- <![CDATA[X-ray diffractometer under extreme conditions and cutting-edge femtosecond dynamic spectrum measurement system]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="X-ray diffractometer under extreme conditions and cutting-edge femtosecond dynamic spectrum measurement system" src="/userfiles/ordch/images/20231019141756262.jpg" /></div>
<div class="ed_list">
<ul>
<li class="ed_txt"><strong>X-ray diffractometer and femtosecond transient spectroscopy under extreme conditions</strong></li>
<li class="ed_txt">English abbreviation: Extreme-condition spectroscopy<br />
Brand Model: Quantum Design Opticool</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Luo, Chi-Wei</strong><br />
Ext. 56196,<a href="mailto: cwluoep@nycu.edu.tw" title="cwluoep@nycu.edu.tw">Email</a></li>
<li class="ed_txt"><strong>Instrument expert: Prof. Huang, Er-wen</strong><br />
ext 55307,<a href="mailto: ewenhuang@nycu.edu.tw" title="ewenhuang@nycu.edu.tw">Email</a></li>
<li class="ed_txt"><strong>Instrument consultation and operation service: Dr. Nguyen Nhat Quyen</strong><br />
Ext. 56198,<a href="mailto:nhatquyen126@gmail.com" title="nhatquyen126@gmail.com">Email</a></li>
<li class="ed_txt"><strong>Instrument location: Science Building 3, Room SC015, GF Campus</strong></li>
</ul>
</div>
</div>]]>Cutting Edge ServiceInstrumentation Resource Center 2025-04-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, year of purchase</strong><br />
Brand: Quantum Design Inc <br />
Model: Quantum Design Opticool<br />
Purchase date: 2022<br />
Function: High magnetic field thermostatic controller for X-ray to MHz band spectrum (including time analysis) measurement.<br />
<br />
<strong>Important Specifications</strong><br />
<br />
The spectrum measurement system includes a high magnetic field thermostatic controller (magnetic field can reach 7 T, temperature can reach 1.8 K).<br />
<br />
Available laser light sources are 400, 532, 633, and 800 nm. Users can also prepare their own light source. Temperature range 1.8 K to 350 K (0.2% stability below 20 K, 0.02% stability above 20 K). The magnetic field range is plus or minus 7 T (stability within 3 cm diameter is 0.3%). The vibration stability can reach the micron level.</div>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Services</strong><br />
<br />
Provides X-ray to megahertz spectrum (including time analysis) measurement services, and provides users with customized experimental setup and analysis consultation.</div>
</div>System opening level and time<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening schedule</strong></div>
<ul>
<li class="ed_txt">Monday to Friday | Commission period</li>
<li class="ed_txt">Night and Saturday and Sunday Class C</li>
</ul>
<div class="ed_txt"><strong>System opening level</strong></div>
<ol>
<li class="ed_txt">General working hours: D level</li>
<li class="ed_txt">Night and holiday periods: Class C</li>
</ol>
<div class="ed_txt"><strong><u>System opening level description</u></strong></div>
<ul>
<li class="ed_txt">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li class="ed_txt">Level B: Each professor assigns one student to apply for training. The other students of the professor need to be operated by students who have received training. If a professor has too many students using the instrument, he or she can ask the instrument to The person in charge applied to increase the number of students receiving training.</li>
<li class="ed_txt">Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li class="ed_txt">Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>Management method and appointment<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and reservation methods</strong></div>
<ol>
<li class="ed_txt">You must first discuss with an instrument expert or technician whether the experiment can be performed and fill in<a href="/userfiles/orden/files/20250411170542684.docx" rel="noreferrer noopener" target="_blank" title=" Advanced Service Application Form(docx)(Open New Windows)"> Advanced Service Application Form</a>. After the application is reviewed and approved both inside and outside the school, the cutting-edge service experimental plan will be implemented.</li>
<li class="ed_txt">Only after the cutting-edge service application has been reviewed can you arrange an experimental itinerary with the technician.</li>
</ol>
</div>Charges<div class="table01">
<table class="ed_table caption-top" summary="Charge Standard">
<caption>Charging standard (unit: NTD)</caption>
<tbody>
<tr>
<th>Billing items</th>
<th>Planned unit price</th>
<th>Cash unit price</th>
<th>Do it yourself</th>
<th>Remarks</th>
</tr>
<tr>
<td class="ed_pc_center" data-th="Billing item">Spectral measurement of changing temperature (or changing magnetic field)</td>
<td data-th="Plan price">$400/hour</td>
<td data-th="Cash unit price">$4000/hour</td>
<td data-th="Do it yourself">$200/hour</td>
<td data-th="Remarks">Minimum 36 hours (24 hours of which is the cooling time of the cryogenic system and superconducting magnet, and the time before sample removal is included in the usage time)</td>
</tr>
<tr>
<td class="ed_pc_center" data-th="Billing item">Spectral measurement of changing temperature and magnetic field</td>
<td data-th="Plan price">$800/hour</td>
<td data-th="Cash unit price">$8000/hour</td>
<td data-th="Do it yourself">$400/hour</td>
<td data-th="Remarks">Minimum 36 hours (24 hours of which is the cooling time of the cryogenic system and superconducting magnet, and the time before sample removal is included in the usage time)</td>
</tr>
<tr>
<td class="ed_pc_center" data-th="Billing item">Spectral measurement at normal temperature and zero magnetic field</td>
<td data-th="Planned unit price">$200/item</td>
<td data-th="Cash unit price">$2000/item</td>
<td data-th="Do it yourself">$100/item</td>
<td data-th="Remarks">Time slot charges are subject to additional charges</td>
</tr>
<tr>
<td class="ed_pc_center" data-th="Billing item">Spectral measurement at normal temperature and zero magnetic field</td>
<td data-th="Plan price">$500/hour</td>
<td data-th="Cash unit price">$5000/hour</td>
<td data-th="Do it yourself">$250/hour</td>
<td data-th="Remarks">The testing fee for each sample must be charged separately</td>
</tr>
</tbody>
</table>
</div>Instrument Training Operation Application<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument training operation application instructions</strong></div>
<ol>
<li class="ed_txt"><a href="/userfiles/orden/files/20250411170542684.docx" rel="noreferrer noopener" target="_blank" title="Application form for advanced services(docx)(Open New Windows)">Application form for advanced services</a> must first pass the review and participate in the commissioned operation experiment more than once.</li>
<li class="ed_txt">To apply for training, you must first contact the project leader and instrument experts or technicians to confirm the cutting-edge service experimental process.</li>
</ol>
</div>Contact person<div class="ed_txt"><span style="font-size:120%;"><strong>Instrument Expert:</strong></span></div>
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Professor Luo Chih-Wei</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> 03-5712121 ext. 56196 extension: 62382</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:cwluoep@nycu.edu.tw?subject=undefined&body= undefined" id="1-2" title="cwluoep@nycu.edu.tw">cwluoep@nycu.edu.tw</a></li>
</ul>
</div>
</div>
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Professor Huang Erwen</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> 03-5712121 ext. 55307</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:mailto:ewenhuang@nycu.edu.tw" title="ewenhuang@nycu.edu.tw">ewenhuang@nycu.edu.tw</a></li>
</ul>
</div>
</div>
<div class="ed_txt"><span style="font-size:120%;"><strong>Instrument Operation Technician:</strong></span></div>
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Dr. Nguyen Nhat Quyen </li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> Ext: 56198</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:nhatquyen126@gmail.com?subject=undefined&body=undefined" id="1-2" title="nhatquyen126@gmail.com">nhatquyen126@gmail.com</a></li>
</ul>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167375077973430272&init=YX-ray diffractometer under extreme conditions and cutting-edge femtosecond dynamic spectrum measurement systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instruments
- <![CDATA[III-V Molecular Beam Epitaxy System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Group III or Five Molecular Beam Epitaxy System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169160834551648256&init=N" /></div>
<ul>
<li class="ed_txt"><strong>III-V MOLECULAR BEAM EPITAXY SYSTEM</strong><br />
Brand Model: Veeco Modular GEN II solid source III-V MBE</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Lin Sheng-Di</strong><br />
ext 31240<br />
Email <a href="mailto:mailto:sdlin@nycu.edu.tw" title="sdlin@nycu.edu.tw">sdlin@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Ms. Wu, Chu-Chun</strong><br />
Extension 54248, 55665<br />
Email <a href="mailto:isabelwu@nycu.edu.tw" title="isabelwu@nycu.edu.tw">isabelwu@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-04-28Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information</strong><br />
Chinese name: Group III and V Molecular Beam Epitaxy System<br />
English name: III-V Molecular Beam Epitaxy System<br />
English abbreviation: MBE<br />
Label: Veeco Modular GEN II solid source III-V MBE<br />
Instrument Location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus<br />
Purchase Date: August 2004<br />
Date of joining Guiyi: January 2015<br />
<br />
<strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt">High Vacuum Growth chamber: Pressure < 5×10-10 torr</li>
<li class="ed_txt">Source Material: Ga, Al, In, As, Sb.</li>
<li class="ed_txt">Doping Source: Be, Si, Te</li>
<li class="ed_txt">Max substrate Size: 3 inches</li>
<li class="ed_txt">Epitaxy Layer thickness Variation < 5%</li>
<li class="ed_txt">The highest growth temperature: 640℃</li>
<li class="ed_txt">In-situ rsidual gas analysis (RGA) and reflection high energy electron diffraction (RHEED, 15kV):</li>
<li class="ed_txt">Regular monitoring epitaxy layer growth rate and quality.</li>
</ol>
</div>Service Items and System Open Level<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong></div>
<ol>
<li class="ed_txt">This system is an ultra-high vacuum system. In principle, it is not open to operate by itself, but it can be accompanied on site.</li>
<li class="ed_txt">This system serves each wafer with 6 hours as a unit.</li>
<li class="ed_txt">The applicant user must contact the professor or technician in charge of the instrument to confirm that the sample meets the requirements.</li>
<li class="ed_txt">A maximum of 5 samples can be reserved per person at a time.</li>
<li class="ed_txt">Cancellation must be notified one week in advance.</li>
</ol>
<div class="ed_txt"><br />
<strong>System open level</strong><br />
At present, only the entrusted service is open, and it is operated by the technicians of this laboratory.</div>
</div>Charges<div class="ed_model06 clearfix">
<div class="ed_txt"><strong>Opening hours:</strong>This machine adopts entrusted reservation. If you need to make an appointment, please go to your instrument system to make an appointment.</div>
<div class="table01">
<table class="ed_table caption-top" summary="Charges">
<caption>Charges</caption>
<tbody>
<tr>
<th style="text-align: left;">service items</th>
<th style="text-align: left;">Charging standard (unit: NTD)</th>
</tr>
<tr>
<td data-th="service items">Arsenic sample commission</td>
<td data-th="Charging standard (unit: NTD)">Planning appointment: $4,000 /1µm<br />
Unplanned appointment: $15,000 /1µm</td>
</tr>
<tr>
<td data-th="service items">Antimonide sample commission</td>
<td data-th="Charging standard (unit: NTD)">Planning appointment: $5,000 /1µm<br />
Unplanned appointment: $25,000 /1µm</td>
</tr>
<tr>
<td data-th="service items">Special Structure Testing Fee</td>
<td data-th="Charging standard (unit: NTD)">Additional correction fees ranging from 2-6µm will be charged according to the structural difficulty</td>
</tr>
<tr>
<td data-th="service items">Substrate cost</td>
<td data-th="Charging standard (unit: NTD)">GaAs series: $7,000 / single chip<br />
GaSb series: $25,000/single chip<br />
InP series: $9,000 / single chip</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model01 clearfix">
<div class="ed_txt"><br />
</div>
<ol>
<li class="ed_txt">The charging standard is calculated based on the sample growth thickness of 1 micron. The part exceeding 1 micron or more, if it is less than 1 micron, it will be calculated as 1 micron.</li>
<li class="ed_txt">In order to maintain the stability of the system and ultra-high vacuum conditions, the request of the entruster to provide substrates is not accepted; the unit will provide the crystal growth substrates uniformly.</li>
<li class="ed_txt">If you have other special requirements, please mail or call to discuss.</li>
<li class="ed_txt">For those who need long-term entrusted services, long-term project discounts can be provided.</li>
<li class="ed_txt">The unit can also assist in evaluating the feasibility of the structure and consulting services for growth proposals.</li>
</ol>
</div>Test film restrictions and reservation method<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and test strip restrictions</strong></div>
<ol>
<li class="ed_txt">The substrates that can be grown are GaAs, InP, InAs, GaSb, and InSb.</li>
<li class="ed_txt">After submitting the appointment form, the entrusted operator must contact the technician to determine the experimental time and growth content.</li>
</ol>
<div class="ed_txt"><br />
<strong>Instrument reservation method</strong></div>
<ol>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/home/Index" title="Instrument reservation">Instrument reservation</a></li>
<li class="ed_txt">If you want to cancel the appointment, please contact the technician one week before and cancel online.</li>
<li class="ed_txt">Submit the appointment application form, please take a photo or scan it and send it to the technician's mailbox</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169160834551648256&init=YGroup III or Five Molecular Beam Epitaxy Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[Laser Pattern Generator]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Laser Pattern Generator" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169168370554114048&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e7%bd%a9%e8%a3%bd%e4%bd%9c%e7%b3%bb%e7%b5%b1-laser-pattern-generator-dwl-200/" rel="noreferrer noopener" target="_blank" title="LASER PATTERN GENERATOR(Open New Windows)"><strong>LASER PATTERN GENERATOR</strong></a><br />
Brand Model: HIMT DWL-200</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Li, Pei-wen</strong><br />
ext 54210</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang</strong><strong>, Mr. Ko, Ming-yi</strong><br />
Mr. Ko, Ming-yi (ext. 55659, 55667)<br />
Email <a href="mailto:mailto:mingyi@nycu.edu.tw" title="mingyi@nycu.edu.tw">mingyi@nycu.edu.tw</a><br />
Mr. Tsai, Ching-Hsiang (ext. 55605, 55616)<br />
Email <a href="mailto:ch-tsai@nycu.edu.tw" title="ch-tsai@nycu.edu.tw">ch-tsai@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 139, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-04-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/laser-pattern-generator-dwl-200/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: HIMT DWL-200</li>
<li class="ed_txt">Purchase period: April 2007</li>
<li class="ed_txt">Location: Room 139, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li class="ed_txt">Function: Manufacture of glass photomasks (4", 5" and 6"), 5-inch quartz photomasks (contact)</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">Laser light source 442nm(g-line) Helium _Cadmium LASER Power 125mW</li>
<li class="ed_txt">Minimum feature size is .80um</li>
<li class="ed_txt">Maximum effective area 200mm x 200mmdeposition)</li>
<li class="ed_txt">*.dxf file of GDSII and Auto CAD</li>
<li class="ed_txt">Dual CCD camera alignment system</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612091506150.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.<br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="/userfiles/orden/files/20240612091535956.pdf" rel="noreferrer noopener" target="_blank" title="Mask Making Instructions(pdf)(Open New Windows)">Mask Making Instructions</a></div>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li class="ed_txt">If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/home/Index" title="National Science Council Basic Research Core Facility Reservation Service Management System">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612091555508.odt" rel="noreferrer noopener" target="_blank" title="DWL-200 OEM Application Form(odt)(Open New Windows)">DWL-200 OEM Application Form</a>, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.</li>
<li class="ed_txt">For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612091555508.odt" rel="noreferrer noopener" target="_blank" title="DWL-200 OEM Application Form(odt)(Open New Windows)">DWL-200 OEM Application Form</a>, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.<br />
</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169168370554114048&init=YLaser Pattern Generatorhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=e990525c-7264-448e-ad41-ee81154b5695Pattern Generator
- <![CDATA[Pattern Generator]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Graphics Generation System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169163857558507520&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e5%9c%96%e5%bd%a2%e7%94%a2%e7%94%9f%e7%b3%bb%e7%b5%b1pattern-generator/" rel="noreferrer noopener" target="_blank" title="PATTERN GENERATOR(Open New Windows)"><strong>PATTERN GENERATOR</strong></a><br />
Brand Model: Raith VOYAGER</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Li Pei-Wen</strong><br />
ext 54210</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang</strong><br />
Extension 55605, 55616<br />
Email <a href="mailto:ch-tsai@nycu.edu.tw" title="ch-tsai@nycu.edu.tw">ch-tsai@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 118, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/pattern-generator/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: Raith VOYAGER</li>
<li class="ed_txt">Purchase period: 2019</li>
<li class="ed_txt">Place of placement: Room 118, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55667)</li>
<li class="ed_txt">Function: thin film photoresist exposure and writing</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">Exposure source: Electron Beam</li>
<li class="ed_txt">Maximum beam energy: 50kV</li>
<li class="ed_txt">Maximum write field: 500μm</li>
<li class="ed_txt">50MHz Pattern Generator</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612091506150.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Positive list: the surface of the test piece is flat (thickness less than 1mm) (such as Si, SiC, GaAs, GaN and other materials)</li>
<li class="ed_txt">Negative table columns (prohibited):
<ul>
<li class="ed_txt">Magnetic materials, powder materials, piezoelectric materials, synthetic photoresist</li>
<li class="ed_txt">low melting point material</li>
<li class="ed_txt">All materials that decompose or release gases and hinder the maintenance of vacuum when exposed to electron beams</li>
</ul>
</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ol>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Graphics Generation System <a class="ek-link broken_link" href="/userfiles/orden/files/20240612091951664.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a class="ek-link broken_link" href="/userfiles/orden/files/20240612092008982.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ol>
</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people(Open New Windows)">Instrument opening level and number of people</a>, the relevant notes are as follows:
<ol>
<li>In principle, the same laboratory is open to 3 people to operate by themselves, not limited to master and doctoral students (but doctoral students are preferred).</li>
<li>Applicants who apply for self-operation of this equipment need to have experience in using nanocenter SEM instruments (the cumulative operating hours are at least 20 hours). <a class="ek-link" href="/userfiles/orden/files/20240612092047640.odt" rel="noreferrer noopener" target="_blank" title="knot book(odt)(Open New Windows)">knot book</a>.</li>
<li>20 hours of accumulated hours of SEM operation must be attached.</li>
<li>The number of training times for this equipment to operate by itself is 5 times.</li>
<li>Those who are the trainers of this equipment must first obtain the 24-hour self-operating authority of this equipment.</li>
<li>After passing the assessment, if the device has not been used for more than 3 months, its operating authority will be cancelled.</li>
</ol>
</li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ol>
<li><a class="ek-link" href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a class="ek-link" href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ol>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a class="ek-link" href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a class="broken_link" href="/userfiles/orden/files/20240612092107229.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Graphical Generation System(odt)(Open New Windows)">OEM Application Form for Graphical Generation System</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a class="broken_link" href="/userfiles/orden/files/20240612092107229.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Graphical Generation System(odt)(Open New Windows)">OEM Application Form for Graphical Generation System</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">The chip is prepared by the user.</li>
<li class="ed_txt">When NFC photoresist is required for the entrusted graphic exposure and writing, the entrusted coating material fee: 800 yuan (within 2 pieces of fragments or 1 piece of 4 inches, cash charge).</li>
<li class="ed_txt">The exposure and writing of the mask depends on the pattern and will be quoted separately after evaluation.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operation: charge usage fee</li>
<li class="ed_txt">Entrusted operation: charge usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169163857558507520&init=YGraphics Generation Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=9b3d4c4f-6606-4496-9bbc-b1d1bb2ca075Laser Pattern Generator
- <![CDATA[Double Side Mask Aligner (A)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Mask Alignment Exposure Machine (A)" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169181871339212800&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%99%e9%9d%a2%e5%85%89%e7%bd%a9%e5%b0%8d%e6%ba%96%e6%9b%9d%e5%85%89%e6%a9%9fa-double-side-mask-aligner-a/" rel="noreferrer noopener" target="_blank" title="Double Side Mask Aligner(Open New Windows)"><strong>Double Side Mask Aligner</strong></a><br />
Brand model: Keyi Technology AG1000-4D-DSMV</li>
<li class="ed_txt"><strong>Instrument Expert: Prof. Su, Chun-Jung</strong><br />
ext 56150<br />
Mailbox <a href="mailto:cjsu@nycu.edu.tw" title="cjsu@nycu.edu.tw">cjsu@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Operation Technician: Mr. </strong> <strong>Tseng</strong>, <strong>Chun-Hsien </strong><br />
Extension 55606, 55667<br />
Email <a href="mailto:mailto:c00465@nycu.edu.tw" title="c00465@nycu.edu.tw">c00465@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55616 </li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-09-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/double-side-mask-aligner-a/" title="Nano Center website introduction">Nano Center website introduction</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand model: Keyi Technology AG1000-4D-DSMV</li>
<li class="ed_txt">Purchase period: November 2011 </li>
<li class="ed_txt">Place of placement: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)</li>
<li class="ed_txt">Function: Alignment exposure of various components</li>
<li class="ed_txt">Important Specifications:
<ul>
<li class="ed_txt">Mask holder: 4″x4″ , 5″x5″</li>
<li class="ed_txt">Chuck: 4″</li>
<li class="ed_txt">Exposure size: 4″</li>
<li class="ed_txt">Light source: 1000W</li>
<li class="ed_txt">Mercury light source: NUV</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612092150075.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Reservations are made in one hour.</li>
<li class="ed_txt">The process reservation time of users with this equipment is at most one time slot per day, and repeated reservations are not allowed</li>
<li class="ed_txt">Reservation Cancellation: Those who cannot operate the equipment within the reservation period due to emergencies should cancel the reservation registration 24 hours before the reservation. Those who do not cancel will be charged according to the original period, and the original period must be opened by the equipment management personnel. For other users to operate and use it, the original reservation user shall be punished, and the punishment shall be determined separately.</li>
<li class="ed_txt">Those who do not arrive on time for the appointment registration will be deemed to have not picked up the appointment, and the time slot can be used by other users.</li>
<li class="ed_txt">For commissioned producers, please contact the equipment management personnel first.<br />
</li>
</ol>
</div>Self-operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>To apply for this machine, an additional test is required at the same time<a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e9%98%bb%e5%a1%97%e4%bd%88%e6%a9%9fphoto-resist-spinner/" rel="noreferrer noopener" target="_blank" title="Photoresist Coater(Open New Windows)">Photoresist Coater</a>,<a href="https://nanofc.web.nycu.edu.tw/%e7%9c%9f%e7%a9%ba%e7%83%a4%e7%ae%b1vacuum-oven/" rel="noreferrer noopener" target="_blank" title="vacuum oven(Open New Windows)">vacuum oven</a>,<a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e5%ad%b8%e9%a1%af%e5%be%ae%e9%8f%a1optical-microscope/" rel="noreferrer noopener" target="_blank" title="Optical microscope(Open New Windows)">Optical microscope</a></li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>The double-sided mask is aligned with the exposure machine <a href="/userfiles/orden/files/20240612092220177.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092239852.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a> & <a href="/userfiles/orden/images/20240612092315091.jpg" rel="noreferrer noopener" target="_blank" title="Aligner key suggested location map(jpg)(Open New Windows)">Aligner key suggested location map</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If non-standard silicon wafers or other materials must be distinguished from the front and back, the front and back sides and the surface to be processed must be marked on the application form or on the wafer. Those who do not mark or do not provide confirmation information will not be accepted.</li>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092336723.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Double-sided Mask Alignment Exposure Machine(odt)(Open New Windows)">OEM Application Form for Double-sided Mask Alignment Exposure Machine</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612092336723.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Double-sided Mask Alignment Exposure Machine(odt)(Open New Windows)">OEM Application Form for Double-sided Mask Alignment Exposure Machine</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Photoresist only: NTD $500 per piece (4″ and fragments are charged the same).</li>
