Electron Microscope
中文- Update Date：2025-02-20
- Units：Instrumentation Resource Center
[Guangfu] SEM: S-4700I
- High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer
- English abbreviation: SEM S-4700I
- Brand Model: Hitachi, S-4700I
- Instrument expert: Prof. Tan, Chih-Shan
- Ext. 54146
- Instrument Operation Technician: Ms. Fan, Hsiu-Lan
- Ext. 55672, 55337
- Instrument Location: Room 710, Microelectronics & Information Systems Research Building
Instrument brand, model, year of purchase
Brand: Hitachi
Model: S-4700I
Year of purchase: October 1998
Important Specifications
Brand: Hitachi
Model: S-4700I
Year of purchase: October 1998
Important Specifications
- Electron source: cold cathode electron gun
- Operating voltage: 0.5kV~30kV
- Test piece size: 25mm diameter x 10mm(t)
- Resolution: 15Å (at 15kV) or 25Å (at 1kV)
- Magnification 500,000 times (depending on the test strip itself)
- Secondary electron resolution 1.5nm (at 15kV)
Services
Observe microstructures and cross-sectional structures such as components and films at high magnification.
Opening hours
Observe microstructures and cross-sectional structures such as components and films at high magnification.
Opening hours
- Monday through Friday: Unlimited
- Nighttime, Saturday and Sunday: Unlimited
System opening level: Level A
- General Office Hours: Unlimited
- Night and Holiday Hours: Unlimited
System opening level description
- Level A: Open to students who need to use it. They can operate it on their own after training and assessment.
- Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
- Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.
- Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
| Delegated operation | Self-operation | ||||
|---|---|---|---|---|---|
| Unit | Academic unit (off-campus) | Academic unit (NYCU) | Manufacturers and research units | Academic units (limited to qualified users of NYCU) | Manufacturers and research units |
| Operation fee (NTD/3 hours) | 900 | 900 | 900 | — | Not open |
| SEM (NTD/hour) | 1,000 | 100 | 2,000 | 100 | Not open |
| Sample surface coating (NTD/min) | 500 | 500 | 800 | 500 | Not open |
| EDS | Fault deactivation | Fault deactivation | Fault deactivation | Fault deactivation | Fault deactivation |
Remarks:
- The academic unit includes colleges and universities.
- NYCU users who self-operate more than nine hours per month will have their fees discounted by half.
Management and Usage Methods
Please follow the Nano Facility Center's management and usage regulations.
Application for Instrument Training
Please follow the rules and regulations of Nano Facility Center's equipment operation training application process.
Please follow the Nano Facility Center's management and usage regulations.
Application for Instrument Training
Please follow the rules and regulations of Nano Facility Center's equipment operation training application process.
Instrument Operation Reservation:
Please go to Nano Facility Center's Equipment Reservation Management System
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