. Consecutive reservations for operating time slots in the same laboratory are not allowed. Violators will have multiple reservations canceled and will be given a warning.
  4. It is strictly prohibited to use SEM during the middle of the night (23:00~9:00). Violators will have their rights suspended for one month. Repeat offenders will have their rights revoked and can only apply for training again after three months.
  5. No unauthorized modification or cancellation of the reserved period in the reservation form is allowed in the first week. Violators will be given a warning, and double fees will be charged.
Delegated operation: Please contact the teaching assistant or technician first.

Remarks
  1. Please bring your own blank CD-R.
  2. As the viewing area may vary, please be with you when boarding the aircraft.
  3. Since the electron gun must operate under an ultra-high vacuum to prevent the adsorption of water vapor and debris on the test piece from affecting the observation, it is best to heat and bake the test piece before placing it in the test piece chamber. Unprocessed specimens may not be able to observe ultra-high-resolution images.
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