<li class="ed_txt">When the OEM requires the second alignment (the applicant must be present and accompanied to facilitate confirmation of the alignment position and avoid disputes).</li>
<li class="ed_txt">If you do it yourself, your fee will be charged. If you entrust an agent, you will be charged both the labor fee and your fee (both).</li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Operate by yourself:<span style="color:#ff0000;"><strong>Charge usage fee</strong></span></li>
<li class="ed_txt">Delegated operation:<strong><span style="color:#ff0000;">Charge usage fee</span></strong>+ OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a><br />
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169181871339212800&init=YMask Alignment Exposure Machine (A)https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=17362319-e858-48e7-a167-545b21005ed1Double Side Mask Aligner (B)
- <![CDATA[Double Side Mask Aligner (B)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Mask Alignment Exposure Machine (B)" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169176819430068224&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%99%e9%9d%a2%e5%85%89%e7%bd%a9%e5%b0%8d%e6%ba%96%e6%9b%9d%e5%85%89%e6%a9%9fb-double-side-mask-aligner-b/" rel="noreferrer noopener" target="_blank" title="Double Side Mask Aligner(Open New Windows)"><strong>Double Side Mask Aligner</strong></a><br />
Brand model: Keyi Technology AG1000-6N-ST</li>
<li class="ed_txt"><strong>Instrument Expert: Prof. Su, Chun-Jung</strong><br />
ext 56150<br />
Mailbox <a href="mailto:cjsu@nycu.edu.tw" title="cjsu@nycu.edu.tw">cjsu@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Operation Technician: Mr. Tseng,</strong> <strong>Chun-Hsien </strong><br />
Extension 55606, 55667<br />
Email <a href="mailto:mailto:c0045@nycu.edu.tw" title="c0045@nycu.edu.tw">c0045@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55616 </li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-09-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%99%e9%9d%a2%e5%85%89%e7%bd%a9%e5%b0%8d%e6%ba%96%e6%9b%9d%e5%85%89%e6%a9%9fb-double-side-mask-aligner-b/" rel="noreferrer noopener" target="_blank" title="Nano Center website introduction(Open New Windows)"><strong>Nano Center website introduction</strong></a><br />
<br />
<strong>Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: Keyi Technology AG1000-6N-ST</li>
<li class="ed_txt">Purchase period: November 2019 </li>
<li class="ed_txt">Place of placement: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)</li>
<li class="ed_txt">Function: Alignment exposure of various components</li>
<li class="ed_txt">Important Specifications:
<ol>
<li class="ed_txt">Mask holder: 4″x4″ , 5″x5″</li>
<li class="ed_txt">Chuck: 4″</li>
<li class="ed_txt">Exposure size: 4″</li>
<li class="ed_txt">Light source: 1000W</li>
<li class="ed_txt">Mercury light source: NUV</li>
</ol>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612092150075.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Reservations are made in one hour.</li>
<li class="ed_txt">The process reservation time of users with this equipment is at most one time slot per day, and repeated reservations are not allowed</li>
<li class="ed_txt">Reservation Cancellation: Those who cannot operate the equipment within the reservation period due to emergencies should cancel the reservation registration 24 hours before the reservation. Those who do not cancel will be charged according to the original period, and the original period must be opened by the equipment management personnel. For other users to operate and use it, the original reservation user shall be punished, and the punishment shall be determined separately.</li>
<li class="ed_txt">Those who do not arrive on time for the appointment registration will be deemed to have not picked up the appointment, and the time slot can be used by other users.</li>
<li class="ed_txt">For commissioned producers, please contact the equipment management personnel first.</li>
</ol>
</div>Self-operation Rregulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>To apply for this machine, an additional test is required at the same time <a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e9%98%bb%e5%a1%97%e4%bd%88%e6%a9%9fphoto-resist-spinner/" rel="noreferrer noopener" target="_blank" title="Photoresist Coater(Open New Windows)">Photoresist Coater</a>,<a href="https://nanofc.web.nycu.edu.tw/%e7%9c%9f%e7%a9%ba%e7%83%a4%e7%ae%b1vacuum-oven/" rel="noreferrer noopener" target="_blank" title="vacuum oven(Open New Windows)">vacuum oven</a>,<a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e5%ad%b8%e9%a1%af%e5%be%ae%e9%8f%a1optical-microscope/" rel="noreferrer noopener" target="_blank" title="Optical microscope(Open New Windows)">Optical microscope</a></li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>The double-sided mask is aligned with the exposure machine <a href="/userfiles/orden/files/20240612092456963.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092514193.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a> & <a href="/userfiles/orden/images/20240612092315091.jpg" rel="noreferrer noopener" target="_blank" title="Aligner key suggested location map(jpg)(Open New Windows)">Aligner key suggested location map</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If non-standard silicon wafers or other materials must be distinguished from the front and back, the front and back sides and the surface to be processed must be marked on the application form or on the wafer. Those who do not mark or do not provide confirmation information will not be accepted.</li>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092601128.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Double-sided Mask Alignment Exposure Machine(odt)(Open New Windows)">OEM Application Form for Double-sided Mask Alignment Exposure Machine</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612092601128.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Double-sided Mask Alignment Exposure Machine(odt)(Open New Windows)">OEM Application Form for Double-sided Mask Alignment Exposure Machine</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Photoresist only: NTD $500 per piece (4″ and fragments are charged the same).</li>
<li class="ed_txt">When the OEM requires the second alignment (the applicant must be present and accompanied to facilitate confirmation of the alignment position and avoid disputes).</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Operate by yourself:<strong><span style="color:#ff0000;">Charge usage fee</span></strong></li>
<li class="ed_txt">Delegated operation:<strong><span style="color:#ff0000;">Charge usage fee</span></strong>+ OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a><br />
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169176819430068224&init=YMask Alignment Exposure Machine (B)https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=c65bd2f5-03e0-40b3-999a-68a335d959fbDouble Side Mask Aligner (A)
- <![CDATA[Oxidative & Diffusion Furnaces]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Oxidative Diffusion System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169172716977131520&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e6%b0%a7%e5%8c%96%e6%93%b4%e6%95%a3%e7%b3%bb%e7%b5%b1oxidation-diffusion-furnaces/" rel="noreferrer noopener" target="_blank" title="OXIDATION & DIFFUSION FURNACES(Open New Windows)">OXIDATION & DIFFUSION FURNACES</a><br />
Brand Model: Senji SJ-CA1200-D4</li>
<li class="ed_txt"><strong>Instrument expert: Prof. </strong> <strong>Liu, Po-Tsun</strong><br />
ext 52994</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Ms. Ni, Yuech Chen</strong><br />
Extension 55668, 55610<br />
Email <a href="mailto:mailto:yeni@nycu.edu.tw" title="yeni@nycu.edu.tw">yeni@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 121, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-05-14Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/oxidation-diffusion-furnaces/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: Senji SJ-CA1200-D4</li>
<li>Purchase period: December 2012</li>
<li>Location: Room 121, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li>Function:
<ul>
<li> Wet oxygen oxidation, dry oxygen oxidation (dry & wet oxidation)</li>
<li>N-type, P-type wafer (annealed)</li>
<li>SiO<sub>2</sub> /Si，High-K /Si.Ge (Sintering)</li>
<li>Al annealing</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>The maximum heating temperature is 1100°C</li>
<li>The length of the heating zone is 900mm, and the diameter of the furnace tube is 6″</li>
<li>Constant temperature zone 600mm ±1°C at 1000°C (three-point measurement)</li>
<li>0~1100°C heating time for 2 hours</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612092639661.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Need to have <a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet Bench(Open New Windows)">Wet Bench</a> Only use permission can apply for the use of the oxidation diffusion system.</li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Oxidative Diffusion System <a href="/userfiles/orden/files/20240612092658457.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092712580.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
<li>Management and usage:
<ul>
<li>The furnace tube is reserved for use in four hours as a section, and the applicable furnace tubes are Wet Oxidation, P<sup>+</sup> Annealing, N<sup>+</sup> Annealing, Dry Oxidation and other furnace tubes.</li>
<li>Each furnace tube has a maximum of three sections (three sections) for the reserved process use time, and the same furnace tube is reserved for a maximum of two (including two) process use times within a week.</li>
<li>Reservation method: You can make reservations for the current week and the next week together every week.</li>
<li>If the reservation is cancelled due to an unexpected situation, which makes it impossible to operate the equipment within the reservation period, the reservation registration should be cancelled three hours before the reservation. Other users operate and use it.</li>
<li>Those who fail to show up for more than 30 minutes will be deemed to have cancelled the reservation, and the time slot can be used by other users.</li>
<li>After the experiment is completed, the use record book should be filled out. </li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Delegate to operate the instrument:</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092731516.odt" rel="noreferrer noopener" target="_blank" title="Oxidation Diffusion System OEM Application Form(odt)(Open New Windows)">Oxidation Diffusion System OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612092731516.odt" rel="noreferrer noopener" target="_blank" title="Oxidation Diffusion System OEM Application Form(odt)(Open New Windows)">Oxidation Diffusion System OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">This center stipulates that the maximum temperature is 1100oC, for 3″ and 4″ wafers, with a maximum of 25 wafers at a time.</li>
<li class="ed_txt">Parts of an hour are counted as one hour.</li>
<li class="ed_txt">The wafer entering the furnace tube must be cleaned first. Please refer to the cleaning fee for details. <a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet_Bench(Open New Windows)">Wet_Bench</a> Fee Schedule.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operation: charge start-up fee + production fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + production fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a><br />
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169172716977131520&init=YOxidative Diffusion Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[Low Pressure Chemical Vapor Deposition System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Low pressure chemical vapor deposition system" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168722692765913088&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e4%bd%8e%e5%a3%93%e5%8c%96%e5%ad%b8%e6%b0%a3%e7%9b%b8%e6%b2%89%e7%a9%8d%e7%b3%bb%e7%b5%b1-low-pressure-chemical-vapor-deposition-lpcvd/" rel="noreferrer noopener" target="_blank" title="Low Pressure Chemical Vapor Deposition (LPCVD)(Open New Windows)"><strong>Low Pressure Chemical Vapor Deposition (LPCVD)</strong></a><br />
Brand Model: SJ-10301001-1</li>
<li><strong>Instrument expert: Prof. Liu, Po-Tsun</strong><br />
ext 52994</li>
<li><strong>Instrument consulting and operation services: Mr. Lai, White</strong><br />
Extension 55606, 55616<br />
Email <a href="mailto:white@nycu.edu.tw" title="white@nycu.edu.tw">white@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
<li>ext 55616</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/low-pressure-chemical-vapor-deposition-lpcvd/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
<strong>Instrument Information</strong></div>
<ol>
<li>Brand Model: SJ-10301001-1</li>
<li>Purchase period: December 28, 2014</li>
<li>Place of placement: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li>Function:
<ul>
<li>(1).Chamber: 6″, the length of the uniform temperature zone is 600mm</li>
<li>(2). Vacuum: 5*10<sup>-3</sup> Torr</li>
<li>(3). Temperature: POLY-Si-620°C, Si3N4-800°C, TEOS-700°C</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>(1).Poly-Si in-situ phosphine (Poly-Si in-situ PH3): Temperature: 585°C Gas: SiH4, PH3 Pressure: 500mtorr</li>
<li>(2). Polycrystalline silicon and amorphous silicon deposition (poly-Si & amorphous-Si), silicon germanium deposition (SiGe): temperature: 620°C/550°C gas: SiH4, GeH4 pressure: 300mtorr</li>
<li>(3). Deposition of Silicon Nitride (Si3N4): Temperature: 800°C/850°C Gas: SiH2Cl2, NH3 Pressure: 120mtorr</li>
<li>(4). Deposition of TEOS: Temperature: 700°C Gas: TEOS Pressure: 120mtorr</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612092823770.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Need to have<a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet Bench(Open New Windows)">Wet Bench</a>Only use permission can apply to use the LPCVD system.</li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li>(1).<a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li>(2).<a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li>(3).<a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>(4).LPCVD instrument <a href="/userfiles/orden/files/20240612092843979.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092904979.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>(1).<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li>(2).<a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092929509.odt" rel="noreferrer noopener" target="_blank" title="LPCVD OEM Application Form(odt)(Open New Windows)">LPCVD OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly<a href="/userfiles/orden/files/20240612092948721.odt" rel="noreferrer noopener" target="_blank" title=" LPCVD OEM Application Form(odt)(Open New Windows)"> LPCVD OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Self-operation: charge start-up fee + production fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + production fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168722692765913088&init=YLow pressure chemical vapor deposition systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Plasma Assisted Chemical Vapor Deposition System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168726640084127744&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%bb%e6%bc%bf%e8%bc%94%e5%8a%a9%e5%8c%96%e5%ad%b8%e6%b0%a3%e7%9b%b8%e6%b2%89%e7%a9%8d%e7%b3%bb%e7%b5%b1-plasma-enhanced-chemical-vapor-deposition-pecvd/" rel="noreferrer noopener" target="_blank" title="Plasma-Enhanced Chemical Vapor Deposition (PECVD)(Open New Windows)"><strong>Plasma-Enhanced Chemical Vapor Deposition (PECVD)</strong></a><br />
Brand Model: Samco</li>
<li><strong>Instrument expert: Prof. Lin, Horng-Chih</strong><br />
ext 54193</li>
<li><strong>Instrument consulting and operation services: Mr. Lai, White</strong><br />
Extension 55606, 55616<br />
Email <a href="mailto:white@nycu.edu.tw" title="white@nycu.edu.tw">white@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55666</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/plasma-enhanced-chemical-vapor-deposition-pecvd/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
<strong>Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: Samco</li>
<li class="ed_txt">Year of purchase: July 1998</li>
<li class="ed_txt">Place of placement: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666) </li>
<li class="ed_txt">Function: grow thin films such as SiO2 and Si3N4</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">Usable wafer size: Fragment to 4 inches</li>
<li class="ed_txt">Single cavity: Chamber temperature 300°C</li>
<li class="ed_txt">The gases used include: N2O, NH3, CF4, SiH4+Ar, N2, etc., which can provide low temperature film deposition of SiO2 and Si3N4</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612093029708.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>.PECVD instrument <a href="/userfiles/orden/files/20240612093056079.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612093111888.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612093126067.odt" rel="noreferrer noopener" target="_blank" title="PECVD OEM Application Form(odt)(Open New Windows)">PECVD OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612093126067.odt" rel="noreferrer noopener" target="_blank" title="PECVD OEM Application Form(odt)(Open New Windows)">PECVD OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li>charging method
<ul>
<li>Self-operation: charge start-up fee + production fee</li>
<li>Entrusted operation: charge start-up fee + production fee + OEM fee</li>
</ul>
</li>
<li><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168726640084127744&init=YPlasma Assisted Chemical Vapor Deposition Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[Dielectric Active Ion Etching System A]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Dielectric Active Ion Etching System A" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168734453216841728&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e4%bb%8b%e9%9b%bb%e6%9d%90%e6%96%99%e6%b4%bb%e6%80%a7%e9%9b%a2%e5%ad%90%e8%9d%95%e5%88%bb%e7%b3%bb%e7%b5%b1-adielectric-materials-reactive-ion-etching-system-rie-400ip/" rel="noreferrer noopener" target="_blank" title="Dielectric Materials Reactive Ion Etching System, RIE-400iP(Open New Windows)"><strong>Dielectric Materials Reactive Ion Etching System, RIE-400iP</strong></a><br />
Brand model: RIE-400iP made by SamCo, Japan</li>
<li><strong>Instrument expert: Prof. Tsui, Bing-Yue</strong><br />
ext 31570</li>
<li><strong>Equipment management personnel: Mr. Hu, Jack</strong><br />
Extension 55607, 55666<br />
Email <a href="mailto:jackhu@nycu.edu.tw" title="jackhu@nycu.edu.tw">jackhu@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr.</strong> <strong>Lee, James</strong><br />
Extension 55660, 55666<br />
Email <a href="mailto:cwlee@nycu.edu.tw" title="cwlee@nycu.edu.tw">cwlee@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 121, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55610</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/dielectric-materials-reactive-ion-etching-system-rie-400ip-1/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: RIE-400iP manufactured by SamCo Corporation of Japan.</li>
<li>Purchase period: March 4, 2019.</li>
<li>Location: Laboratory 121, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55610). </li>
<li>Function: dry etching, mainly etching silicon carbide (SiC), and can etch dielectric (SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>) material, 4″ wafer-based.</li>
<li>Important specifications: This etching system can be fed with C4F8, O2, SF6, CHF3 and other gases to etch silicon carbide (SiC) and dielectric (SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>).</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612093306812.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li>Material Restrictions:
<ul>
<li>(1) Limited to silicon carbide (SiC) substrates and Si substrates.</li>
<li>(2). The test piece shall not be doped with metal elements or plated with metal films.</li>
<li>(3). The test piece shall not pass through the post-processing machine.</li>
</ul>
</li>
<li>Please explain in detail what substances are on the substrate (such as Poly-Si, SiO2, Si3N4, photoresist, etc.), and whether to clean the wafer.</li>
<li>If there is no special requirement for etching, it will be done according to the standard process parameters of the center.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>RIE-400iP instrument <a href="/userfiles/orden/files/20240612093358820.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specification</a>s & <a href="/userfiles/orden/files/20240612093418056.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612093433796.odt" rel="noreferrer noopener" target="_blank" title="RIE-400iP OEM Application Form(odt)(Open New Windows)">RIE-400iP OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612093433796.odt" rel="noreferrer noopener" target="_blank" title="RIE-400iP OEM Application Form(odt)(Open New Windows)">RIE-400iP OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Do it yourself: charge a fee</li>
<li class="ed_txt">Entrusted operation: charging usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>References<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://irc.ord.nycu.edu.tw/en/news/pc_news/20220810-nstc/" rel="noreferrer noopener" target="_blank" title="2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video(Open New Windows)">2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video</a></div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168734453216841728&init=YDielectric Active Ion Etching System Ahttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=09960a93-175f-47a7-ae1f-082eec10162bDielectric Materials Reactive Ion Etching System B
- <![CDATA[Dielectric Materials Reactive Ion Etching System B]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="REACTIVE ION ETCHING SYSTEM FOR DIELECTRIC MATERIALS B" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168731341475287040&init=N" /></div>
<div class="ed_list">
<ul>
<li><strong><a href="https://nanofc.web.nycu.edu.tw/%e4%bb%8b%e9%9b%bb%e6%9d%90%e6%96%99%e6%b4%bb%e6%80%a7%e9%9b%a2%e5%ad%90%e8%9d%95%e5%88%bb%e7%b3%bb%e7%b5%b1-bdielectric-materials-reactive-ion-etching-system-rie-200l/" rel="noreferrer noopener" target="_blank" title="Dielectric Materials Reactive Ion Etching System, RIE 200L(Open New Windows)">Dielectric Materials Reactive Ion Etching System, RIE 200L</a></strong><br />
Brand model: RIE200L made by SamCo, Japan</li>
<li><strong>Instrument expert: Prof. Tsui, Bing-Yue</strong><br />
ext 31570</li>
<li><strong>Equipment management personnel: Mr. </strong> <strong>Hu, Jack</strong><br />
Extension 55607, 55666<br />
Email <a href="mailto:jackhu@nycu.edu.tw" title="jackhu@nycu.edu.tw">jackhu@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr. Lee, James </strong><br />
Extension 55660, 55666<br />
Email <a href="mailto:cwlee@nycu.edu.tw" rel="noreferrer noopener" target="_blank" title="cwlee@nycu.edu.tw(Open New Windows)">cwlee@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55666</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/dielectric-materials-reactive-ion-etching-system-rie-200l/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
<strong>Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand model: RIE200L made by SamCo, Japan</li>
<li class="ed_txt">Purchase period: December 1, 2002</li>
<li class="ed_txt">Place of placement:Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666)</li>
<li class="ed_txt">Function: etching silicon dioxide, silicon nitride and other materials</li>
<li class="ed_txt">Important Specifications: The RF generator can output a maximum of 300W and a frequency of 13.56MHz. The etching system can enter CF4, O2, SF6, CHF3 and other gases to etch materials such as silicon dioxide and silicon nitride.</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612093526283.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Please explain in detail what substances are contained on the substrate (such as SiO2, Si3N4, Metal, photoresist, etc.).</li>
<li class="ed_txt">If there are no special requirements for etching, it will be done according to the central standard process:
<ul>
<li class="ed_txt">SiOx : (RIE mode) 300 ~400 Å/min 100W,4Pa.</li>
<li class="ed_txt">SiNx : (RIE mode) 900~1000 Å/min 100W,4Pa.</li>
</ul>
</li>
<li class="ed_txt">The wafer shall not contain Ag, Au, Cu, Fe, Ni, Zn, LiNbO3, In, Pb, Sn, ITO and other components.</li>
<li class="ed_txt">Metal must not be exposed.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>RIE 200L instrument <a href="/userfiles/orden/files/20240612093651768.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612093712312.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the permission to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612093733383.odt" rel="noreferrer noopener" target="_blank" title="RIE 200L OEM Application Form(odt)(Open New Windows)">RIE 200L OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612093747633.odt" rel="noreferrer noopener" target="_blank" title="RIE 200L OEM Application Form(odt)(Open New Windows)">RIE 200L OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Do it yourself: charge a fee</li>
<li class="ed_txt">Entrusted operation: charging usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>References<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://irc.ord.nycu.edu.tw/en/news/pc_news/20220810-nstc/" rel="noreferrer noopener" target="_blank" title="2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video(Open New Windows)">2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video</a></div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168731341475287040&init=YREACTIVE ION ETCHING SYSTEM FOR DIELECTRIC MATERIALS Bhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=cbb45d9b-627f-4b3f-8d7d-f51c4c51ee6aDielectric Active Ion Etching System A
- <![CDATA[Cold Field Emission Scanning Electron Microscope & Energy Dispersive]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Cold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrument" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168742033137864704&init=N" /></div>
<div class="ed_list">
<ul>
<li><strong><a href="https://nanofc.web.nycu.edu.tw/%e5%86%b7%e5%a0%b4%e7%99%bc%e5%b0%84%e6%8e%83%e6%8f%8f%e5%bc%8f%e9%9b%bb%e5%ad%90%e9%a1%af%e5%be%ae%e9%8f%a1%e6%9a%a8%e8%83%bd%e9%87%8f%e6%95%a3%e4%bd%88%e5%88%86%e6%9e%90%e5%84%80%e5%99%a8-sem-su-80/" rel="noreferrer noopener" target="_blank" title="SEM SU-8010(Open New Windows)">SEM SU-8010</a></strong><br />
Brand Model: Hitachi SU-8010</li>
<li><strong>Instrument expert: Prof. Tan, Chih-Shan</strong><br />
ext 54146</li>
<li><strong>Instrument consulting and operation services: Ms. Fan, Hsiu-Lan</strong><br />
Ext. 55337, 55672<br />
Email <a href="mailto:shiulan@nycu.edu.tw" title="shiulan@nycu.edu.tw">shiulan@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus</strong><br />
ext 55337</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/cold-field-emission-scanning-electron-microscope-hitachi-su8010-energy-dispersive-spectrometer-sem-su-8010/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand Model: Hitachi SU-8010</li>
<li>Purchase period: October 2013</li>
<li>Place of placement: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus (TEL: 55337) </li>
<li>Function:
<ul>
<li>Electron Microscope Observation (SEM): High-magnification magnification to observe the microstructure or cross-sectional structure of components, films, etc.</li>
<li>Surface energy level analysis (EDS): electron energy level spectrum analysis of surface material composition at a specific location to determine the composition of surface material or pollution</li>
<li>Pre-treatment of test piece: newly purchased ion mill, with section grinding & surface grinding function, to help make the surface of the test piece smoother and facilitate SEM observation</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>Electron source: cold cathode electron gun</li>
<li>Operating voltage: 0.1kV~30kV</li>
<li>Specimen size: 50mm diameter x 50mm diameter</li>
<li>Resolution: 10A° (at 15kV) or 13A° (at 1kV)</li>
<li>The magnification is 20 times to 800,000 times (depending on the test piece itself)</li>
<li>Secondary electron resolution 1.0nm (under 15kV)</li>
<li>EDS can provide full spectrum qualitative analysis (Be<sup>4</sup>~U<sup>92</sup>), semi-quantitative analysis and element distribution map</li>
<li>Gas used in the ion mill: Argon (Ar)</li>
<li>Profile grinding range X: ≥ 7mm Y: ≥ 3mm</li>
<li>Surface grinding speed: 0°: ≥2μm/hr 60°: ≥20μm/hr</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612093820796.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Materials restricted by SEM</strong></div>
<ol>
<li class="ed_txt">Magnetic materials (including iron, cobalt, nickel components)</li>
<li class="ed_txt">Organics, polymers, powders and other materials</li>
<li class="ed_txt">All materials that decompose or release highly volatile substances or gases upon exposure to electron beams</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix"><strong>self-operated instrument</strong>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>SEM8010 instrument <a href="/userfiles/orden/files/20240612093846711.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612093901475.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people(Open New Windows)">Instrument opening level and number of people</a>3. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="country(Open New Windows)">country</a><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="countryThe basic research core facility reservation service management system of the Science Association(Open New Windows)">The basic research core facility reservation service management system of the Science Association</a> (get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612093918739.odt" rel="noreferrer noopener" target="_blank" title="SEM8010 OEM Application Form(odt)(Open New Windows)">SEM8010 OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612093918739.odt" rel="noreferrer noopener" target="_blank" title="SEM8010 OEM Application Form(odt)(Open New Windows)">SEM8010 OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Please bring your own conductive tape or thermal paper (K65HM).</li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Self-operation: Set-up fee is charged (excluding sample surface coating/EDS)</li>
<li class="ed_txt">Entrusted operation: start-up fee + OEM fee (excluding sample surface coating/EDS)</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168742033137864704&init=YCold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrumenthttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[Dual beam [focused ion beam & electron beam] System (FIB)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="DUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEM" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168746622876651520&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e8%81%9a%e7%84%a6%e9%9b%a2%e5%ad%90%e6%9d%9f%e8%88%87%e9%9b%bb%e5%ad%90%e6%9d%9f%e9%a1%af%e5%be%ae%e7%b3%bb%e7%b5%b1-dual-beam-focused-ion-beam-electron-beam-system-fib/" rel="noreferrer noopener" target="_blank" title="Dual beam [focused ion beam & electron beam] System FIB(Open New Windows)"><strong>Dual beam [focused ion beam & electron beam] System FIB</strong></a><br />
Brand model: TESCAN GAIA3</li>
<li><strong>Instrument expert: Prof. Wu, Yew-Chung</strong><br />
ext 31555</li>
<li><strong>Instrument expert: Prof. Tsui, Bing-Yue</strong><br />
ext 31570</li>
<li><strong>Equipment management personnel: Mr. Chao , Jerry</strong> <br />
Extension 55670, 55368<br />
Email<a href="mailto:mailto:jychaoa@nycu.edu.tw" title=" jychaoa@nycu.edu.tw"> jychaoa@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 213, Engineering Sixth Building, Guanfu Campus</strong><br />
ext 55368</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/dual-beam-focused-ion-beam-electron-beam-system-fib/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: TESCAN GAIA3</li>
<li>Purchase period: December 18, 2017</li>
<li>Place of placement: Room 213, Engineering Sixth Building, Guanfu Campus (TEL: 55368) </li>
<li>Function:
<ul>
<li>Preparation of in-situ and ex-situ TEM specimens for transmission electron microscopy</li>
<li>Nanostructure manufacturing process: manufacturing process and observation of specific pattern structure of nanomaterials and components</li>
<li>Production and observation of cross-sectional test pieces: cutting and image recording of cross-sectional test pieces</li>
<li>Platinum deposition: platinum coating and image recording</li>
<li>Observation and analysis of abnormality in the process: circuit repair, cutting, coating and image recording of solid-state electronic components</li>
<li>Crystal phase analysis and observation</li>
<li>The machine is equipped with energy dispersive mass spectrometer (EDX), which can be used for qualitative and semi-quantitative analysis of elemental components</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>Electron source: field emission type</li>
<li>Ion source: Ga liquid metal ion source</li>
<li>Accelerating voltage: electron beam—200V~30kV, ion beam—</li>
<li>500V~30kV</li>
<li>Image resolution: SEM—1.5nm at 15kV, FIB—2.5nm at 30kV</li>
<li>Working distance: 5mm</li>
<li>Specimen specification: diameter (10mm dia ) x height (<0.50cm)</li>
<li>Magnification SEM: 4x~1Mx, FIB: 150x~1Mx</li>
<li>GIS, Pt, SiO<sub>2</sub></li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612093958603.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li>Restricted use of FIB machine materials:
<ul>
<li>Magnetic materials</li>
<li>All powder and other electron beams will decompose or release gaseous materials</li>
<li>Substances with low melting point</li>
<li>The alloy material contains magnetic material higher than 5%</li>
</ul>
</li>
<li>The user must explain the production method of the test piece in detail. If the vacuum chamber may be polluted, the unit has the right to refuse to accept it. Those who make an appointment should fill in the application form three days before the experiment (please draw the top view and cross-section of the sample and the observation position, and indicate the material and thickness of each layer), and send the file to the technical staff for review.</li>
<li>If the machine is damaged or polluted due to improper handling of the test piece, it shall be liable for compensation. The compensation fee is evaluated by the original factory and implemented after the decision of the management committee.</li>
<li>The diameter of the test piece is about 10mm dia, and the height is less than 0.5cm. If it is a special size, please contact the administrator in advance to confirm whether it is suitable for the experiment.</li>
<li>Semiconductor, poor conductivity and insulator test pieces need to be coated with a conductive film (gold or platinum is preferred), and no coating treatment is provided on site.</li>
<li>Please bring your own blank disc to access the data. In order to avoid equipment poisoning, disable the USB flash drive for image file transfer.</li>
<li>Please prepare your own copper mesh for TEM test piece production. One piece is produced every 3 hours, and the client and the teaching assistant work together to place the test piece on the self-provided copper grid using OM. Because the material of the test piece will affect the adsorption effect of the glass needle, if the copper mesh is not successfully placed, it will not be supplemented.</li>
<li>Other payment instructions:
<ul>
<li>Platinum electrode payment: no charge for platinum electrode plating time within 0.1%. The pricing method of more than 0.1% is 200 yuan in cash per 0.1%. Please take the payment note to the Nano Center for payment after the experiment</li>
<li>EDX payment: The EDX of this machine can be used for Mapping / Line Scan / qualitative and semi-quantitative analysis, with an additional charge of 600 yuan per hour.</li>
</ul>
</li>
<li>If the sample is found to be non-compliant during the analysis and testing, the sample will be returned and paid for the time slot of its appointment. Please send the experimental samples for testing. The user should be present to explain the content to be analyzed.</li>
<li>The reservation limit of your instrument system is: each program host can only make two reservations per month. The machine opening appointment time is 9:00 am on the 25th of each month, and the next month's experiment will be reserved. If you need to cancel the experiment time after the appointment, please log in to your system five days before to cancel, otherwise you will still need to deduct.</li>
<li>Self-operation: From 9:00 a.m. on the 25th of each month, make an appointment for the experiment from the 1st to the 15th of the next month; from 9:00 a.m. on the 10th of the current month, make an appointment for the experiment from the 16th to the end of the month, each person is limited to one appointment per echelon. The reservation needs to be canceled 2 days before: If the cancellation is not made 2 days before, the payment will not be deducted; And if no one can use it as a substitute during this period, a fee will be charged.</li>
<li>If you fail to make an appointment without a reason, the time slot will be automatically deducted; if you are more than 15 minutes late, the appointment time slot will be deducted and the service will be cancelled.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/fib%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%96%b9%e5%bc%8f/" rel="noreferrer noopener" target="_blank" title="How to apply(Open New Windows)">How to apply</a></li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>FIB instrument <a href="/userfiles/orden/files/20240612094019625.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612094035511.pdf" rel="noreferrer noopener" target="_blank" title="Examination content(pdf)(Open New Windows)">Examination content</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>In the event of a national holiday, machine failure maintenance or replacement of consumables during the reservation period, the period will be cancelled and will not be made up.</li>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>management system (get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>management systemMake an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612094054829.odt" rel="noreferrer noopener" target="_blank" title="FIB OEM Application Form(odt)(Open New Windows)">FIB OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612094054829.odt" rel="noreferrer noopener" target="_blank" title="FIB OEM Application Form(odt)(Open New Windows)">FIB OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Please bring your own blank CD</li>
<li class="ed_txt">Cash charges for consumables (NT$500 per test strip cleaning)</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168746622876651520&init=YDUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEMhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[High Density Plasma Active Ion Etching System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="High Density Active Ion Etching System" src="/userfiles/ordch/images/20231019162747863.jpg" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e9%ab%98%e5%af%86%e5%ba%a6%e6%b4%bb%e6%80%a7%e9%9b%a2%e5%ad%90%e8%9d%95%e5%88%bb%e7%b3%bb%e7%b5%b1-high-density-plasma-reactive-ion-etching-system-hdp-rie/" rel="noreferrer noopener" target="_blank" title="High Density Plasma Reactive Ion Etching System, HDP-RIE(Open New Windows)"><strong>High Density Plasma Reactive Ion Etching System, HDP-RIE</strong></a><br />
Brand Model: Qingkang Technology</li>
<li><strong>Instrument expert: Prof. Chen, Kuan-Neng</strong><br />
ext 31558</li>
<li><strong>Equipment management personnel: Mr. Hu, Jack</strong><br />
Extension 55607, 55666<br />
Email <a href="mailto:jackhu@nycu.edu.tw" title="jackhu@nycu.edu.tw">jackhu@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr. Lee, James</strong><br />
Extension 55660, 55666<br />
Email <a href="mailto:cwlee@nycu.edu.tw" title="cwlee@nycu.edu.tw">cwlee@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55666</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/high-density-plasma-reactive-ion-etching-system-hdp-rie/" title="Link to Nano Center Introduction Page"><strong>Link to Nano Center Introduction Page</strong></a><br />
<br />
<strong>Instrument Information</strong></div>
<ol>
<li>Brand Model: SAMCO – RIE-10N</li>
<li>Purchase period: March 1999</li>
<li>Place of placement: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666) </li>
<li>Function: dry etching, mainly etching Al material</li>
<li>IMPORTANT SPECIFICATIONS: Use Gas Contains BCl<sub>3</sub>, Cl<sub>2</sub>、CF<sub>4</sub>、CHF<sub>3</sub>, Ar, O<sub>2</sub>, SF<sub>6</sub>, ICP RF maximum power 900W, Bias RF maximum power 300W, cooled by He gas system, mainly 4″ wafer</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612094135109.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li>Please specify the material of the substrate wafer, what kind of substance is contained on it (such as SiO<sub>2</sub>, photoresist, etc.) and whether to clean the wafer.</li>
<li>If there is no special requirement for etching, it will be done according to the central standard process.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>HDP-RIE instrument <a href="/userfiles/orden/files/20240612094156818.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612094212750.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612094251944.odt" rel="noreferrer noopener" target="_blank" title="HDP-RIE OEM Application Form(odt)(Open New Windows)">HDP-RIE OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612094312557.odt" rel="noreferrer noopener" target="_blank" title="HDP-RIE OEM Application Form(odt)(Open New Windows)">HDP-RIE OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Do it yourself: charge a fee</li>
<li class="ed_txt">Entrusted operation: charging usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a><br />
</li>
</ol>
</div>References<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://irc.ord.nycu.edu.tw/en/news/pc_news/20220810-nstc/" rel="noreferrer noopener" target="_blank" title="2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video(Open New Windows)">2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video</a></div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168760241987260416&init=YHigh Density Active Ion Etching Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=b0eb6b98-f5d6-41d5-84c6-cc35e6ce12a9Shallow Si RIEhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=808d86c1-e68b-4c05-93cd-0a4b85ed637bSi Deep-RIE
- <![CDATA[Si Deep-RIE]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Silicon Deep Etch System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168759059810095104&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e7%9f%bd%e6%b7%b1%e8%9d%95%e5%88%bb%e7%b3%bb%e7%b5%b1si-deep-rie/" rel="noreferrer noopener" target="_blank" title="Si Deep-RIE(Open New Windows)">Si Deep-RIE</a><br />
Brand Model: Oxford Estrelas 100</li>
<li><strong>Instrument expert: Prof.</strong> <strong>Chen, Kuan-Neng</strong><br />
ext 31558</li>
<li><strong>Equipment management personnel: Mr. Hu, Jack</strong><br />
Extension 55607, 55666<br />
Email <a href="mailto:jackhu@nycu.edu.tw" title="jackhu@nycu.edu.tw">jackhu@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr. Lee, James</strong><br />
Extension 55660, 55666<br />
Email <a href="mailto:cwlee@nycu.edu.tw" title="cwlee@nycu.edu.tw">cwlee@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55666</li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/si-deep-rie/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model:Oxford Estrelas 100</li>
<li class="ed_txt">Purchase period: December 2016</li>
<li class="ed_txt">Place of placement:Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666)</li>
<li class="ed_txt">Function: dry etching, mainly silicon deep etching (Bosch Process)</li>
<li class="ed_txt">Important specifications: The gas used includes C4F8, SF6, CHF3, CF4, Ar, O2, cooled by He gas system, mainly 4″ wafer</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612094413281.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Please specify the material of the substrate wafer, what kind of substances (such as SiO2, photoresist, etc.) are contained on it, and whether to remove the photoresist after etching (an additional Wet Bench application form is required).</li>
<li class="ed_txt">Silicon deep etching sample preparation please follow <a href="/userfiles/orden/files/20240612094435521.pdf" rel="noreferrer noopener" target="_blank" title="Test piece regulations(pdf)(Open New Windows)">Test piece regulations</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Si Deep-RIE instrument <a href="/userfiles/orden/files/20240612094454254.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612094513871.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612094532399.odt" rel="noreferrer noopener" target="_blank" title="Si Deep-RIE OEM Application Form(odt)(Open New Windows)">Si Deep-RIE OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612094546380.odt" rel="noreferrer noopener" target="_blank" title="Si Deep-RIE OEM Application Form(odt)(Open New Windows)">Si Deep-RIE OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Do it yourself: charge a fee</li>
<li class="ed_txt">Entrusted operation: charging usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>References<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://irc.ord.nycu.edu.tw/en/news/pc_news/20220810-nstc/" rel="noreferrer noopener" target="_blank" title="2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video(Open New Windows)">2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video</a></div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168759059810095104&init=YSilicon Deep Etch Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=b0eb6b98-f5d6-41d5-84c6-cc35e6ce12a9Shallow Si RIEhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=27dd564a-8602-4dbb-8056-22d5c1c20815High Density Plasma Active Ion Etching System
- <![CDATA[Shallow Si RIE]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Silicon shallow etching system" src="/userfiles/ordch/images/20231019164120559.jpg" /></div>
<div class="ed_model11 clearfix">
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e7%9f%bd%e6%b7%b1%e8%9d%95%e5%88%bb%e7%b3%bb%e7%b5%b1shallow-si-rie/" rel="noreferrer noopener" target="_blank" title="Shallow Si RIE(Open New Windows)"><strong>Shallow Si RIE</strong></a><br />
Brand Model: Gigalane Maxis 200L</li>
<li><strong>Instrument expert: Prof. Chen, Kuan-Neng</strong><br />
ext 31558<br />
Email <a href="mailto:knchen@nycu.edu.tw" title="knchen@nycu.edu.tw">knchen@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr. Hu, Jack</strong><br />
Extension 55607, 55666<br />
Email <a href="mailto:jackhu@nycu.edu.tw" title="jackhu@nycu.edu.tw">jackhu@nycu.edu.tw</a></li>
<li><strong>Equipment management personnel: Mr.</strong> <strong>Lee, James</strong><br />
Extension 55660, 55666<br />
Email <a href="mailto:cwlee@nycu.edu.tw" title="cwlee@nycu.edu.tw">cwlee@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
<li>ext 55616</li>
</ul>
</div>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<p><strong><a href="https://nanofc2.web.nycu.edu.tw/shallow-si-rie/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></p>
<ol>
<li>Brand Model: Gigalane Maxis 200L</li>
<li>Purchase period: January 2022</li>
<li>Place of placement: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)</li>
<li>Function: dry etching, high selectivity silicon shallow etching (Si/SiO<sub>2</sub>)</li>
<li>Important Specifications: The gas used contains HBr, Cl<sub>2</sub>、CF<sub>4</sub>, Ar, O2, cooled by He gas system, mainly 4″ wafer</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612094609859.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
<p> </p>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Please specify the material of the base wafer, what kind of substances (such as SiO2, photoresist, etc.) are contained on it, and whether to remove the photoresist after etching (an additional Wet Bench application form is required).</li>
<li class="ed_txt">Front-end chips.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Do-it-yourself regulations</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a>(Use permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a>(A daytime permission is required to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a>(Be sure to read carefully, so as not to lose your own rights and interests)</li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the permission to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:</li>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a>(Reservation for use time slot)</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612094632650.odt" rel="noreferrer noopener" target="_blank" title="RIE commissioned OEM application form(odt)(Open New Windows)">RIE commissioned OEM application form</a>, send the completed application form and materials to<strong>nanocenter</strong>(2F, solid-state electronic system building of our school) to assist the management personnel of each instrument in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612094647571.odt" rel="noreferrer noopener" target="_blank" title="RIE commissioned OEM application form(odt)(Open New Windows)">RIE commissioned OEM application form</a>, send the completed application form and materials to<strong>nanocenter</strong>(2F, solid-state electronic system building of our school) to assist the management personnel of each instrument in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Do it yourself: charge a fee</li>
<li class="ed_txt">Entrusted operation: charging usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168750751141335040&init=YSilicon shallow etching systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=808d86c1-e68b-4c05-93cd-0a4b85ed637bSi Deep-RIEhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=27dd564a-8602-4dbb-8056-22d5c1c20815High Density Plasma Active Ion Etching System
- <![CDATA[Thermal Evaporation Coater]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Thermal Resistance Wire Evaporation System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169150978331512832&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e7%86%b1%e9%98%bb%e7%b5%b2%e8%92%b8%e9%8d%8d%e7%b3%bb%e7%b5%b1-thermal-evaporation-coater/" rel="noreferrer noopener" target="_blank" title="Thermal Evaporation Coater(Open New Windows)"><strong>Thermal Evaporation Coater</strong></a><br />
Brand Model: Japan ULVAC EBX-6D</li>
<li class="ed_txt"><strong>Instrument expert: Prof.</strong> <strong>Cheng, Yu-Ting</strong><br />
ext 54169</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Jeng, Hung Lin</strong><br />
Extension 55657, 55608<br />
Email <a href="mailto:mailto:hljeng@nycu.edu.tw" title="hljeng@nycu.edu.tw">hljeng@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-05-14Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/thermal-evaporation-coater/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand Model: Japan ULVAC EBX-6D</li>
<li>Purchase period: January 1995</li>
<li>Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608) </li>
<li>Function: thin film evaporation (mainly used for the evaporation of aluminum metal)</li>
<li>Important specs:
<ul>
<li>Pumping system: RP+ diffusion pump, minimum pressure 2.0E<sup>–</sup>6 Torr</li>
<li>Substrate size: 8 4-inch wafers or 5 6-inch wafers</li>
<li>Coating uniformity: within ±5% (4-inch substrate)</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612094716193.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Thermal Coater instrument <a href="/userfiles/orden/files/20240612100024111.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612100045208.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612100104500.odt" rel="noreferrer noopener" target="_blank" title="Thermal Coater OEM Application Form(odt)(Open New Windows)">Thermal Coater OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612100104500.odt" rel="noreferrer noopener" target="_blank" title="Thermal Coater OEM Application Form(odt)(Open New Windows)">Thermal Coater OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">Material cost is extra (according to the different needs of coating thickness and material) 4 inches 8 pieces, 6 inches 5 pieces.</li>
<li class="ed_txt">Contaminating materials such as copper (Cu) and gold (Au) cannot be plated.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operated: Start-up fee + material fee charged</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + foundry fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169150978331512832&init=YThermal Resistance Wire Evaporation Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=633ba148-e25a-4e1e-9249-456a337fa857Dual E-Gun Evaporation System Bhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=d03012fb-5857-45ef-bdbf-7359e9ae8e56Dual E-Gun Evaporation System A
- <![CDATA[Dual E-Gun Evaporation System A]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Double electron gun evaporation system A" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169151894468169728&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%99%e9%9b%bb%e5%ad%90%e6%a7%8d%e8%92%b8%e9%8d%8d%e7%b3%bb%e7%b5%b1-a-dual-e-gun-evaporation-system-a/" rel="noreferrer noopener" target="_blank" title="Dual E-Gun Evaporation System A(Open New Windows)"><strong>Dual E-Gun Evaporation System A</strong></a><br />
Brand model: Japan ULVAC EBX-10C</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Cheng, Yu-Ting</strong><br />
ext 54169</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Jeng, Hung Lin</strong><br />
Extension 55657, 55608<br />
Email <a href="mailto:mailto:hljeng@nycu.edu.tw" title="hljeng@nycu.edu.tw">hljeng@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-05-14Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/dual-e-gun-evaporation-system-a/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: Japan ULVAC EBX-10C</li>
<li>Year of purchase: May 1993</li>
<li>Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608) </li>
<li>Function: Can be used for multi-layer thin film evaporation (limited to materials commonly used in semiconductor processes)</li>
<li>Important specs:
<ul>
<li>EB gun Model EGK-3M*2.5kw EB power 2 units</li>
<li>Pumping system: RP + Cryo pump U-10 pu (2300 L/SN<sub>2</sub>), minimum pressure 2*10¯6Torr</li>
<li>Substrate size: 18 4-inch wafers or 3 6-inch wafers + 6 4-inch wafers</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612094855496.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>E-Gun (A) instrument <a href="/userfiles/orden/files/20240612100145826.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612100159495.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the permission to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612100259645.odt" rel="noreferrer noopener" target="_blank" title="E-Gun (A) OEM Application Form(odt)(Open New Windows)">E-Gun (A) OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612100259645.odt" rel="noreferrer noopener" target="_blank" title="E-Gun (A) OEM Application Form(odt)(Open New Windows)">E-Gun (A) OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">Material fee is extra
<ul>
<li class="ed_txt">A full load can hold 18 4-inch or 3-inch wafers, or 3 6-inch wafers plus 6 4-inch or 3-inch wafers.</li>
<li class="ed_txt">Bring your own Pt. Please prepare particles with a purity of 99.99%. A new 3cc graphite crucible suitable for ULVAC machines should be filled at least 90% full. For those who prepare their own materials, the center will not be responsible for any loss of crucibles and materials caused by the operation process.</li>
<li class="ed_txt">The maximum thickness of Pt per RUN is 50nm.</li>
</ul>
</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operated: Start-up fee + material fee charged</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + foundry fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169151894468169728&init=YDouble electron gun evaporation system Ahttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=39b8b95d-349e-4703-8911-6d780a18ede3Thermal Evaporation Coater
- <![CDATA[Dual E-Gun Evaporation System B]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Dual Electron Gun Evaporation System B" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169091752997425152&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e9%9b%99%e9%9b%bb%e5%ad%90%e6%a7%8d%e8%92%b8%e9%8d%8d%e7%b3%bb%e7%b5%b1-b-dual-e-gun-evaporation-system-b/" rel="noreferrer noopener" target="_blank" title="Dual E-Gun Evaporation System B(Open New Windows)"><strong>Dual E-Gun Evaporation System B</strong></a><br />
Brand model: Japan ULVAC EBX-10C</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Cheng, Yu-Ting</strong><br />
ext 54169</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Jeng, Hung Lin</strong><br />
Extension 55657, 55608<br />
Email <a href="mailto:mailto:hljeng@nycu.edu.tw" title="hljeng@nycu.edu.tw">hljeng@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-05-14Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/dual-e-gun-evaporation-system-b/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: Japan ULVAC EBX-10C</li>
<li>Year of purchase: May 1993</li>
<li>Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608) </li>
<li>Function: thin film evaporation (limited to materials commonly used in semiconductor processes)</li>
<li>Important specs:
<ul>
<li>EB gun Model EGL-35M * 5kw EB power</li>
<li>Cryo pump U-10 pu (2300 L/SN<sub>2</sub>), minimum pressure 3.0E-7 Torr</li>
<li>Substrate size: 4″, 6″</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612095555730.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>E-Gun (B) instrument <a href="/userfiles/orden/files/20240612100425543.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612100439885.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the permission to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a>Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612100459842.odt" rel="noreferrer noopener" target="_blank" title="E-Gun (B) OEM Application Form(odt)(Open New Windows)">E-Gun (B) OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612100459842.odt" rel="noreferrer noopener" target="_blank" title="E-Gun (B) OEM Application Form(odt)(Open New Windows)">E-Gun (B) OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Material cost is extra: a full load can hold 18 pieces of 4-inch wafers, or 9 pieces of 6-inch wafers.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operated: Start-up fee + material fee charged</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + foundry fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a><br />
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169091752997425152&init=YDual Electron Gun Evaporation System Bhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=d03012fb-5857-45ef-bdbf-7359e9ae8e56Dual E-Gun Evaporation System Ahttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=39b8b95d-349e-4703-8911-6d780a18ede3Thermal Evaporation Coater
- <![CDATA[High vacuum coating system]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="High vacuum coating system" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169153389909512192&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/high-vacuum-deposition-system/" rel="noreferrer noopener" target="_blank" title="High Vacuum Deposition System(Open New Windows)"><strong>High Vacuum Deposition System</strong></a><br />
Brand Model: Goldton Technology KD-Cluster</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Cheng, Yu-Tin</strong>g<br />
ext 54169</li>
<li class="ed_txt"><strong>Equipment management personnel: Mr. Huang, Guo-Hua</strong> <br />
Extension 55657, 55608<br />
Email <a href="mailto:mailto:guohua@nycu.edu.tw" title="guohua@nycu.edu.tw">guohua@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-04-16Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/high-vacuum-deposition-system/" rel="noreferrer noopener" target="_blank" title="Link to Nano Center Introduction Page(Open New Windows)">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: Goldton Technology KD-Cluster</li>
<li class="ed_txt">Purchase period: November 2018</li>
<li class="ed_txt">Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608)</li>
<li class="ed_txt">Function: multi-layer thin film sputtering, evaporation</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">High vacuum sample pick and place system. (Sample surface can be plasma cleaned)</li>
<li class="ed_txt">High vacuum sample transfer system. (Maximum 6-inch sample holder can be transferred)</li>
<li class="ed_txt">High vacuum electron beam evaporation system. (Including two sets of 6kw electron beam evaporation sources, two sets of 6kw high-voltage power supplies, and two sets of XY electron beam scanning controllers.)</li>
<li class="ed_txt">High vacuum sputtering system. (Including one DC Power 2 kw and one RF Power 1 kw.)</li>
<li class="ed_txt">Three sets of Holders can be placed at the same time, and each set of Holders can hold 6-inch, 4-inch, 3-inch, 2-inch wafers or fragment holding discs respectively.</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612095726323.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for Obtaining Instrument Usage Permissions
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>HVD System instrument <a href="/userfiles/orden/files/20240612095850639.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612095906677.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/home/Index" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612095927657.odt" rel="noreferrer noopener" target="_blank" title="HVD System OEM Application Form(odt)(Open New Windows)">HVD System OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612095927657.odt" rel="noreferrer noopener" target="_blank" title="HVD System OEM Application Form(odt)(Open New Windows)">HVD System OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model19 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt">Items approved by Guiyi, please make an appointment online if you have a Guiyi account, and pay in cash if you do not have a Guiyi account.</li>
<li class="ed_txt">The cost of materials is extra, and each full load can hold 6-inch, 4-inch, 3-inch or 2-inch chips, a total of 3 pieces.</li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Self-operated: charge start-up fee + material fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt">Fees are as follows
<ul>
<li class="ed_txt">Planned pricing ※The current price of precious metals is set with reference to the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Planned pricing">
<tbody>
</tbody>
<caption>Planned pricing</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit<br />
business<br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">750</td>
<td data-th="research unit">1100</td>
<td data-th="for-profit business unit">1100</td>
</tr>
<tr>
<th scope="row">Sputter Material Fee<br />
(NTD/KA)</th>
<td data-th="school unit">Ti=140 / Ni=170 / Ta=220 / Al=85</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
<tr>
<th scope="row">E-Gun material fee<br />
(NTD/KA)</th>
<td data-th="school unit">Ge=70 / Ti=70 / Mo=60 / Ta=100 / Co=60 / W=60 / Ni=50 / Cr=70 / Si=50 / Pt=current price / Pd=current price</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
</tbody>
</table>
<br />
</div>
</li>
<li class="ed_txt">Unplanned pricing ※The current price of precious metals is set with reference to the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Unplanned pricing">
<tbody>
</tbody>
<caption>Unplanned pricing</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit <br />
business <br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">1500</td>
<td data-th="research unit">11000</td>
<td data-th="for-profit business unit">11000</td>
</tr>
<tr>
<th scope="row">Sputter Material Fee<br />
(NTD/KA)</th>
<td data-th="school unit">Ti=280 / Ni=340 / Ta=440 / Al=170</td>
<td data-th="research unit">Ta=440 / Al=170 Ti=1400 / Ni=1700 / Ta=2200 / Al=850</td>
<td data-th="for-profit business unit">Ti=1400 / Ni=1700 / Ta=2200 / Al=850</td>
</tr>
<tr>
<th scope="row">E-Gun<br />
material fee<br />
(NTD/KA)</th>
<td data-th="school unit">Ge=140 / Ti=140 / Mo=120 / Ta=200 / Co=120 / W=120 / Ni=100 / Cr=140 / Si=100 / Pt=current price / Pd=current price</td>
<td data-th="research unit">Ge=700 / Ti=700 / Mo=600 / Ta=1000 / Co=600 / W=600 / Ni=500 / Cr=700 / Si=500 / Pt=current price / Pd=current price</td>
<td data-th="for-profit business unit">Ge=700 / Ti=700 / Mo=600 / Ta=1000 / Co=600 / W=600 / Ni=500 / Cr=700 / Si=500 / Pt=current price / Pd=current price</td>
</tr>
</tbody>
</table>
</div>
</li>
</ul>
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169153389909512192&init=YHigh vacuum coating systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=8c517baa-f69b-4fa7-b57c-a3a09b1dc6e3Vacuum Sputtering System (A)https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=9a19d78c-3f70-4649-9075-674aab7e1e0dVacuum Sputtering System (B)
- <![CDATA[Vacuum Sputtering System (A)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Vacuum Sputtering System A" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169147367857852416&init=N" /></div>
<ul>
<li class="ed_txt"><strong><a href="https://nanofc.web.nycu.edu.tw/%e7%9c%9f%e7%a9%ba%e6%bf%ba%e9%8d%8d%e7%b3%bb%e7%b5%b1-a-sputtering-system-a/" rel="noreferrer noopener" target="_blank" title="Sputtering System A(Open New Windows)">Sputtering System A</a></strong><br />
Brand model: UK Ion Tech Microvac 450CB</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Cheng, Yu-Ting</strong><br />
ext 54169</li>
<li class="ed_txt"><strong>Equipment management personnel: Mr. Huang, Guo-Hua</strong> <br />
Extension (O) 55657, (L) 55608<br />
Email <a href="mailto:mailto:guohua@nycu.edu.tw" title="guohua@nycu.edu.tw">guohua@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/sputtering-system-a/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand model: British Ion Tech Microvac 450CB</li>
<li class="ed_txt">Purchase period: April 1991</li>
<li class="ed_txt">Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608) </li>
<li class="ed_txt">Function: thin film sputtering</li>
<li class="ed_txt">Important Specifications
<ul>
<li class="ed_txt">Three 4-inch sputtering cathodes</li>
<li class="ed_txt">POWER: DC 1500W*2 and RF: 600W*1</li>
<li class="ed_txt">Can hold 6 4-inch wafers or 3 6-inch wafers</li>
<li class="ed_txt">Gas: MFC for Ar, O2, N2</li>
<li class="ed_txt">Air extraction system: RP + Cryo Pump</li>
<li class="ed_txt">Can be coated with multi-layer film</li>
</ul>
</li>
<li class="ed_txt"> The instrument can be used with <a href="/userfiles/orden/files/20240612100551043.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Self-operated instruments:</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Sputter (A) instrument <a href="/userfiles/orden/files/20240612100957152.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612101117247.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation) </li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Delegate to operate the instrument:</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612101136016.odt" rel="noreferrer noopener" target="_blank" title="Sputter OEM Application Form(odt)(Open New Windows)">Sputter OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612101136016.odt" rel="noreferrer noopener" target="_blank" title="Sputter OEM Application Form(odt)(Open New Windows)">Sputter OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model19 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt">For items approved by Guiyi, those who have a Guiyi account should make an appointment online, and those who do not have a Guiyi account should pay in cash.</li>
<li class="ed_txt">Material fee is extra:
<ul>
<li class="ed_txt">The upper limit of the thickness of precious metal Pt per run is 50 nm.</li>
<li class="ed_txt">It can place 6 pieces of 4-inch or 3-inch wafers, and 3 pieces of 6-inch wafers.</li>
</ul>
</li>
<li class="ed_txt"> Payment method:
<ul>
<li class="ed_txt">Self-operation: charge start-up fee + material fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt">The fees are as follows:
<ul>
<li class="ed_txt">Planned pricing: ※The current price of precious metals is determined with reference to the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Planned pricing">
<tbody>
</tbody>
<caption>Planned pricing</caption>
<tbody>
<tr>
<th> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit<br />
business<br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">600</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Material cost<br />
(yuan/KA)</th>
<td data-th="school unit">Al=85 / Co=90 / Cr=110 / Cu=70 / Fe=70 / Mg=110 / Mo=70 / Ni=170 / Ta=220 / Ti=140 / TiW=200 / W=110 / TaSi2= 220 / W5Si=110 / Pt=current price / Pd=current price</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
</tbody>
</table>
<br />
</div>
</li>
<li class="ed_txt">Unplanned pricing: ※The current price of precious metals is determined with reference to the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Unplanned pricing">
<tbody>
</tbody>
<caption>Unplanned pricing</caption>
<tbody>
<tr>
<th> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit <br />
business <br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">1200</td>
<td data-th="research unit">9000</td>
<td data-th="for-profit business unit">9000</td>
</tr>
<tr>
<th scope="row">Material cost<br />
(yuan/KA)</th>
<td data-th="school unit">(School Unit): Al=170 / Co=180 / Cr=220 / Cu=140 / Fe=140 / Mg=220 / Mo=140 / Ni=340 / Ta=440 / Ti=280 / TiW=400 / W =220 / TaSi2=440 / W5Si=220 / Pt=current price / Pd=current price (research/for-profit): Al=850 / Co=900 / Cr=1100 / Cu=700 / Fe=700 / Mg= 1100 / Mo=700 / Ni=1700 / Ta=2200 / Ti=1400 / TiW=2000 / W=1100 / TaSi2=2200 / W5Si=1100 / Pt=current price / Pd=current price</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
</tbody>
</table>
</div>
</li>
</ul>
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169147367857852416&init=YVacuum Sputtering System Ahttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=9a19d78c-3f70-4649-9075-674aab7e1e0dVacuum Sputtering System (B)https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=2f7adde1-542d-4b1a-901c-ab4adfb3fb37High vacuum coating system
- <![CDATA[Vacuum Sputtering System (B)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Vacuum Sputtering System B" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169119378910744576&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/sputtering-system-b/" rel="noreferrer noopener" target="_blank" title="Sputtering System B(Open New Windows)"><strong>Sputtering System B</strong></a><br />
Brand Model: Goldton Technology Co., Ltd.</li>
<li class="ed_txt"><strong>Instrument expert: Prof.</strong> <strong>Cheng, Yu-Ting</strong><br />
ext 54169</li>
<li class="ed_txt"><strong>Equipment management personnel: Mr. Huang, Guo-Hua</strong> <br />
Extension (O) 55657, (L) 55608<br />
Email <a href="mailto:mailto:guohua@nycu.edu.tw" title="guohua@nycu.edu.tw">guohua@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55608</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-13Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/sputtering-system-b/" rel="noreferrer noopener" target="_blank" title="Link to Nano Center Introduction Page(Open New Windows)">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand Model: Goldton Technology Co., Ltd.</li>
<li>Purchase period: April 2009</li>
<li>Location: Laboratory, 3rd Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55608) </li>
<li>Function: thin film sputtering</li>
<li>Important specs:
<ul>
<li>Man-machine interface</li>
<li>Three 6-inch sputtering cathodes</li>
<li>Can hold 6 pieces of WAFER (either 6 inches or 4 inches, can be allocated by yourself, a total of 6 pieces)</li>
<li>POWER: DC: 2500W*2 and RF: 1000W*1</li>
<li>Gas: MFC for Ar, N2 and O2</li>
<li>Air extraction system: RP + Cryo Pump</li>
<li>Can be coated with multi-layer film</li>
<li>The speed of the substrate carrier is 0~30rpm, which can be adjusted</li>
<li>Can heat up to 300°C</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612101224807.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Self-operated instruments:</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Sputter (B) instrument <a href="/userfiles/orden/files/20240612101246861.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612101304017.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612101326254.odt" rel="noreferrer noopener" target="_blank" title="Sputter OEM Application Form(odt)(Open New Windows)">Sputter OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612101326254.odt" rel="noreferrer noopener" target="_blank" title="Sputter OEM Application Form(odt)(Open New Windows)">Sputter OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model19 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt">For items approved by Guiyi, those who have a Guiyi account should make an appointment online, and those who do not have a Guiyi account should pay in cash.</li>
<li class="ed_txt">A total of 6 4-inch or 6-inch chips can be placed.</li>
<li class="ed_txt">Fee method:
<ul>
<li class="ed_txt">Self-operated: charge start-up fee + material fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + material fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt">The cost is as follows
<ul>
<li class="ed_txt">Planned pricing: ※The current price of precious metals is determined based on the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Planned pricing">
<tbody>
</tbody>
<caption>Planned pricing</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit<br />
business<br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">600</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Material cost<br />
(yuan/KA)</th>
<td data-th="school unit"> Ti=140 / Ni=280 / Ta=550 / Hf=940</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
</tbody>
</table>
</div>
</li>
<li class="ed_txt">Unplanned pricing: ※The current price of precious metals is determined based on the international spot price.
<div class="table03">
<table class="ed_table caption-top" summary="Unplanned pricing">
<tbody>
</tbody>
<caption>Unplanned pricing</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">school unit</th>
<th scope="col">research<br />
unit</th>
<th scope="col">for-profit <br />
business <br />
unit</th>
</tr>
<tr>
<th scope="row">OEM fee<br />
(yuan/time) </th>
<td data-th="school unit">900</td>
<td data-th="research unit">900</td>
<td data-th="for-profit business unit">900</td>
</tr>
<tr>
<th scope="row">Start-up fee<br />
(yuan/time)</th>
<td data-th="school unit">1200</td>
<td data-th="research unit">9000</td>
<td data-th="for-profit business unit">9000</td>
</tr>
<tr>
<th scope="row">Material cost<br />
(yuan/KA)</th>
<td data-th="school unit">(School units): Ti=280 / Ni=560 / Ta=1100 / Hf=1880 (Research/for-profit institutions): Ti=1400 / Ni=2800 / Ta=5500 / Hf=9400</td>
<td data-th="research unit"> </td>
<td data-th="for-profit business unit"> </td>
</tr>
</tbody>
</table>
</div>
</li>
</ul>
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169119378910744576&init=YVacuum Sputtering System Bhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=8c517baa-f69b-4fa7-b57c-a3a09b1dc6e3Vacuum Sputtering System (A)https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1992&serno=2f7adde1-542d-4b1a-901c-ab4adfb3fb37High vacuum coating system
- <![CDATA[Atomic Layer Chemical Vapor Deposition System (ALD)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Atomic Layer Deposition System" src="/userfiles/orden/images/20240521152841421.jpg" /></div>
<ul>
<li class="ed_txt"><strong>Atomic Layer Chemical Vapor Deposition System, ALD</strong><br />
Brand Model: Veeco Fiji-G2</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Chao, Tien-Sheng</strong><br />
ext 31367</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr.</strong> <strong>Chan, Chia-Chi</strong><br />
Ext. 55622, 55616<br />
Email <a href="mailto:chiachichan@nycu.edu.tw" title="chiachichan@nycu.edu.tw">chiachichan@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Laboratory A122</strong><strong>, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong><br />
ext 55616</li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information</strong></div>
<ol>
<li>Brand Model: Veeco Fiji-G2</li>
<li>Year of purchase: 2023</li>
<li>Place of placement: Laboratory 122, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)</li>
<li>Function: deposit Al2O3, HfO2, TiN, ZrO2, TiO2 thin films</li>
<li>Important specs:
<ul>
<li>Usable wafer size: fragmented to 8 inches</li>
<li>Dual cavity: Chamber A-front-end dielectric layer film deposition, Chamber B-back-end dielectric layer and metal film deposition</li>
<li>Thermal deposition and plasma-enhanced deposition can be performed</li>
<li>Gas used: Ar, N2, O2, NH3, H2, CF4</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612101400669.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt">Precautions</div>
<ol>
<li class="ed_txt">Test pieces using Chamber A must not contain metal films or undergo post-processing, and must be RCA clean before deposition.</li>
<li class="ed_txt">Please explain in detail the material of the substrate wafer and what substances are contained on it.</li>
<li class="ed_txt">Chamber A can enter the substrate material: Si, Ge.</li>
<li class="ed_txt">Each OEM application form is limited to 3 runs or 6 hours of process time.<br />
</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure .</li>
<li>ALD instrument <a href="/userfiles/orden/files/20240612101419702.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612101431855.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Management system (obtain serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service</a> Manage system reservations and get the reservation number, then download <a href="/userfiles/orden/files/20240612101446192.odt" rel="noreferrer noopener" target="_blank" title="ALD entrusted OEM application form(odt)(Open New Windows)">ALD entrusted OEM application form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612101446192.odt" rel="noreferrer noopener" target="_blank" title="ALD entrusted OEM application form(odt)(Open New Windows)">ALD entrusted OEM application form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol start="1" type="1">
<li><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></li>
<li>Parts of an hour are counted as one hour.</li>
<li>For the cleaning fee, see <a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet_Bench(Open New Windows)">Wet_Bench</a> Fee Schedule.</li>
<li>Payment method:
<ul>
<li>Self-operated: charge production fee + material fee</li>
<li>Entrusted operation: charge production fee + material fee + foundry fee</li>
</ul>
</li>
<li><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1242378409917550592&init=YALDhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication
- <![CDATA[JEOL 500MHz NMR]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="VARIAN UNITY INOVA 500NMR" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167399863227256832&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>NMR500</strong><br />
Brand Model: JEOL ECZ500R/S1</li>
<li><strong>Instrument expert: Prof. Liu, Hsueh-Ju</strong><br />
ext 56547</li>
<li><strong>Equipment management personnel: Dr. Cheng, You-Song</strong><br />
ext 31510<br />
Email <a href="mailto:gnoosuy@nycu.edu.tw" title="gnoosuy@nycu.edu.tw">gnoosuy@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 102B, Science Hall 2, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>ChemistryInstrumentation Resource Center 2025-06-18Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt">
<div class="content"><strong>Instrument introduction</strong><br />
This instrument is a liquid nuclear magnetic resonance spectrometer equipped with a superconducting magnet with a magnetic field of 11.74 Tesla (500 MHz).<br />
It is a liquid double resonance system. The high frequency of the probe can be switched between single tune or dual tune, and can execute 1H{19F}, 19F{1H} and X{1H, 19F}.<br />
In addition to 13C for low frequency, the measurable range is 31P~15N, 39K, 109Ag.<br />
It can be used with various experiments of temperature change detection.<br />
<br />
<strong>Instrument brand, model, purchase period</strong><br />
Brand: Japan JEOL<br />
Model: ECZ500R/S1<br />
Purchase period: 2021.12<br />
<br />
<strong>Important Specifications</strong>
<ol>
<li>Magnetic field: 11.74 Tesla (the hydrogen nucleus resonance frequency is 500MHz)</li>
<li>Probe: 5mm HFX probe</li>
<li>High and low temperature variable temperature system device: the allowable temperature range is -100~+150℃</li>
<li>64 slots auto sample changer</li>
<li>Delta NMR data processing software</li>
</ol>
</div>
</div>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt">
<div class="content"><strong>How to apply:</strong><br />
Please refer to the National Science Association/Related Links/<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="Basic Research Core Facility Reservation Service Management System(Open New Windows)">Basic Research Core Facility Reservation Service Management System</a>, log in with the user account and password to make an appointment<br />
<br />
<strong>service items:</strong><br />
Sample preparation instructions:After the sample to be tested is completely dissolved in a suitable deuterated solvent (D-solvent), it is placed in a special 5mm NMR tube with a height of 4-5 cm.
<ul>
<li>One-dimensional homonuclear experiments: 1H, 1D-NOE, homo-decouple.</li>
<li>One-dimensional heteronuclear experiments: 31P~15N, 39K, 109Ag (13C), etc. perform decouple experiments on 1H, 19F.</li>
<li>2D experiments: COSY, NOESY, ROESY, HSQC, HMBC, TOCSY, etc.</li>
<li>Other experiments: DOSY, 1H-19F HOESY, kinetic experiments</li>
<li>Variable temperature experiment: constant temperature or variable temperature experiment in the temperature range of -100~+150℃</li>
</ul>
</div>
</div>
</div>System open level<div class="ed_model01 clearfix">
<div class="ed_txt">
<div class="content"><strong>System open level</strong>
<ol>
<li>General working hours: (to be determined)</li>
<li>Night and Holiday Periods: (To be confirmed)</li>
</ol>
<u>System open level description</u>
<ul>
<li>Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li>Level B: Each professor assigns one student to apply for training. The other students of the professor must be operated by the trained students. If a professor has too many students using the instrument, he or she may apply to the person in charge of the instrument to increase the number of students receiving training. .</li>
<li>Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li>Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>
</div>
</div>Charges<div class="ed_model06 clearfix">
<div class="table01">
<table class="ed_table caption-top" summary="Charges(Unit: NTD)">
<caption>Charges(Unit: NTD)</caption>
<tbody>
<tr>
<th>111 Annual Fees</th>
<th>Schedule an appointment</th>
<th>Unplanned appointment</th>
</tr>
<tr>
<td data-th="111 Annual Fees">
<ul>
<li>Basic experiment</li>
<li>Hydrogen Spectrum Experiment</li>
<li>Carbon spectrum experiment </li>
<li>No-D experiment</li>
</ul>
</td>
<td data-th="Schedule an appointment">$120 / 0.5 hour<br />
$60 / piece<br />
$120 / hour<br />
$120 / 0.5 hour</td>
<td data-th="Unplanned appointment">$300 / 0.5 hour<br />
$300 / piece<br />
$300 / hour<br />
$600 / 0.5 hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Heteronuclear Experiment </td>
<td data-th="Schedule an appointment">$200 / hour</td>
<td data-th="Unplanned appointment">$500 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Night and Holiday Experiments<br />
(Reservation is based on 15 hours)</td>
<td data-th="Schedule an appointment">$60 / hour</td>
<td data-th="Unplanned appointment">$200 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">DOSY/T1/T2 experiment basic fee<br />
(first hour)</td>
<td data-th="Schedule an appointment">$500 / hour</td>
<td data-th="Unplanned appointment">$2000 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">DOSY/T1/T2 experiment<br />
(from the 2nd hour)</td>
<td data-th="Schedule an appointment">$200 / hour</td>
<td data-th="Unplanned appointment">$500 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Two-dimensional experiments</td>
<td data-th="Schedule an appointment">$200 / hour</td>
<td data-th="Unplanned appointment">$500 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Two-dimensional No-D experiments</td>
<td data-th="Schedule an appointment">$400 / hour</td>
<td data-th="Unplanned appointment">$1000 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">One-dimensional map processing fee</td>
<td data-th="Schedule an appointment">$20 / hour</td>
<td data-th="Unplanned appointment">$50 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Two-dimensional map processing fee</td>
<td data-th="Schedule an appointment">$40 / hour</td>
<td data-th="Unplanned appointment">$100 / hour</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Various temperature experiment</td>
<td data-th="Schedule an appointment">$400 / piece</td>
<td data-th="Unplanned appointment">$400 / piece</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Sample configuration fee</td>
<td data-th="Schedule an appointment">$300 / piece</td>
<td data-th="Unplanned appointment">$300 / piece</td>
</tr>
<tr>
<td data-th="111 Annual Fees">Liquid N2</td>
<td data-th="Schedule an appointment">$25/unit</td>
<td data-th="Unplanned appointment">$25/unit</td>
</tr>
<tr>
<td data-th="111 Annual Fees">solvent</td>
<td data-th="Schedule an appointment">$100/unit</td>
<td data-th="Unplanned appointment">$100/unit</td>
</tr>
<tr>
<td data-th="111 Annual Fees">postage fee</td>
<td data-th="Schedule an appointment">$100/unit</td>
<td data-th="Unplanned appointment">$100/unit</td>
</tr>
</tbody>
</table>
Remarks: For experiments with special needs such as variable temperature experiments, please consult the price in advance and make an appointment.</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167399863227256832&init=YVARIAN UNITY INOVA 500NMRhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistry
- <![CDATA[600 MHz ultra-high magnetic field NMR instrument]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="600 MHz ultra-high magnetic field NMR instrument" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167402390521909248&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>NMR600</strong><br />
Brand model: VARIAN VNMRS-600 NMR SPECTROMETER</li>
<li><strong>Instrument expert: Prof. Wu, Yen-Ku</strong><br />
ext 56505</li>
<li><strong>Instrument consulting and operation services: Dr. Shen, Li-Ching</strong><br />
ext 56510<br />
Email <a href="mailto:lc0188@nycu.edu.tw" title="lc0188@nycu.edu.tw">lc0188@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 102C, Science Building 2, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>ChemistryInstrumentation Resource Center 2025-06-18Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, purchase period</strong></div>
<ul>
<li class="ed_txt">Brand: American VARIAN</li>
<li class="ed_txt">Model: VNMRS-600</li>
<li class="ed_txt">Purchase period: June 2011</li>
</ul>
<div class="ed_txt"><strong>Important Specifications</strong><br />
Liquid NMR spectroscopy, equipped with a superconducting magnet with a magnetic field strength of 14.09 Tesla (600 MHz)</div>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong></div>
<ol>
<li class="ed_txt">The instrument is equipped with a low temperature constant temperature system (down to -20 °C), which is suitable for long-term one-dimensional and two-dimensional low temperature experiments.</li>
<li class="ed_txt">Variable temperature experiment (-80 °C ~ 100 °C).</li>
<li class="ed_txt">DOSY Spectrum.</li>
<li class="ed_txt">Special technology of this instrument: please refer to the linked file</li>
</ol>
<div class="ed_txt">Note: The temperature change experiment is carried out every Wednesday, please make an appointment by phone (03-5712121 ext. 56510 Ms. Shen Yuqing)</div>
</div>System open level<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>System open level</strong></div>
<ol>
<li class="ed_txt">Normal working hours: D</li>
<li class="ed_txt">Night and holiday period: C</li>
</ol>
<div class="ed_txt"><u>System open level description</u></div>
<ul>
<li class="ed_txt">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li class="ed_txt">Level B: Each professor assigns one student to apply for training. The other students of the professor must be operated by the trained students. If a professor has too many students using the instrument, he or she may apply to the person in charge of the instrument to increase the number of students receiving training. .</li>
<li class="ed_txt">Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li class="ed_txt">Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>Management and usage<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and use methods:</strong></div>
<ol>
<li class="ed_txt">The use of this instrument requires the use of 【<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>】Log in to make an appointment and obtain the electronic appointment serial number before accepting the appointment.</li>
<li class="ed_txt">Instrument open service includes self-operation and commissioned operation</li>
</ol>
<div class="ed_txt"><strong>Self-operated application process:</strong></div>
<ol>
<li class="ed_txt">Only the Department of Applied Chemistry of our school is open.</li>
<li class="ed_txt">Users need to submit an application first, and those who pass the on-board assessment need to sign the [Conclusion Form for the Use of the 600 MHz NMR System of the Guiyi Center of National Yangming Jiaotong University] to qualify for the reservation.</li>
</ol>
<div class="ed_txt"><strong>Application procedure for entrusted operation:</strong></div>
<ol>
<li class="ed_txt">a. Only after the online reservation is made to send the order, the user is eligible to use it</li>
<li class="ed_txt">b. The sample test sequence adopts the method of "first delivery, first testing". If you need to rush, you must wait for the technician to coordinate with the first delivery user. If the user does not agree, we will not be able to provide rush service.</li>
<li class="ed_txt">The entrusted sample delivery and collection can be handled by mail. After the experiment is completed, the paper and electronic files of the atlas will be provided.</li>
<li class="ed_txt">The optimal concentration of sample preparation is 100mM (carbon spectroscopy can be completed in 1 hour).</li>
<li class="ed_txt">The instrument room does not provide spectrum analysis services.</li>
<li class="ed_txt">The maps provided by this instrument room shall not be used for commercial advertising, legal proceedings and certification.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charges</strong><br />
Working hours: Refers to weekdays from 8:00 am to 5:00 pm.<br />
Night time: refers to the weekdays from 5:00 pm to 8:00 am the next day.</div>
<ol>
<li class="ed_txt">Reservations with NSTC projects
<ol>
<li class="ed_txt">Basic experiment：NT$120/0.5 hour</li>
<li class="ed_txt">2D/heteronuclear experiment：NT$200 / hour</li>
<li class="ed_txt">1H-proton NMR: NT$60 /0.5hour</li>
<li class="ed_txt">Carbon-13 experiment: NT$120 / hour</li>
<li class="ed_txt">Variable temperature experiment: NT$300 / hour / each temperature</li>
<li class="ed_txt">DOSY/T1/T2 experiment basic fee(first hour): NT$500 / hour</li>
<li class="ed_txt">DOSY/T1/T2 experiment fee(from 2nd hour): NT$200 / hour</li>
<li class="ed_txt">Spectrum process fee： 1D NT$20 / piece; 2D NT$40 / piece</li>
<li class="ed_txt">Night time slot: NT$900/ 15 hours.</li>
</ol>
</li>
<li class="ed_txt">Reservations without NSTC projects
<ol>
<li class="ed_txt">Basic experiment：NT$300/0.5 hour</li>
<li class="ed_txt">2D/heteronuclear experiment: NT$500 / hour</li>
<li class="ed_txt">1H-proton NMR: NT$300 /0.5hour</li>
<li class="ed_txt">Carbon-13 experiment: NT$300 / hour</li>
<li class="ed_txt">Variable temperature experiment: NT$1000 / hour / each temperature</li>
<li class="ed_txt">DOSY/T1/T2 experiment basic fee(first hour): NT$2000 / hour</li>
<li class="ed_txt">DOSY/T1/T2 experiment fee(from 2nd hour): NT$500 / hour</li>
<li class="ed_txt">Spectrum process fee： 1D NT$50 / piece; 2D NT$100 / piece</li>
<li class="ed_txt">Night time slot: NT$3000/ 15 hours.</li>
</ol>
</li>
</ol>
<div class="ed_txt">The instrument room provides paid sample configuration service.<br />
<br />
Notes:<br />
*This laboratory only provides sample matching services. NMR tube and deuterium solvent (CDCl3、D2O、d6-DMSO、d3-acetonitrile、d4-methanol、d6-acetone.) A sample preparation fee of NT$300 will be charged. If the same sample needs to be replaced with a different solvent, the spectrum fee and sample configuration fee will still be charged.</div>
</div>Related files<div class="ed_model17 clearfix ed_list">
<ul>
<li class="d-flex">NMR600 opening schedule
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20231101103751290.pdf" rel="noreferrer noopener" target="_blank" title="NMR600 opening schedule(pdf)(Open New Windows)"><img alt="NMR600 opening schedule" src="/userfiles/file/pdf.png" /> </a></li>
</ul>
</li>
<li class="d-flex">Special technology of NMR600
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20231101103832075.pdf" rel="noreferrer noopener" target="_blank" title="Special technology of NMR600(pdf)(Open New Windows)"><img alt="Special technology of NMR600" src="/userfiles/file/pdf.png" /> </a></li>
</ul>
</li>
</ul>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167402390521909248&init=Y600 MHz ultra-high magnetic field NMR instrumenthttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistry
- <![CDATA[High Resolution Gas Chromatography Mass Spectrometer]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="High Resolution Gas Chromatography Mass Spectrometer" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168460870024433664&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>High Resolution Gas Chromatograph Mass Spectrometer (HRGCMS)</strong><br />
Brand: JEOL, AccuTOF GCX</li>
<li><strong>Instrument expert: Prof. Cheng, Yen-Ju</strong><br />
ext 31520</li>
<li><strong>Instrument consulting and operation services: Ms. Li, Yun-Ming</strong><br />
ext 31515<br />
Email <a href="mailto:yunming@nycu.edu.tw" title="yunming@nycu.edu.tw">yunming@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 617, Tianjiabing Optoelectronics Center, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>ChemistryInstrumentation Resource Center 2024-02-06Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, purchase period</strong><br />
Brand: JEOL<br />
Model: AccuTOF GCX<br />
Purchase time: 2015.11<br />
<br />
<strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt">Gas chromatograph: Agilent 7890B, which can be connected to mass spectrometer and thermal conductivity detector.</li>
<li class="ed_txt">Flying mass spectrometer, resolution 10,000FWHM, mass range 4-6,000Da, mass accuracy of 1.5mDa or 4ppm. There are free sources such as EI (electron impact method), CI (chemical free method), FI (field free method), and FD (field desorption method). And there are NIST and WILEY databases for qualitative and quantitative analysis.</li>
<li class="ed_txt">Autosampler: With liquid and headspace two sampling modes, it can analyze solution and gas samples.</li>
<li class="ed_txt">Pyrolysis instrument: FRONTIER PY-3030D, temperature range from 80°C to 800°C, with cold focusing function, and equipped with additives and polymer databases, which can perform thermal desorption and thermal cracking of solid and liquid samples and inject GCMS analyze.</li>
</ol>
</div>Service Items and Charges<div class="ed_model06 clearfix">
<div class="table01">
<table class="ed_table caption-top" summary="Service Items and Charges(Unit: NTD)">
<caption>Service Items and Charges(Unit: NTD)</caption>
<tbody>
<tr>
<th>service items</th>
<th>Scope of application and description</th>
<th>Schedule an appointment</th>
<th>Unplanned appointment</th>
</tr>
<tr>
<td data-th="service items">Electron Ionization (EI) Mass Spectrometry</td>
<td data-th="Scope of application and description">Hard free source, easy to produce fragmentation, suitable for compounds with molecular weight below 900 that can be heated and vaporized, and can be injected into solid</td>
<td data-th="Schedule an appointment">LREI: $100 / piece<br />
HREI: $150 / piece</td>
<td data-th="Unplanned appointment">LREI: $1000 / piece<br />
HREI: $1,500 / piece</td>
</tr>
<tr>
<td data-th="service items">Field Desorption (FD) Mass Spectrometry</td>
<td data-th="Scope of application and description">Soft free source, easy to generate parent ions, suitable for low polarity molecules, it needs to be injected in solution state, the mass range can reach 5000</td>
<td data-th="Schedule an appointment">LRFD: $120 / piece<br />
HRFD: $200 / piece<br />
HRFI: $200 / piece</td>
<td data-th="Unplanned appointment">LRFD: $1,200 / piece<br />
HRFD: $2,000 / piece<br />
HRFI: $2,000 / piece</td>
</tr>
<tr>
<td data-th="service items">chemical ionization (CI) mass spectrometry</td>
<td data-th="Scope of application and description">Soft free source, easy to generate parent ions, suitable for compounds that can be heated and gasified. Use isobutane as reaction gas</td>
<td data-th="Schedule an appointment">LRCI: $120 / piece<br />
HRCI: $200 / piece</td>
<td data-th="Unplanned appointment">LRCI: $1,200 / piece<br />
HRCI: $2,000 / piece</td>
</tr>
<tr>
<td data-th="service items">Gas chromatography mass spectrometry (GC/MS)</td>
<td data-th="Scope of application and description">Separation and mass spectrometry identification of small molecule mixtures that can be vaporized at 300 degrees</td>
<td data-th="Schedule an appointment">GC-EI-LRMS: $220 / piece<br />
GC-EI-HRMS: $250 / piece<br />
GC-CI-HRMS: $300 / piece<br />
GC-FI-HRMS: $330 / piece</td>
<td data-th="Unplanned appointment">GC-EI-LRMS: $2, 200 / piece<br />
GC-EI-HRMS: $2,500 / piece<br />
GC-CI-HRMS: $3,000 / piece<br />
GC-FI-HRMS: $3,300 / piece</td>
</tr>
<tr>
<td data-th="service items">Gas Chromatography-Thermal Conductivity (GC-TCD)</td>
<td data-th="Scope of application and description">Hydrogen qualitative, relative quantitative</td>
<td data-th="Schedule an appointment">Warm-up fee $100<br />
Sample test $100/piece</td>
<td data-th="Unplanned appointment">Warm-up fee $1,000<br />
Sample test $1,000/piece</td>
</tr>
<tr>
<td data-th="service items">Thermal cracking, thermal desorption gas chromatography mass spectrometry</td>
<td data-th="Scope of application and description">The composition of polymer and material samples is analyzed by thermal cracking and thermal desorption.</td>
<td data-th="Schedule an appointment">$300/time (including the main signal NIST, Wiley database automatic comparison)</td>
<td data-th="Unplanned appointment">$3,000/time (including automatic comparison of main signals NIST and Wiley databases)</td>
</tr>
<tr>
<td data-th="service items">quantitative analysis</td>
<td data-th="Scope of application and description">
<ol>
<li>Establish method and calibration line</li>
<li>Sample Analysis</li>
<li>Internal standard method for semi-quantitative</li>
</ol>
</td>
<td data-th="Schedule an appointment">
<ol>
<li>$1,000 / single target</li>
<li>Add $300 for each sample or additional target</li>
<li>Internal standard semi-quantitative basic fee $500</li>
</ol>
</td>
<td data-th="Unplanned appointment">
<ol>
<li>$10,000 / single target</li>
<li>Add $3,000 for each sample or additional target</li>
<li>Semi-quantitative basic fee for internal standard method $5,000</li>
</ol>
</td>
</tr>
<tr>
<td data-th="service items">Manual judgment</td>
<td data-th="Scope of application and description">HRMS molecular formula estimation, database F-search polymer analysis, interference determination, etc.</td>
<td data-th="Schedule an appointment">$100 / hour<br />
(At least 2 hours for polymer data interpretation)</td>
<td data-th="Unplanned appointment">$1,000 / hour<br />
(At least 2 hours for polymer data interpretation)</td>
</tr>
</tbody>
</table>
</div>
</div>Opening Hours and Appointments<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening schedule:</strong></div>
<ol>
<li class="ed_txt">Monday to Friday 8:00~17:00: Accept entrusted services.</li>
<li class="ed_txt">The rest of the time: automatic sample injection GCMS detection.</li>
</ol>
<div class="ed_txt"><br />
<strong>Instrument use reservation: please go to <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Information System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Information System</a> or call an operating technician </strong></div>
</div>Management and usage<div class="ed_model12 clearfix">
<div class="item01">
<p>1.</p>
For the convenience of off-campus users, the documents can be sent by registered mail. The electronic file of the results will be delivered by e-mail about one week after the samples are received.</div>
<div class="item01">
<p>2.</p>
The tester must attach or describe the following information: </div>
<div class="ed_model13 clearfix">
<div class="item02">
<p>a.</p>
Measurement item (GC-MS or MS).</div>
<div class="item02">
<p>b.</p>
Free mode (EI, CI, FD, FI).</div>
<div class="item02">
<p>c.</p>
Inferred structural formula, molecular formula and molecular weight. Please indicate the mass range of unknowns. Those who measure altimetry mass spectrometry must attach the molecular formula.</div>
<div class="item02">
<p>d.</p>
Solid, liquid or solution can be used, if it is a solution, please inform the estimated concentration.</div>
<div class="item02">
<p>e.</p>
A solvent that dissolves the sample.</div>
<div class="item02">
<p>f.</p>
For those who test GC-MS, if you have GC test conditions, please attach or inform the possible components. For those who use special columns, please prepare your own columns with an outer diameter of less than 0.32mm, and make an appointment by phone.</div>
</div>
<div class="item01">
<p>3.</p>
<strong>In order to maintain the normal operation of the instrument, this instrument is mainly operated by technicians.</strong></div>
</div>Related files<div class="ed_model17 clearfix ed_list">
<ul>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">HRGCMS case study </span> </span>
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20231030161807634.pdf" target="_blank" title="HRGCMS case study(pdf)(Open New Windows)"><img alt="HRGCMS case study(pdf)(Open New Windows)" src="/userfiles/file/pdf.png" /> </a></li>
</ul>
</li>
</ul>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168460870024433664&init=YHigh Resolution Gas Chromatography Mass Spectrometerhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistry
- <![CDATA[High Resolution Liquid Chromatography Tandem Mass Spectrometer]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="HIGH RESOLUTION LIQUID CHROMATOGRAPHY TANDEM MASS SPECTROMETER" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168474837698482176&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>High Resolution Liquid Chromatography Tandem Mass Spectrometer</strong><br />
English abbreviation: UPLC/HRMS/MS<br />
Brand: Bruker, Impact HD, EVOQ</li>
<li><strong>Instrument expert: Prof. Li, Yaw-Kuen</strong><br />
Ext 31985</li>
<li><strong>Instrument consultation and operation service: Dr. Huang, Sheng-Cih</strong><br />
ext 56574<br />
Email <a href="mailto:redrednctu56574@nycu.edu.tw" title="redrednctu56574@nycu.edu.tw">redrednctu56574@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 617, Tianjiabing Optoelectronics Center, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>ChemistryInstrumentation Resource Center 2024-02-06Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, purchase period</strong><br />
Brand: Bruker<br />
Model: Impact HD , EVOQ<br />
Purchase period: 102.11<br />
<br />
<strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt"><strong>Utimate 3000 ultra-high performance liquid chromatography system: the maximum pressure can reach 15000psi, and the composition of the eluent can be changed step by step to enhance the separation effect.</strong></li>
<li class="ed_txt"><strong>source of ion:</strong>
<ul>
<li class="ed_txt"><strong>A. Electrospray method (ESI): Free highly polar analytes.</strong></li>
<li class="ed_txt"><strong>B. Atmospheric pressure photodissociation method (APPI): Free the analyte with double bond or benzene ring, which can be photodissociated.</strong></li>
</ul>
</li>
<li class="ed_txt"><strong>High-resolution mass spectrometer Impact HD: The first section is a quadrupole mass spectrometer, and the second section is a time-of-flight mass spectrometer, with high resolution (40,000FWHM) and mass accuracy (<2ppm). It can also be used with ultra-high performance liquid chromatography system for LCMS or LCMSMS.</strong></li>
<li class="ed_txt"><strong>Low-resolution mass spectrometer EVOQ: Quadrupole tandem mass spectrometer, capable of low-resolution ESI-MS and MRM quantitative analysis.</strong></li>
</ol>
</div>Service items and opening hours<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening hours: Monday to Friday 8:00~17:00; entrusted services are accepted.<br />
<br />
service items</strong></div>
</div>
<div class="ed_model12 clearfix">
<div class="item01">
<p>1.</p>
General services:</div>
<div class="ed_model13 clearfix">
<div class="item02">
<p>a.</p>
Low-resolution electrospray ionization mass spectrometry (±ESI): mass spectrometry determination of highly polar small molecule compounds (MW<2000).</div>
<div class="item02">
<p>b.</p>
High-resolution electrospray ionization mass spectrometry (±ESI) and atmospheric pressure photodissociation ionization (APPI) high-resolution accurate mass determination.</div>
<div class="item02">
<p>c.</p>
Mass spectrometry tandem method (MS/MS): including full mass spectrometry scanning and product ion scanning, which can analyze the structure of compounds.</div>
<div class="item02">
<p>d.</p>
Protein identification: provide mgf files, which can be compared using online MASCOT.</div>
</div>
<div class="item01">
<p>2.</p>
Special services:<br />
Liquid chromatography mass spectrometry (LC/MS) and liquid chromatography tandem mass spectrometry (LC/MS/MS): Because the selection of liquid chromatography separation columns and conditions is complex and professional and technical, it is listed as a special service item , first contact the operator to discuss the sample properties, and provide the LC separation conditions and even the column.</div>
</div>Management and usage<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and use methods:</strong></div>
</div>
<div class="ed_model12 clearfix">
<div class="item01">
<p>1.</p>
For the convenience of off-campus users, the submitted documents can be sent by registered mail, and the returned documents will be sent by e-mail to transmit the results in the electronic file of the map.</div>
<div class="item01">
<p>2.</p>
The tester must attach or describe the following information:</div>
<div class="ed_model13 clearfix">
<div class="item02">
<p>a.</p>
Measurement item (free method, positive or negative ion, MS or MS/MS)</div>
<div class="item02">
<p>b.</p>
The estimated structural formula, molecular formula and molecular weight. Please indicate the mass range of unknowns. For those who measure the high resolution mass spectrum, please attach the low resolution mass spectrum.</div>
<div class="item02">
<p>c.</p>
It can be solid, liquid or solution. If it is a solution, the concentration should be 1ppm or more than 1 pmole/μl.</div>
<div class="item02">
<p>d.</p>
The sample should be soluble in water, methanol or acetonitrile (Acetonitrile) and please specify.</div>
<div class="item02">
<p>e.</p>
The analytical sample should not contain radioactive, corrosive, strong acid or alkali, or non-volatile salts such as surfactants and phosphates.</div>
<div class="item02">
<p>f.</p>
The protein identification sample must have obvious band when it is stained with Coomassie blue. Please perform enzyme digestion and pass through the C18 desalting tip. If the laboratory needs to replace the C18 desalting tip, an additional 300 yuan will be charged for each piece.</div>
</div>
<div class="item01">
<p>3.</p>
In order to maintain the normal operation of the instrument<strong>,This instrument is mainly operated by technicians.</strong></div>
<div class="item01">
<p>4.</p>
In response to the needs of the National Science Council to write the "Annual Work Report and Mid-term Progress Report", quantify the research results, evaluate the contribution of the school's service center to academic research, and use the unit's instruments and equipment. Please mention this unit at any time, and please e-mail the PDF electronic file of the published paper to us in order to apply for the thank you discount (Attachment 1). If the staff of the center (including technicians, moderators, etc.) have made significant contributions to the paper, please also consider including co-authors. Thank you for your help to make this instrument work more smoothly.</div>
</div>Charges<div class="ed_model06 clearfix">
<div class="table01">
<table class="ed_table caption-top" summary="Charges(Unit: NTD)">
<caption>Charges(Unit: NTD)</caption>
<tbody>
<tr>
<th>service items</th>
<th>Service Content</th>
<th>Use a school</th>
<th>Schedule an appointment</th>
<th>Unplanned appointment</th>
</tr>
<tr>
<td data-th="service items">Low Resolution Small Molecule Mass Spectrometry (ESI)</td>
<td data-th="Service Content">
<ol>
<li>One-time mass spectrometry determination of positive and negative ion electrospraying with molecular weight less than 1250 </li>
<li>Secondary Mass Spectrometry (MSMS) Determination</li>
</ol>
</td>
<td data-th="Use a school">chemistry, chemical industry<br />
Life Science Materials Science Medicinal Chemistry</td>
<td data-th="Schedule an appointment">
<ol>
<li>$200 / piece</li>
<li>$200 / piece</li>
</ol>
</td>
<td data-th="Unplanned appointment">
<ol>
<li>$1500 / piece</li>
<li>$1500 / piece</li>
</ol>
</td>
</tr>
<tr>
<td data-th="service items">High resolution and macromolecular mass spectrometry (ESI, APPI)</td>
<td data-th="Service Content">
<ol>
<li>Provide high-resolution and accurate mass spectrometry and electrospray (ESI) determination of proteins and polymers </li>
<li>Provide accurate mass spectrometry by atmospheric pressure photodissociation method (APPI)</li>
<li>Secondary Mass Spectrometry (MSMS) Determination</li>
</ol>
</td>
<td data-th="Use a school">Chemistry, Chemical Engineering Environmental Science Life Science Materials Science Medicinal Chemistry</td>
<td data-th="Schedule an appointment">
<ol>
<li>$300 / piece </li>
<li>$300 / piece</li>
</ol>
</td>
<td data-th="Unplanned appointment">
<ol>
<li>$2500 / piece </li>
<li>$2500 / piece</li>
</ol>
</td>
</tr>
<tr>
<td data-th="service items">Ultra-high performance liquid chromatography + high-resolution mass spectrometry (UPLC/HRMS or UPLC/HRMS-MS)</td>
<td data-th="Service Content">
<ol>
<li>Ultra-high performance liquid chromatography separation </li>
<li>Full mass spectrometry scan</li>
<li>Product ion scan</li>
<li>Elemental composition prediction</li>
<li>Specify UV wavelength scan</li>
</ol>
</td>
<td data-th="Use a school">Chemistry, Chemical Engineering Environmental Science Life Science Materials Science Medicinal Chemistry</td>
<td data-th="Schedule an appointment">The start-up fee is $700 /0.5 hours.
<ol>
<li>Provide the mass spectrum with the strongest signal at five time points</li>
<li>For each additional mass spectrogram at a specified time, $20 will be charged</li>
<li>Add UV: $30 / piece</li>
</ol>
</td>
<td data-th="Unplanned appointment">The start-up fee is $3500/0.5 hours.
<ol>
<li>Provide the mass spectrum with the strongest signal at five time points</li>
<li>For each additional mass spectrogram at a specified time, $200 will be charged</li>
<li>Add UV: $300 / piece</li>
</ol>
</td>
</tr>
<tr>
<td data-th="service items">protein identification</td>
<td data-th="Service Content">Provide mgf file, which can be compared with online MASCOT.</td>
<td data-th="Use a school">life sciences</td>
<td data-th="Schedule an appointment">$350 / piece<br />
For those who need our laboratory to replace C18 desalting tip, each piece will be charged $30 yuan</td>
<td data-th="Unplanned appointment">$3,500 /piece If the laboratory has passed C18 desalting tip on behalf of the laboratory, an additional $300 will be charged for each piece</td>
</tr>
<tr>
<td data-th="service items">quantitative analysis</td>
<td data-th="Service Content">
<ol>
<li>Establish method and calibration line</li>
<li>Sample analysis</li>
</ol>
</td>
<td data-th="Use a school">Chemistry, Chemical Engineering Environmental Science Life Science Materials Science Medicinal Chemistry</td>
<td data-th="Schedule an appointment">
<ol>
<li>Basic fee $1600</li>
<li>$350 / piece</li>
</ol>
</td>
<td data-th="Unplanned appointment">
<ol>
<li>Basic fee $8000</li>
<li>$3500 / piece</li>
</ol>
</td>
</tr>
<tr>
<td data-th="service items">urgent</td>
<td data-th="Service Content">Return within 24 hours (need to contact in advance)</td>
<td data-th="Use a school"> </td>
<td data-th="Schedule an appointment"> double the price</td>
<td data-th="Unplanned appointment">double the price</td>
</tr>
</tbody>
</table>
</div>
</div>Related files<div class="ed_model17 clearfix ed_list">
<ul>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">LCMS actual analysis case 20140909 </span> </span>
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20231030171845954.pdf" rel="noreferrer noopener" target="_blank" title="LCMS actual analysis case 20140909(pdf)(Open New Windows)"><img alt="LCMS actual analysis case 20140909(pdf)(Open New Windows)" src="/userfiles/file/pdf.png" /> </a></li>
</ul>
</li>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">1040316 Jiaotong University Mass Spectrometer Discount Application Form </span> </span>
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20231030172006377.odt" rel="noreferrer noopener" target="_blank" title="1040316 Jiaotong University Mass Spectrometer Discount Application Form(odt)(Open New Windows)"><img alt="1040316 Jiaotong University Mass Spectrometer Discount Application Form(odt)(Open New Windows)" src="/userfiles/file/word.png" /> </a></li>
</ul>
</li>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">LC-MS Application Form-20240111-Manufacturer (Yangming Chiaotung University) </span></span>
<ul class="d-flex">
<li><a href="/userfiles/orden/files/20240112141137864.odt" rel="noreferrer noopener" target="_blank" title="LC-MS Application Form-20210302-Manufacturer (Yangming Jiaotong University)(odt)(Open New Windows)(Open New Windows)"><img alt="LC-MS Application Form-20210302-Manufacturer (Yangming Jiaotong University)(odt)(Open New Windows)" src="/userfiles/file/word.png" /> </a></li>
</ul>
</li>
</ul>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168474837698482176&init=YHIGH RESOLUTION LIQUID CHROMATOGRAPHY TANDEM MASS SPECTROMETERhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistry
- <![CDATA[Differential scanning calorimetry]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_left"> </div>
<div class="ed_pic_right"><img alt="DSC" src="/userfiles/orden/images/20240329120325184.jpg" /></div>
<ul>
<li class="ed_txt"><strong><span style="font-size:105%;">Differential scanning calorimetry</span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">English abbreviation: DSC</span></li>
<li class="ed_txt"><span style="font-size:105%;">Brand: TA, Discovery DSC 2500</span></li>
</ul>
</li>
<li class="ed_txt"><span style="font-size:105%;"><strong>Instrument location: Room 701, Tianjiabing Optoelectronics Center, Guanfu Campus</strong></span></li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument expert: </span></strong><span style="font-size:105%;">Assist. Prof. Chia-Chih Chang</span>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Experiment consultation and operation service: </span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></span></li>
<li class="ed_txt"><span style="font-size:105%;">Contact Person:</span> Dr. Shen, Li-Ching, ext 56510
<ul>
<li class="ed_txt">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</li>
<li class="ed_txt">Experiment consultation：Wang, Li-An</li>
</ul>
</li>
</ul>
</li>
<li class="ed_txt"><span style="font-size:105%;"><strong>Sample Delivery Address: </strong></span>
<ul>
<li class="ed_txt">Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, Hsiao-Lei )</li>
</ul>
</li>
</ul>
</div>]]>ChemistryInstrumentation Resource Center 2025-07-10Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Instrument brand, model, year of purchase</strong></span></div>
<div class="ed_txt">Brand: TA</div>
<div class="ed_txt">Model: Discovery DSC 2500</div>
<div class="ed_txt">Year of purchase: 2023</div>
<div class="ed_txt"><br />
<strong><span style="font-size:105%;">Important Specifications</span></strong></div>
<ul>
<li class="ed_txt">Baseline flatness (-50 to 300°C) ≤5 μW</li>
<li class="ed_txt">Baseline repeatability (-50 to 300°C) <10μW</li>
<li class="ed_txt">Temperature range -90°C to 550°C</li>
<li class="ed_txt">Temperature accuracy ±0.025°C</li>
<li class="ed_txt">Temperature precision ±0.005°C</li>
<li class="ed_txt">Enthalpy precision ±0.04%<br />
</li>
</ul>
</div>Opening hours and service items<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Opening hours：</strong></span><strong>Monday to Friday 8:00~17:00; entrusted services are accepted.</strong><br />
<br />
<span style="font-size:105%;"><strong>Service items</strong></span></div>
<ul>
<li class="ed_txt">determine the temperatures and enthalpies of certain transitions based on the raw data.</li>
<li class="ed_txt">These transitions may include phase changes, melting (crystallization), oxidation, curing, glass transition, or other thermodynamic and kinetic processes.</li>
<li class="ed_txt">measure the heat capacity of materials.</li>
</ul>
</div>Management and contacts<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Management of reservations</strong></span><br />
Please make reservations via <a href="https://vir.nstc.gov.tw/home/Index" rel="noreferrer noopener" target="_blank" title="NSTC Instruments Information System(Open New Windows)">NSTC Instruments Information System</a>.<br />
<br />
<span style="font-size:105%;"><strong>Contacts:</strong></span></div>
<ul>
<li class="ed_txt">Instrument expert: Assist. Prof. Chia-Chih Chang
<ul>
<li class="ed_txt">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></li>
</ul>
</li>
<li class="ed_txt">Experiment consultation and operation service:
<ul>
<li class="ed_txt">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></li>
<li class="ed_txt">Contact Person: Dr. Shen, Li-Ching, ext 56510
<ul>
<li class="ed_txt">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</li>
<li class="ed_txt">Experiment consultation：Wang, Li-An</li>
</ul>
</li>
</ul>
</li>
</ul>
<div class="ed_txt"><span style="font-size:105%;"><strong><span style="color:#8e44ad;">Sample Delivery Address: <br />
Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, </span></strong></span><span style="color:#8e44ad;"><strong><span style="font-size:105%;">Hsiao</span></strong></span><span style="font-size:105%;"><strong><span style="color:#8e44ad;">-Lei )</span></strong></span></div>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Charges(Unit: NTD)</caption>
<thead>
<tr>
<th rowspan="2">Billing Items</th>
<th colspan="2" scope="col">Reservation with NSTC project</th>
<th colspan="2" rowspan="1" scope="col">Reservation without NSTC project</th>
</tr>
<tr>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
</tr>
</thead>
<tbody>
<tr>
<th scope="row">Basic Experiments</th>
<td data-th="標題A">150 /hour</td>
<td data-th="標題B">-</td>
<td data-th="標題B">1100 /hour</td>
<td data-th="標題B">-</td>
</tr>
<tr>
<th scope="row">Urgent Requests-</th>
<td data-th="標題A">300 /hour</td>
<td data-th="標題B">-</td>
<td data-th="標題B">2200 /hour</td>
<td data-th="標題B">-</td>
</tr>
<tr>
<th scope="row">Solid Sample Tray</th>
<td data-th="標題A">80 /piece</td>
<td data-th="標題B">-</td>
<td data-th="標題B">80 /piece</td>
<td data-th="標題B">-</td>
</tr>
<tr>
<th scope="row">Liquid Sample Tray</th>
<td data-th="標題A">120 /piece</td>
<td data-th="標題B">-</td>
<td data-th="標題B">120 /piece</td>
<td data-th="標題B">-</td>
</tr>
</tbody>
</table>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1223120764715143168&init=YDSChttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistryhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instruments
- <![CDATA[Simultaneous Thermal Analyzers]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="SDT" src="/userfiles/orden/images/20240329142611027.jpg" /></div>
<ul>
<li class="ed_txt"><span style="font-size:105%;"><strong>Simultaneous Thermal Analyzers</strong></span>
<ul>
<li class="ed_txt">English abbreviation: SDT</li>
<li class="ed_txt">Brand: TA, SDT 650</li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument location: Room 701, Tianjiabing Optoelectronics Center, Guanfu Campus</span></strong></li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument expert: Assist. Prof. Chia-Chih Chang</span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Experiment consultation and operation service: </span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></span></li>
<li class="ed_txt"><span style="font-size:105%;">Contact Person: Dr. Shen, Li-Ching, ext 56510</span>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</span></li>
<li class="ed_txt"><span style="font-size:105%;">Experiment consultation：Wang, Li-An</span></li>
</ul>
</li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Sample Delivery Address: </span></strong>
<ul>
<li class="ed_txt">Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, Hsiao-Lei )<strong></strong></li>
</ul>
</li>
</ul>
</div>]]>ChemistryInstrumentation Resource Center 2025-11-28Instrument Introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Instrument brand, model, year of purchase</strong></span><br />
Brand: TA<br />
Model: SDT 650<br />
Year of purchase: 2023<br />
<br />
<span style="font-size:105%;"><strong>Important Specifications</strong></span><br />
Temperature Range：Ambient to 750 °C<br />
Dynamic Temperature Precision：±0.5 °C<br />
Heating Rate (Linear)：0.1 to 100 °C/min<br />
Calorimetric Accuracy/Precision：±2% (based on metal standards)<br />
Heat Capacity Accuracy：±5%<br />
Sample Weight Capacity：200 mg<br />
Weighing Accuracy：±0.5%<br />
Weighing Precision：±0.1%<br />
Weight Baseline Drift： <50 µg to 1000°C & <50µg 1000 to 1300°C<br />
</div>
</div>Opening hours and service items<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Opening hours：</strong></span>Monday to Friday 8:00~17:00; entrusted services are accepted.<br />
<br />
<span style="font-size:105%;"><strong>Service items</strong></span></div>
<ul>
<li class="ed_txt">Modulated DSC</li>
<li class="ed_txt">Hi-Res TGA™</li>
<li class="ed_txt">Modulated TGA™</li>
<li class="ed_txt">Dual Sample Mode</li>
<li class="ed_txt">Auto-Stepwise TGA</li>
<li class="ed_txt">Color App-Style Touch Screen</li>
<li class="ed_txt">EGA Furnace Capable</li>
<li class="ed_txt">Dual Input Gas-Delivery Manifold</li>
<li class="ed_txt">Temperature Calibration Curie Point (ASTM E1582)</li>
<li class="ed_txt">Temperature Calibration Melting Point Standards<br />
</li>
</ul>
</div>Management and contacts<div class="ed_model01 clearfix">
<div class="ed_txt"><span style="font-size:105%;"><strong>Management of reservations</strong></span><br />
Please make reservations via <a href="https://vir.nstc.gov.tw/home/Index" title="NSTC Instruments Information System">NSTC Instruments Information System</a>.<br />
<br />
<span style="font-size:105%;"><strong>Contacts:</strong></span></div>
<ul>
<li class="ed_txt">Instrument expert: Assist. Prof. Chia-Chih Chang
<ul>
<li class="ed_txt">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></li>
</ul>
</li>
<li class="ed_txt">Experiment consultation and operation service:
<ul>
<li class="ed_txt">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></li>
<li class="ed_txt">Contact Person: Dr. Shen, Li-Ching, ext 56510
<ul>
<li class="ed_txt">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</li>
<li class="ed_txt">Experiment consultation：Wang, Li-An</li>
</ul>
</li>
</ul>
</li>
</ul>
<div class="ed_txt"><span style="font-size:105%;"><strong><span style="color:#8e44ad;">Sample Delivery Address: <br />
Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, Hsiao-Lei )</span></strong></span></div>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Charges(Unit: NTD)</caption>
<thead>
<tr>
<th rowspan="2">Billing Items</th>
<th colspan="2" scope="col">Reservation with NSTC project</th>
<th colspan="2" scope="col">Reservation without NSTC project</th>
</tr>
<tr>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
</tr>
</thead>
<tbody>
<tr>
<th scope="row">Basic Experiments</th>
<td data-th="標題A">150 /hour</td>
<td data-th="標題B">-</td>
<td data-th="標題C">1100 /hour</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Urgent Requests</th>
<td data-th="標題A">300 /hour</td>
<td data-th="標題B">-</td>
<td data-th="標題C">2200 /hour</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Solid Sample Tray</th>
<td data-th="標題A">80 /piece</td>
<td data-th="標題B">-</td>
<td data-th="標題C">80 /piece</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Liquid Sample Tray</th>
<td data-th="標題A">120 /piece</td>
<td data-th="標題B">-</td>
<td data-th="標題C">120 /piece</td>
<td data-th="標題C">-</td>
</tr>
</tbody>
</table>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1223156952364748800&init=YSDThttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistryhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instruments
- <![CDATA[TAM IV Microcalorimeter system]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="TAM IV" src="/userfiles/orden/images/20240510162527182.jpg" /></div>
<div class="ed_title01"> </div>
<ul>
<li class="ed_txt"><span style="font-size:105%;"><strong>TAM IV Microcalorimeter system</strong></span>
<ul>
<li class="ed_txt"><span style="font-size:105%;">English abbreviation: TAM IV</span></li>
<li class="ed_txt"><span style="font-size:105%;">Brand: TA, TAM IV Calorimeter</span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument location: Room 701, Tianjiabing Optoelectronics Center, Guanfu Campus</span></strong></li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument expert: Assist. Prof. Chia-Chih Chang</span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></span></li>
</ul>
</li>
<li class="ed_txt"><span style="font-size:105%;"><strong>Experiment consultation and operation service:</strong> </span>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></span></li>
<li class="ed_txt"><span style="font-size:105%;">Contact Person: Dr. Shen, Li-Ching, ext 56510</span>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</span></li>
<li class="ed_txt"><span style="font-size:105%;">Experiment consultation：Wang, Li-An</span></li>
</ul>
</li>
</ul>
</li>
<li class="ed_txt"><span style="font-size:105%;"><strong>Sample Delivery Address:<span style="color:#8e44ad;"> </span></strong></span>
<ul>
<li class="ed_txt">Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, Hsiao-Lei )</li>
</ul>
</li>
</ul>
</div>]]>ChemistryInstrumentation Resource Center 2025-07-10Instrument Introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, year of purchase</strong><br />
Brand: TA<br />
Model: TAM IV<br />
Year of purchase: 2023<br />
<br />
<span style="font-size:105%;"><strong>Function</strong></span><br />
TAM IV is the new generation, multi-channel, microcalorimetric system from TA Instruments. TAM offers maximum sensitivity, flexibility, and performance. It can be used with the most sensitive microcalorimeters and a wide variety of accessories to precisely control the experimental conditions. Up to four independent calorimeters can be used simultaneously with TAM IV, to perform repetitive or different types of experiments. TAM IV is totally modular and enables multiple calorimeters to be added to increase sample capacity or functionality. With the addition of a multicalorimeter holding six independent minicalorimeters, the sample throughput is substantially increased. TAM IV employs patented thermostat technology to precisely control the liquid bath temperature to within 0.0001°C, and can be operated in isothermal, step-isothermal or temperature-scanning mode.<br />
<br />
<strong>Important Specifications</strong><br />
1. New temperature control with new response rates provides rapid thermal equilibration and an extended temperature range of 4 °C to 150 °C for real-world cold storage applications.<br />
2. Unrivaled temperature stability for accurate heat flow measurements in experiments lasting hours to days and weeks.<br />
3. Four calorimeter positions with up to four calorimeters, each operating simultaneously and independently.</div>
</div>Opening hours and service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening hours：</strong>Monday to Friday 8:00~17:00; entrusted services are accepted.<br />
<br />
<strong>Service items</strong><br />
1. high-precision measurement of the heat generated or absorbed when a solid or liquid sample dissolves or dilutes in a solvent.<br />
2. used for general thermodynamic research as well as quantitative analysis of various solid phases.<br />
3. It comes with two containers, 25 ml, and 100 ml, primarily used in conjunction with the TAM IV thermostat with a temperature range of up to 80°C.</div>
</div>Management and contacts<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management of reservations</strong><br />
Please make reservations via <a href="https://vir.nstc.gov.tw/home/Index" title="NSTC Instruments Information System">NSTC Instruments Information System</a>.<br />
<br />
<strong>Contacts:</strong></div>
<ul>
<li class="ed_txt">Instrument expert: Assist. Prof. Chia-Chih Chang
<ul>
<li class="ed_txt">Email：<a href="mailto:mailto:cchang113ac@nycu.edu.tw" title="cchang113ac@nycu.edu.tw">cchang113ac@nycu.edu.tw</a></li>
</ul>
</li>
<li class="ed_txt">Experiment consultation and operation service:
<ul>
<li class="ed_txt">Email: <a href="mailto:mailto:567BSTA@gmail.com" title="567BSTA@gmail.com">567BSTA@gmail.com</a></li>
<li class="ed_txt">Contact Person: Dr. Shen, Li-Ching, ext 56510
<ul>
<li class="ed_txt">Operation service：Chang, Yong-yong & Yu, Hsiao-Lei</li>
<li class="ed_txt">Experiment consultation：Wang, Li-An</li>
</ul>
</li>
</ul>
</li>
</ul>
<div class="ed_txt"><span style="font-size:105%;"><strong><span style="color:#8e44ad;">Sample Delivery Address: <br />
Room 717, Tianjia-Ping Optoelectronics Building, No. 1001, Daxue Rd. East Dist., Hsinchu City 300093, Taiwan (Recipient：Yu, Hsiao-Lei )</span></strong></span></div>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Charges(Unit: NTD)</caption>
<thead>
<tr>
<th rowspan="2"> </th>
<th colspan="2" rowspan="1" scope="col">Reservation with NSTC project</th>
<th colspan="2" rowspan="1" scope="col">Reservation without NSTC project</th>
</tr>
<tr>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
<th scope="col">Entrusted Operation</th>
<th scope="col">Self-operation</th>
</tr>
</thead>
<tbody>
<tr>
<th scope="row">Basic Experiments</th>
<td data-th="標題A">150 /hour</td>
<td data-th="標題B">-</td>
<td data-th="標題C">300 /hour</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Whole Day Experiments (longer than 8 hours)</th>
<td data-th="標題A">1200</td>
<td data-th="標題B">-</td>
<td data-th="標題C">2400</td>
<td data-th="標題C">-</td>
</tr>
</tbody>
</table>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1238413657767940096&init=YTAM IVhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1998Basic Service-Chemistry
- <![CDATA[Field Emission Transmission Electron Microscope (FE-TEM)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="FIELD Emission Transmission Electron Microscope" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167388672643829760&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>Field Emission Transmission Electron Microscope (FE-TEM)</strong><br />
Brand Model: JOEL, JEM-F200</li>
<li><strong>Instrument expert: Prof. Wu, Wen-Wei</strong><br />
ext 55395</li>
<li><strong>Instrument consulting and operation services: Mr. Ou, Da-Zheng</strong><br />
ext 55371<br />
Email <a href="mailto:tem55371@nycu.edu.tw" title="tem55371@nycu.edu.tw">tem55371@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 108, Engineering Sixth Building, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>MaterialInstrumentation Resource Center 2025-04-23Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, year of purchase</strong><br />
Brand: JEOL<br />
Model: JEM-F200<br />
Purchase period: five years, purchased on 2016/12/1<br />
<br />
<strong>Important Specifications</strong></div>
<ul>
<li class="ed_txt">Electron gun: ZrO/W(100) Schottky type</li>
<li class="ed_txt">Maximum acceleration voltage: 200kV</li>
<li class="ed_txt">Magnification: x50~x2M</li>
<li class="ed_txt">Point resolution:<=0.23nm</li>
<li class="ed_txt">Lattice resolution:<=0.1nm</li>
<li class="ed_txt">Maximum tilt angle: +35~-35 degrees</li>
</ul>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Services</strong><br />
TEM: Microstructure of material specimens, defect observation of crystal structure, and selective area diffraction to determine crystal structure.<br />
<br />
<strong>Instrument training operation application instructions</strong></div>
<ol>
<li class="ed_txt">Applicants must be doctoral students and have passed the JEOL2000FX TEM assessment.</li>
<li class="ed_txt">The order of application is based on the date of passing the JEOL2000FX TEM assessment.</li>
<li class="ed_txt">The training time TEM requires 6 periods. After the training, you can make an appointment with the technician to practice and take the exam.</li>
<li class="ed_txt">You can operate on your own after passing the assessment; before passing the assessment, you are strictly prohibited from operating on your own unless assisted by a technician or teaching assistant.</li>
</ol>
<div class="ed_txt"><strong>Instrument operation reservation: please go to <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="国Reservation service management system for basic research core facilities of the National Science Council (Open a new window)">Reservation service management system for basic research core facilities of the National Science Council</a></strong></div>
</div>Opening timetable and system opening level<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Opening schedule">
<tbody>
</tbody>
<caption>Opening schedule</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">Monday</th>
<th scope="col">Tuesday</th>
<th scope="col">Wednesday</th>
<th scope="col">Thursday</th>
<th scope="col">Friday</th>
<th scope="col">Saturday</th>
<th scope="col">Sunday</th>
</tr>
<tr>
<th scope="row">Morning (08:30 to 12:00)</th>
<td data-th="Monday">Off-campus commission</td>
<td data-th="Tuesday">Off-campus commission</td>
<td data-th="Wednesday">Off-campus commission</td>
<td data-th="Thursday">Off-campus commission</td>
<td data-th="Friday">Off-campus commission</td>
<td data-th="Saturday">A license holder</td>
<td data-th="Sunday">A Licensee</td>
</tr>
<tr>
<th scope="row">Noon (13:30 to 17:00)</th>
<td data-th="Monday">Training</td>
<td data-th="Tuesday">On-campus commission</td>
<td data-th="Wednesday">B license holder</td>
<td data-th="Thursday">B license holder</td>
<td data-th="Friday">B license holder</td>
<td data-th="Saturday">B license holder</td>
<td data-th="Sunday">B license holder</td>
</tr>
<tr>
<th scope="row">Evening</th>
<td data-th="Monday">A license holder</td>
<td data-th="Tuesday">Machine training</td>
<td data-th="Wednesday">A Licensee</td>
<td data-th="Thursday">A Licensee</td>
<td data-th="Friday">A license holder</td>
<td data-th="Saturday">A license holder</td>
<td data-th="Sunday">A Licensee</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model01 clearfix">
<div class="ed_txt"><br />
<strong>System opening level</strong><br />
Level A: You can reserve a time to operate by yourself. Doctoral students who have passed the JEOL2000FX assessment can apply for training and obtain A-level qualifications after passing the license assessment.<br />
Level D: Commissioned service, operated by technicians. Please refer to the ”Opening Timetable”<br />
for the entrustment period.<br />
<strong><u>System opening level description</u></strong></div>
<ul>
<li class="ed_txt">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li class="ed_txt">Level B: Each professor assigns one student to apply for training. The other students of the professor need to be operated by students who have received training. If a professor has too many students using the instrument, he or she can ask the instrument to The person in charge applied to increase the number of students receiving training.</li>
<li class="ed_txt">Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li class="ed_txt">Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charging standard (unit: NTD)</strong></div>
<ul>
<li class="ed_txt">TEM</li>
<li class="ed_txt">reservations with NSTC project
<ul>
<li class="ed_txt">Entrusted operation: $4,000/time</li>
<li class="ed_txt">Self-guided operation: $2,000/time</li>
<li class="ed_txt">Photography: $15/picture</li>
<li class="ed_txt">EDS: $75/point, $100/line, $150/plane</li>
</ul>
</li>
<li class="ed_txt">reservations without NSTC project
<ul>
<li class="ed_txt">Entrusted operation: $20,000/time</li>
<li class="ed_txt">Self-guided operation: $15,000/time</li>
<li class="ed_txt">Photography: $150/picture</li>
<li class="ed_txt">EDS: $150/point, $200/line, $300/plane</li>
</ul>
</li>
</ul>
</div>Management and usage<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management and usage instructions</strong></div>
<ol>
<li class="ed_txt">This laboratory is not a TEM specimen production unit. Please prepare observable TEM specimens for experiments. The test piece needs to be prepared by yourself, with a diameter of 3mm and a thickness of less than 300nm.</li>
<li class="ed_txt">The sample to be tested should be a solid material and should have appropriate and sufficient mechanical strength to avoid peeling and fragmentation during the operation of entering and exiting the electron microscope or during the detection operation, and will not be accepted.</li>
<li class="ed_txt">Materials with low melting points such as indium and tin will produce phase changes and evaporation effects and will not be accepted.</li>
<li class="ed_txt">Samples that will decompose or release gas under electron beam irradiation and interfere with vacuum, such as organic matter, polymer, biological or ferromagnetic powder samples, etc., will not be accepted.</li>
<li class="ed_txt">Powder form samples or materials that are highly magnetic, magnetic, or easily attracted to electromagnetic lenses, such as iron, cobalt, nickel, etc. powders, will not be accepted.</li>
<li class="ed_txt">Radioactive or toxic samples will not be accepted.</li>
<li class="ed_txt">All samples dripped with aqueous solutions onto copper grids need to be fully dried to remove moisture; after the samples are sent to our laboratory, they still need to be baked again by our laboratory staff for ten minutes before they can be served. machine. If the test piece is filled with water vapor and causes contamination of the machine, the reservation unit will need to jointly bear the cost of machine maintenance.</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167388672643829760&init=YFIELD Emission Transmission Electron Microscopehttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1994Basic Service-Material
- <![CDATA[Ultra High Resolution Field Emission Scanning Electron Microscope and Electron Back-Scattered Diffraction]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Ultra-high resolution field emission scanning electron microscope and electron backscatter diffractometer" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167390125932417024&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>JEOL JSM-7800F PrimeSEM</strong><br />
Brand Model: JEOL JSM-7800F PRIME+ EDS Oxford MAX150 and EBSD NordlysMax3</li>
<li><strong>Instrument expert: Prof. Wu, Pu-Wei</strong><br />
Ext 31227</li>
<li><strong>Instrument consultation and operation service: Ms. Chien Shu-Chun</strong><br />
Ext. 55327(O), 55355(L)<br />
Email <a href="mailto:scchien@nycu.edu.tw" title="scchien@nycu.edu.tw">scchien@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 211, Engineering Sixth Building, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>MaterialInstrumentation Resource Center 2024-02-06Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, year of purchase</strong><br />
Brand and model: JEOL JSM-7800F PRIME+ EDS Oxford MAX150 and EBSD NordlysMax3<br />
Purchase date: January 2016<br />
<br />
<strong>Important Specifications</strong></div>
<ul>
<li class="ed_txt">Resolving power: 0.7nm (15kV), 0.7nm(1kV)</li>
<li class="ed_txt">In-Lens Schottky Plus Field Emission Electron Gun</li>
<li class="ed_txt">Gun Vacuum: 10-7 Pa or higher</li>
<li class="ed_txt">Magnification: x25 to x1,000,000</li>
<li class="ed_txt">Acceleration voltage: 0.1V to 30kV</li>
</ul>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Services<br />
Image observation and photography:</strong><br />
SEI (Scanning Electron Image)<br />
BEI (Backscattered Electron Image)<br />
EDS (Energy Dispersive X-ray Spectrometer)<br />
EBSD (Electron Backscatter Diffraction Analysis)<br />
<br />
<strong>Instrument training operation application instructions</strong></div>
<ol>
<li class="ed_txt">You must first pass the FESEM6500 and 6700 assessment of the Materials Department of our school and operate the machine for more than 24 hours within three months</li>
<li class="ed_txt">To apply for training, please contact the technician and download the "Instrument Training Certification and Use Qualification Change Application Form"</li>
</ol>
</div>
<div class="ed_model17 clearfix ed_list">
<ul>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">For instrument operation reservations, please go to the National Science Council Basic Research Core Facility Reservation Service Management system reservation</span> </span>
<ul class="d-flex">
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="For instrument operation reservations, please go to the National Science Council Basic Research Core Facility Reservation Service Management System reservation(open new window)"><img alt="For instrument operation reservations, please go to the National Science Council Basic Research Core Facility Reservation Service Management System reservation" src="/userfiles/file/link.png" /> </a></li>
</ul>
</li>
<li class="d-flex"><span style="vertical-align: inherit;"><span style="vertical-align: inherit;">SEM Instrument Training Certification and Use Qualification Change Application Form</span> </span>
<ul class="d-flex">
<li><a href="/userfiles/ordch/files/20231020170705907.odt" rel="noreferrer noopener" target="_blank" title="SEM Instrument Training Certification and Use Qualification Change Application Form (odt)(Open a new window )"><img alt="SEM Instrument Training Certification and Use Qualification Change Application Form" src="/userfiles/file/odt.png" /> </a></li>
</ul>
</li>
</ul>
</div>Opening hours and system opening levels<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening schedule</strong><br />
Monday to Friday: Commission period<br />
Evenings and Saturdays: Class A<br />
<br />
<strong>System opening level</strong></div>
<ol>
<li class="ed_txt">General working hours: commissioned hours</li>
<li class="ed_txt">Night and holiday periods: Class A</li>
</ol>
<div class="ed_txt"><strong><u>System opening level description</u></strong></div>
<ul>
<li class="ed_txt">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li class="ed_txt">Level B: Each professor assigns one student to apply for training. The other students of the professor need to be operated by students who have received training. If a professor has too many students using the instrument, he or she can ask the instrument to The person in charge applied to increase the number of students receiving training.</li>
<li class="ed_txt">Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li class="ed_txt">Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Charge Standard (Unit: NTD)">
<tbody>
</tbody>
<caption>Charging standard (unit: NTD)</caption>
<tbody>
<tr>
<th scope="col">Billing items</th>
<th scope="col">Planned unit price</th>
<th scope="col">Cash unit price</th>
<th scope="col">Do it yourself</th>
<th scope="col">Remarks</th>
</tr>
<tr>
<th scope="row">Basic operations (SEM image)</th>
<td data-th="Planned unit price">1,500</td>
<td data-th="cash unit price">15,000</td>
<td data-th="Do it yourself">1,200</td>
<td data-th="Remarks">3 hours as a unit<br />
(If the paper mentions this instrument service, you can enjoy a 20% discount)</td>
</tr>
<tr>
<th scope="row">EBSD</th>
<td data-th="Planned unit price">600</td>
<td data-th="cash unit price">6,000</td>
<td data-th="Operation by yourself">360</td>
<td data-th="Remarks">Unit: times</td>
</tr>
<tr>
<th scope="row">EDS, BEI</th>
<td data-th="Plan unit price">300</td>
<td data-th="Cash unit price">3,000</td>
<td data-th="Operation by yourself">300</td>
<td data-th="Remarks">Unit: times</td>
</tr>
<tr>
<th scope="row">Polymer, powder, high volatility, weak magnetism<br />
(powder)</th>
<td data-th="Planned unit price">1,200</td>
<td data-th="Cash unit price">10,000</td>
<td data-th="Operation by yourself">700</td>
<td data-th="Remarks">Unit: times</td>
</tr>
<tr>
<th scope="row"><br />
gold plating</th>
<td data-th="Plan unit price">200</td>
<td data-th="cash unit price">1,000</td>
<td data-th="Operation by yourself">200</td>
<td data-th="Remarks">The client must be platinum plated, please select once</td>
</tr>
</tbody>
</table>
<br />
If startup testing is required, a startup fee will be charged (unit basic fee $6,000)</div>
</div>Management and usage<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and usage methods</strong></div>
<ol>
<li class="ed_txt">Limited open magnetism (containing iron, cobalt, and nickel components), powders (magnetic powders are strictly prohibited), polymers, and biological materials. You must write a letter to inform the nature and type of the material and discuss it with the SEM technician. If you do not inform us in advance in writing, the experiment will not be carried out.</li>
<li class="ed_txt">Please bring your own blank CD-R/DVD to access files</li>
<li class="ed_txt">SEM test piece size limit length and width 20mm×20mm, height 10mm<br />
EBSD test piece size limit: length and width 10mm×10mm, height 3mm</li>
<li class="ed_txt">Please cut the test pieces by yourself in advance. On-site cutting is not allowed in the instrument room.</li>
<li class="ed_txt">If you are late for more than 30 minutes or the sample does not meet the requirements and the order cannot be entrusted, it will be deemed to be abandoned and the "basic time period fee" will be deducted.</li>
<li class="ed_txt">If you need to do EBSD, you need to inform us by email first. If you don't inform us in advance by writing, the experiment will not be carried out.
<ul>
<li class="ed_txt">phase (element phase)</li>
<li class="ed_txt">Grain size</li>
<li class="ed_txt">Area</li>
<li class="ed_txt">Test pieces (quantity, how many points for each test piece)</li>
</ul>
</li>
<li class="ed_txt">It is prohibited to bring food and drinks into the instrument room. For your first entrustment, please write in advance to inform us of the material type, thank you.</li>
<li class="ed_txt">Cancellation method:
<ol>
<li class="ed_txt">If you want to cancel, please cancel online 7 days before the scheduled FESEM date. If you do not cancel, cancel less than 7 days before, or do not show up on the day, the "basic time slot fee" will be deducted.</li>
<li class="ed_txt">If cancellation cannot be made online, it means that the 7-day cancellation deadline has passed.</li>
<li class="ed_txt">This equipment can only be canceled online. If you call to inform you that you cannot come, the "basic time slot fee" will still be deducted.</li>
</ol>
</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167390125932417024&init=YUltra-high resolution field emission scanning electron microscope and electron backscatter diffractometerhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1994Basic Service-Material
- <![CDATA[X-ray Photoelectron and Auger Electron Epectroscopy]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="X-RAY PHOTOELECTRON & AUGER ELECTRON SPECTROSCOPY" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167389366796947456&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>X-ray Photoelectron and Auger Electron Epectroscopy</strong><br />
English abbreviation: XPS/AES<br />
Brand model: UK Thermo Fisher Scientific, ESCALAB Xi<sup>+</sup></li>
<li><strong>Instrument expert: Prof. Hsu, Yung-Jung</strong><br />
ext 55317<br />
Email <a href="mailto:yhsu@cc.nctu.edu.tw" title="yhsu@cc.nctu.edu.tw">yhsu@cc.nctu.edu.tw</a></li>
<li><strong>Instrument consultation and operation service: Ms. Huang, Hsiu-Ying</strong><br />
Extension 55358 (EF110 Office), 55339 (EF215 Laboratory)<br />
Email <a href="mailto:yuffie@nycu.edu.tw" title="yuffie@nycu.edu.tw">yuffie@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room EF215, Engineering Building 6, Guanfu Campus</strong><br />
ext 55339</li>
</ul>
</div>
</div>
</div>]]>MaterialInstrumentation Resource Center 2024-02-06Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrumentation</strong></div>
<ul>
<li class="ed_txt">Chinese name: X-ray photoelectronics and Oujie electronic energy spectrometer</li>
<li class="ed_txt">English name: X-ray Photoelectron and Auger Electron Epectroscopy</li>
<li class="ed_txt">Year and month of joining Guiyi: November 2004</li>
<li class="ed_txt">Year and month of instrument purchase: November 2017, replacing old ones with new ones</li>
<li class="ed_txt">Instrument funding sources: National Science Council, National Yang-Ming Chiao Tung University</li>
<li class="ed_txt">Brand and model: British Thermo Fisher Scientific, ESCALAB Xi+</li>
</ul>
<div class="ed_txt"><strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt">XPS (ESCA):
<ul>
<li class="ed_txt">X-ray light source: monochromatic X-ray source (Al Anode)</li>
<li class="ed_txt">The X-ray beam can be set from 200μm to 900μm</li>
</ul>
</li>
<li class="ed_txt">Energy analysis instrument: 180° Spherical Sector Analyzer (SSA)
<ul>
<li class="ed_txt">Energy resolution: 0.02~2.0%</li>
<li class="ed_txt">Energy resolution≦ 0.5eV at Ag 3d5/2 peak (Ag standard)</li>
<li class="ed_txt">Energy resolution≦ 0.9eV at C 1s peak (PET standard)</li>
<li class="ed_txt">Analysis area: 20μm~8mm</li>
</ul>
</li>
<li class="ed_txt">Ion source: Argon ion gun
<ul>
<li class="ed_txt">Two sputtering modes, Monatomic and Cluster, are available for sample surface cleaning and in-depth analysis.</li>
<li class="ed_txt">Ion beam energy range:
<ul>
<li class="ed_txt">Monatomic mode─500 eV to 3 keV</li>
<li class="ed_txt">Cluster mode─2 keV to 7 keV</li>
</ul>
</li>
<li class="ed_txt">Ion beam size range:
<ul>
<li class="ed_txt">Monatomic mode─500 μm @ 3.0 μA and 3 keV</li>
<li class="ed_txt">Cluster mode─100 atoms ~ 2000 atoms</li>
</ul>
</li>
</ul>
</li>
<li class="ed_txt">Single-gun dual-beam charge compensation: The same beam source can simultaneously use low-energy electrons and ions for dual-beam charge compensation.</li>
<li class="ed_txt">AES: field emission electron gun
<ul>
<li class="ed_txt">Acceleration voltage: 1 keV ~ 10 keV </li>
<li class="ed_txt">SEM spatial resolution: 95 nm at 10 keV, 5.0 nA</li>
</ul>
</li>
<li class="ed_txt">UPS (Ultraviolet Photoelectron Spectroscopy):
<ul>
<li class="ed_txt">Ultra Violet source (He UV light source)</li>
<li class="ed_txt">Test piece size: 5mm×5mm ~40mm×20mm</li>
<li class="ed_txt">Vacuum rate: ~30 minutes</li>
</ul>
</li>
</ol>
<div class="ed_txt"><strong>Function</strong></div>
<ol>
<li class="ed_txt">XPS qualitative and quantitative analysis of surface components</li>
<li class="ed_txt">XPS chemical shift analysis</li>
<li class="ed_txt">XPS depth profile analysis</li>
<li class="ed_txt">XPS element image scanningXPS Mapping</li>
<li class="ed_txt">UPS UV photoelectron scanning</li>
<li class="ed_txt">Auger surface composition analysis</li>
<li class="ed_txt">Auger depth profiling depth component analysis</li>
<li class="ed_txt">Auger point analysis and mapping micro-area element and component distribution analysis</li>
<li class="ed_txt">REELS/ISS</li>
<li class="ed_txt">Electrical neutralization charge compensation</li>
</ol>
</div>Service items and opening hours<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Service items and content">
<tbody>
</tbody>
<caption>1. Service items and content</caption>
<tbody>
<tr>
<th scope="col" style="text-align: left;"> </th>
<th scope="col" style="text-align: left;">Service items</th>
<th scope="col" style="text-align: left;">Possible information content</th>
</tr>
<tr>
<th scope="row">1</th>
<td data-th="Service items" style="text-align: left;">Qualitative surface analysis (Survey Scan)</td>
<td data-th="Possible information content" style="text-align: left;">Identify the presence of various chemical elements on the surface of the sample</td>
</tr>
<tr>
<th scope="row">2</th>
<td data-th="Service items" style="text-align: left;">Surface Quantitative Analysis (Survey Scan)</td>
<td data-th="Possible information content" style="text-align: left;">Identification of the relative atomic concentration percentage of elements on the surface of the sample</td>
</tr>
<tr>
<th scope="row">3</th>
<td data-th="Service items" style="text-align: left;">XPS chemical shift (chemical shift)</td>
<td data-th="Possible information content" style="text-align: left;">Analyze the chemical state/bonding state of elements</td>
</tr>
<tr>
<th scope="row">4</th>
<td data-th="Service items" style="text-align: left;">Depth profiling</td>
<td data-th="Possible information content" style="text-align: left;">The depth distribution of various chemical elements in the sample under ion etching</td>
</tr>
<tr>
<th scope="row">5</th>
<td data-th="Service items" style="text-align: left;">Micro area analysis (Point)</td>
<td data-th="Possible information content" style="text-align: left;">Identification of the components of selected micro-areas on the surface of the sample</td>
</tr>
<tr>
<th scope="row">6</th>
<td data-th="Service items" style="text-align: left;">Element image scanning (Mapping)</td>
<td data-th="Possible information content" style="text-align: left;">Obtain the two-dimensional distribution image of chemical elements on the sample surface</td>
</tr>
<tr>
<th scope="row">7</th>
<td data-th="Service items" style="text-align: left;">Ultraviolet photoelectronic scanning (UPS)</td>
<td data-th="Possible information content" style="text-align: left;">Measurement of Valance band and work function</td>
</tr>
<tr>
<th scope="row">8</th>
<td data-th="Service items" style="text-align: left;">REELS(Reflection Electron Energy Loss Spectroscopy)</td>
<td data-th="Possible information content" style="text-align: left;">Identification of allotropes</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Opening hours and management">
<tbody>
</tbody>
<caption>2. Open usage time and management</caption>
<tbody>
<tr>
<th scope="col"> </th>
<th scope="col">8:30~12:30am</th>
<th scope="col">13:30～17:30 pm</th>
<th scope="col">18:00～22:00 in the evening</th>
</tr>
<tr>
<th scope="row">Monday</th>
<td data-th="8:30~12:30am"><strong>Instrument Maintenance</strong></td>
<td data-th="13:30~17:30pm">Entrusted service period (priority registration outside campus)</td>
<td data-th="18:00～22:00">Self-operated period (Level B) (priority registration on campus)</td>
</tr>
<tr>
<th scope="row">Tuesday</th>
<td data-th="8:30~12:30 am">Self-operated period (Level B) (priority registration outside school)</td>
<td data-th="13:30~17:30pm">Entrusted service period (priority registration on campus)</td>
<td data-th="18:00～22:00">Self-operated period (Level B) (priority registration on campus)</td>
</tr>
<tr>
<th scope="row">Wednesday</th>
<td data-th="8:30~12:30">Entrusted service period (priority registration on campus)</td>
<td data-th="13:30~17:30pm">Entrusted service period (priority registration outside campus)</td>
<td data-th="18:00～22:00">Self-operated period (Level B) (priority registration on campus)</td>
</tr>
<tr>
<th scope="row">Thursday</th>
<td data-th="8:30~12:30 am"><strong>Training period</strong></td>
<td data-th="13:30~17:30pm">Entrusted service period (priority registration on campus)</td>
<td data-th="18:00～22:00">Self-operated period (Level B) (priority registration on campus)</td>
</tr>
<tr>
<th scope="row">Friday</th>
<td data-th="8:30~12:30am"><strong>Assessment period</strong></td>
<td data-th="13:30~17:30pm">Entrusted service period (priority registration outside campus)</td>
<td data-th="18:00～22:00">Self-operated period (Level B) (priority registration on campus)</td>
</tr>
<tr>
<th scope="row">Saturday</th>
<td data-th="8:30~12:30 am">Self-operated period (Level A)</td>
<td data-th="13:30~17:30pm">Self-operated period (Level A)</td>
<td data-th="18:00~22:00 in the evening">Self-operation period (level A)</td>
</tr>
<tr>
<th scope="row">Sunday</th>
<td data-th="8:30~12:30 am">Self-operated period (Level A)</td>
<td data-th="13:30~17:30pm">Self-operated period (Level A)</td>
<td data-th="18:00~22:00 in the evening">Self-operation period (level A)</td>
</tr>
</tbody>
</table>
<ul>
<li>Level B: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li>Level A: Only those with Level B licenses who have accumulated 80 hours of computer time can apply for the exam to become Level A licenses.</li>
</ul>
</div>
</div>Service application method<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Application Service Methods (Reservation rules are subject to the National Science Council Basic Research Core Facilities Reservation Service Management System, and the time period is flexible)</strong></div>
<ol>
<li class="ed_txt"><strong>Technician Operation Service</strong>:
<ol>
<li class="ed_txt">Please go to <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open a new window)">National Science Council Basic Research Core Facilities Reservation Service Management System</a> Reservation period (<strong>Reservations for the next month will be open at 00:00 am on the 21st of each month</strong>, Make a priority appointment according to the table above; for off-campus priority time slots, if the reservation is not full after 7 days of opening, the technician may open the appointment to people inside and outside the school). Detailed description of the nature of the sample to be tested and the entrusted items will be provided according to the time period applied for. For those who want to make an appointment, please refer to Relevant regulations to avoid incorrect payment methods. <u><strong>If for some reason the film to be tested cannot be delivered before the appointment time, you should cancel the appointment online at least one week before the appointment time. If you do not arrive for the appointment, you will still be charged for the original appointment time period. </strong></u></li>
<li class="ed_txt"><strong>Each entrusted user can only reserve 7 time periods/month</strong> (four hours is a time period), the number of samples sent for each test: Depth: 1 sample/time period , Surface analysis: The maximum number of elements to be analyzed is 30 in total per period. Reservations can be made only after the measurement is completed; those who do not meet the requirements will be automatically canceled without further notice.</li>
<li class="ed_txt">When capturing micro-area positioning maps or images, someone must accompany the unit sending the test.</li>
<li class="ed_txt"><u><strong>Interpretation of data results is your own responsibility. </strong></u></li>
<li class="ed_txt">If the sample is submitted for testing without prior written request for sample pre-processing and the desired spectrum cannot be obtained, the unit submitting the sample still needs to pay according to the working hours.</li>
<li class="ed_txt">Please bring a blank CD-ROM, pen drive or blank diskette for analysis data access.</li>
<li class="ed_txt">A valuable instrument reservation application form must be submitted (the supervisor’s signature is required).</li>
</ol>
</li>
<li class="ed_txt"><strong>Self-operated services</strong>:
<ol>
<li class="ed_txt">Doctoral students who have obtained "qualified licenses" can operate the computer on their own.</li>
<li class="ed_txt">Reservations for the use of self-operated instruments are based on the laboratory. <strong>The number of reservations is limited: 5 periods/month</strong>. Reservations can be made only after the measurement is completed. Those who do not meet the regulations Will be automatically canceled without notice.</li>
<li class="ed_txt"><strong>Self-operators must call the technician to make an appointment before each use. You can make another appointment after the test is completed. </strong></li>
<li class="ed_txt"><strong><u><strong>If for some reason you are unable to use the instrument during the reservation period, you should cancel the reservation online at least one week before the reservation period, otherwise you will still be charged for the original reservation period. </strong></u></strong></li>
<li class="ed_txt"><strong>When the sample enters, the pressure of the entry chamber of the instrument system must reach <u><strong>1×10-3torr</strong></u><strong>. </strong></strong></li>
<li class="ed_txt"><strong>Before sample analysis, the analysis chamber pressure of the instrument system should be determined<<u><strong>5×10-9torr</strong></u> before turning on the electron gun and detector power switch for analysis. </strong></li>
<li class="ed_txt"><strong><strong>When using this instrument, any damage caused by abnormal use will be borne by the operator's instructor and supervisor to bear the maintenance costs of the instrument and equipment. </strong></strong></li>
<li class="ed_txt"><strong>Instrument users must fill in the experiment record book accurately. </strong></li>
<li class="ed_txt"><strong>It is prohibited to bring food and drinks into the instrument room for consumption, and the instrument room must be kept clean and tidy. </strong></li>
<li class="ed_txt"><strong>Must comply with the X-ray Optoelectronics and Oujie Electronic Energy Spectrometer Laboratory Management Regulations. </strong></li>
</ol>
<strong> </strong></li>
<li class="ed_txt"><strong><strong>Sample specifications:</strong> </strong>
<ol>
<li class="ed_txt"><strong>Samples must not be liquid, powder, toxic, magnetic, radioactive, organic (including film) or cause corrosion to vacuum chamber parts. </strong></li>
<li class="ed_txt"><strong><strong>Samples should be limited to low non-volatility to avoid contamination of the ultra-high vacuum system. </strong></strong></li>
<li class="ed_txt"><strong><u><strong>The area is larger than 0.5cm * 0.5cm square, smaller than 4cm *2cm rectangle, and the thickness is < 2mm. </strong></u></strong></li>
<li class="ed_txt"><strong>Please send two samples for the testing service in case of testing difficulties. </strong></li>
<li class="ed_txt"><strong>If during analysis and testing, it is found that the sample submitted for testing does not meet the requirements, the sample will be returned and payment will be made based on the working hours. </strong></li>
<li class="ed_txt"><strong>When performing depth profile, the sputter time is limited to 3.5 hours. Please consider the thickness of the test piece by yourself. </strong></li>
</ol>
<strong> </strong></li>
<li class="ed_txt"><strong><strong>How to obtain a qualified license</strong></strong></li>
</ol>
<div class="ed_txt" style="margin-left: 40px;"><strong><u><strong>Purpose</strong></u>: In order to make full use of this valuable instrument, we decided to open it to qualified users. , to relieve excessive service demands and reap the benefits of talent training. </strong></div>
<div class="ed_txt" style="margin-left: 40px;"><strong><u><strong>Method</strong></u>: How to obtain a "Use License":</strong></div>
<ol style="margin-left: 40px;">
<li class="ed_txt"><strong>Each research office should recommend a doctoral student by the supervising professor or unit supervisor to submit an application. </strong></li>
<li class="ed_txt"><strong>Application qualifications: Applicants must have studied relevant material analysis technology courses and have experience in operating electron microscopes. </strong></li>
<li class="ed_txt"><strong>The doctoral student should fill out the "Education and Training Application Form" (Level A or B) and arrange training time through the instrument technician. </strong></li>
<li class="ed_txt"><strong>This instrument will provide educational training and use "training operation" and "operation observation" methods to achieve the purpose of self-operation in the laboratory of the main user. "Training operation": the teaching assistant is responsible for teaching the machine structure and operation steps; "Operation observation": learning the operation skills from qualified licensed users. </strong></li>
<li class="ed_txt"><strong>The number of B-level training is 4 weeks, and operation observation requires more than 2 times; the number of A-level training is 2 weeks. </strong></li>
<li class="ed_txt"><strong>Those who pass the operation examination by the teaching assistant or technician and the professor in charge of the instrument will obtain the qualification of "Qualified Level B or Level A Operator". </strong></li>
<li class="ed_txt"><strong>Level B operators must accumulate more than 80 hours of operation before they can apply for the qualification of Level A operators. </strong></li>
<li class="ed_txt"><strong>After the doctoral student obtains the [User License], he needs to assist his own laboratory personnel in performing the analysis of this instrument. </strong></li>
<li class="ed_txt"><strong>If additional practice operations are required (a qualified operator must be present), the fees will be charged according to technician operation services (charge standard: 450 yuan per hour). </strong></li>
<li class="ed_txt"><strong>If you fail the operation test for the second time and make serious mistakes during operation, the laboratory reserves the right to refuse the trainee the right to operate it in person. </strong></li>
<li class="ed_txt"><strong>When using this instrument, any damage caused by abnormal use will be borne by the instructor and supervisor of the self-operated instrument and equipment maintenance costs. </strong></li>
<li class="ed_txt"><strong>If a user who has obtained a "qualified license" does not operate this equipment for 2 months, his or her qualifications will need to be re-certified. </strong></li>
<li class="ed_txt"><strong>Must comply with laboratory regulations during training and use. </strong></li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charging standards</strong></div>
<ol>
<li class="ed_txt">Entrusted service:<br />
The charging standard is a basic usage fee of NT$500/hr, which is billed based on the time period. If the service exceeds 4 hours, the actual service hours will be billed. Including sample processing time, sample vacuuming time, shutdown waiting time and data processing time, late time will still be billed as service time.<br />
<ul>
<li class="ed_txt">Use Ar ion gun NT$100/hr.</li>
<li class="ed_txt">Use charge compensation gun NT$100/hr.</li>
<li class="ed_txt">Use UPS NT$120/hr.</li>
<li class="ed_txt">Emergency charges are twice the standard charges.</li>
</ul>
</li>
<li class="ed_txt">Self-operation: The charging standard is the basic usage fee of NT$400/hr, and the rest are the same as entrustment.</li>
<li class="ed_txt">The fees for education and training are all billed according to technician operation services (charge standard: NT$500 per hour). <strong>For B-level training, please reserve four sessions; for A-level training, please reserve one session. And explain the reservation used for training. </strong></li>
</ol>
<div class="ed_txt"><strong>Reply time</strong><br />
It depends on the number of samples to be tested and the appointment time, about 2 weeks to 1 month.</div>
</div>Contact person<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Professor Xu Yongying</li>
<li class="job-title">Instrument Instructor</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> (03)5712121#55317</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:yhsu@cc.nctu.edu.tw?subject=undefined& body=undefined" id="1-2" title="yhsu@cc.nctu.edu.tw">yhsu@cc.nctu.edu.tw</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Miss Huang Xiuyin</li>
<li class="job-title">Instrument Operator</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> (03)5712121#55358 (EF110 Office) #55339 (EF215 Laboratory) < /li></li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:yuffie@nycu.edu.tw?subject=undefined&body= undefined" id="1-2" title="yuffie@nycu.edu.tw">yuffie@nycu.edu.tw</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Ms. Chen Yi'an</li>
<li class="job-title">Instrument teaching assistant</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> (03)5712121#55390</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:a00002266@gmail.com?subject=undefined&body=undefined" id="1-2" title="a00002266@gmail.com">a00002266@gmail.com</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Miss Wang Yuting</li>
<li class="job-title">Instrument teaching assistant</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> (03)5712121#55390</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:irene860812@gmail.com?subject=undefined&body=undefined" id="1-2" title="irene860812@gmail.com">irene860812@gmail.com</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Mr. Wang Qianyi</li>
<li class="job-title">Instrument teaching assistant</li>
<li class="li"><img alt="Contact number" src="/userfiles/editor/ic_phone.svg" /> (03)5712121#55390</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:jacky6734@gmail.com?subject=undefined&body=undefined" id="1-2" title="jacky6734@gmail.com">jacky6734@gmail.com</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" /> Instrument room location: Room EF215, Building 6, Department of Materials, National Chiao Tung UniversityRelated files<div class="ed_model02 clearfix">
<div class="ed_title01">XPS analysis related</div>
</div>
<div class="ed_model17 clearfix ed_list">
<ul>
<li class="d-flex">XPS Reference (From Thermo Sientific)—Can be used as a reference when analyzing spectra.
<ul class="d-flex">
<li><a href="https://www.thermofisher.com/blog/mining/xps-reference-table-of-elements-for-mining-and-minerals/" rel="noreferrer noopener" target=" _blank" title="XPS Reference (From Thermo Sientific)—You can refer to it when analyzing the spectrumOpen a new window"><img alt="XPS Reference (From Thermo Sientific)—You can refer to it when analyzing the spectrum." src="/userfiles/file/link.png" /> </a></li>
</ul>
</li>
<li class="d-flex">UPS function application and Avatage data processing
<ul class="d-flex">
<li><a href="/userfiles/ordch/files/20231020165539503.pdf" rel="noreferrer noopener" target="_blank" title="UPS Function Application and Avatage Data Processing (pdf) (Open a new window)"><img alt="UPS Function Application and Avatage Data Processing" src="/userfiles/file/pdf.png" /> </a></li>
</ul>
</li>
</ul>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167389366796947456&init=YX-RAY PHOTOELECTRON & AUGER ELECTRON SPECTROSCOPYhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1994Basic Service-Material
- <![CDATA[High Resolution Dual-Beam Focused Ion Beam Microscope]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_left"> </div>
<div class="ed_pic_right"><img alt="FIB Microscope" src="/userfiles/orden/images/20250623152114087.jpg" /></div>
<ul>
<li class="ed_txt"><strong><span style="font-size:105%;">High Resolution Dual-Beam Focused Ion Beam Microscope</span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">English abbreviation: FIB Microscope</span></li>
<li class="ed_txt"><span style="font-size:105%;">Brand model: ZEISS Crossbeam 350</span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument expert: Prof. Wu, Wen-Wei</span></strong>
<ul>
<li class="ed_txt"><span style="font-size:105%;">Ext 55395</span></li>
<li class="ed_txt"><span style="font-size:105%;">Email <a href="mailto:mailto:wwwu@nycu.edu.tw" title="wwwu@nycu.edu.tw">wwwu@nycu.edu.tw</a></span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Experiment consultation and operation service:</span></strong>
<ul>
<li class="ed_txt">Tsai, Jhen-Dong, <a href="mailto:mailto:rio610033@gmail.com " title="rio610033@gmail.com">rio610033@gmail.com </a></li>
<li class="ed_txt">Huang, Hua-Jing, <a href="mailto:mailto:huajinghuang.en11@nycu.edu.tw" title="huajinghuang.en11@nycu.edu.tw">huajinghuang.en11@nycu.edu.tw</a></li>
<li class="ed_txt"><span style="font-size:105%;">Ext 55346</span></li>
</ul>
</li>
<li class="ed_txt"><strong><span style="font-size:105%;">Instrument location: Room EF104, Engineering Building 6, Guanfu Campus</span></strong></li>
</ul>
</div>]]>MaterialInstrumentation Resource Center 2025-12-24Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, year of purchase</strong></div>
<ul>
<li class="ed_txt">Brand and model: ZEISS Crossbeam 350</li>
<li class="ed_txt">Purchase date: December, 2024</li>
</ul>
<div class="ed_txt"><strong>Function</strong></div>
<ul>
<li class="ed_txt">Electron microscope and APT sample preparation, EBSD and EDS analysis information, and large-volume 3D microstructure analysis.</li>
</ul>
<div class="ed_txt"><strong>Important Specifications</strong></div>
<ul>
<li class="ed_txt">SEM
<ul>
<li class="ed_txt">Image resolution：
<ul>
<li class="ed_txt">0.7 nm (15kV)</li>
<li class="ed_txt">1.4 nm (1kV)</li>
<li class="ed_txt">1.0 nm (1kV, BD mode)</li>
</ul>
</li>
<li class="ed_txt">Accelerating voltage：0.01 to 30kV</li>
<li class="ed_txt">Specimen bias voltage：0.0 to -5.0kV</li>
<li class="ed_txt">Electron gun：In-lens Schottky Plus filed field emission gun</li>
</ul>
</li>
<li class="ed_txt">FIB
<ul>
<li class="ed_txt">Image resolution：3 nm (at 30kV)</li>
<li class="ed_txt">Accelerating voltage：0.5 to 30kV</li>
<li class="ed_txt">Ion source：Ga liquid metal ion source</li>
</ul>
</li>
</ul>
</div>Service Items and Opening Levels<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Service Items:</strong></div>
<ul>
<li class="ed_txt">General TEM specimen preparation, SEM, EBSD and other related sample preparation and basic analysis.</li>
</ul>
<div class="ed_txt"><strong>System Opening levels:</strong><br />
Working hours： B、C<br />
Nights and holidays：A<br />
<br />
*System opening level description<br />
Level A: Possess a Class B license with 300 hours of operation, approved by the TAs.<br />
Level B: Each professor will assign one student to be trainned to use the instrument, and the other students of the lab should entrust their experiments to the students who have received training. If there are plenty of students in the same lab need to use the instrument, the PI may apply to the TA for an extra quota of student training.<br />
Level C: The service is commissioned by the technical staff of this laboratory and is not open for use.</div>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Charges (NTD)</caption>
<tbody>
<tr>
<th colspan="1" rowspan="2">Billing items</th>
<th colspan="2" rowspan="1" scope="col">Reservation with NSTC project</th>
<th colspan="2" rowspan="1" scope="col">Reservation without NSTC project</th>
</tr>
<tr>
<td data-th="標題A">entrusted operation</td>
<td data-th="標題B">self operation</td>
<td data-th="標題C">entrusted operation</td>
<td data-th="標題C">self operation</td>
</tr>
<tr>
<th scope="row">TEM Lamella</th>
<td data-th="標題A">3000</td>
<td data-th="標題B">1200</td>
<td data-th="標題C">8000</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">EBSD</th>
<td data-th="標題A">800</td>
<td data-th="標題B">400</td>
<td data-th="標題C">2400</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">analysis at point</th>
<td data-th="標題A">200</td>
<td data-th="標題B">100</td>
<td data-th="標題C">400</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">analysis by line scan</th>
<td data-th="標題A">240</td>
<td data-th="標題B">120</td>
<td data-th="標題C">500</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">analysis by map</th>
<td data-th="標題A">320</td>
<td data-th="標題B">150</td>
<td data-th="標題C">600</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">coating Pt (0.1hr)</th>
<td data-th="標題A">300</td>
<td data-th="標題B">300</td>
<td data-th="標題C">600</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Over time Operation/ hour</th>
<td data-th="標題A">5000</td>
<td data-th="標題B">3200</td>
<td data-th="標題C">10000</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Operation by technician 3hr</th>
<td data-th="標題A">9000</td>
<td data-th="標題B">-</td>
<td data-th="標題C">24000</td>
<td data-th="標題C">-</td>
</tr>
</tbody>
</table>
</div>
</div>Opening Hours<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>表格名稱</caption>
<tbody>
<tr>
<th> </th>
<th scope="col">Morning</th>
<th scope="col">Afternoon </th>
<th scope="col">Night</th>
</tr>
<tr>
<th scope="row">Monday</th>
<td data-th="標題A">8:00-12:00<br />
entrusted operation<br />
(for external users)</td>
<td data-th="標題B">13:00-17:00<br />
(Maintenance)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)<br />
</td>
</tr>
<tr>
<th scope="row">Tuesday</th>
<td data-th="標題A">8:00-12:00<br />
entrusted operation<br />
(for external users)</td>
<td data-th="標題B">13:00-17:00<br />
entrusted operation<br />
(for internal users)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)</td>
</tr>
<tr>
<th scope="row">Wednesday</th>
<td data-th="標題A">8:00-12:00<br />
entrusted operation<br />
(for external users)</td>
<td data-th="標題B">13:00-17:00<br />
self operation<br />
(for Level B users)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)</td>
</tr>
<tr>
<th scope="row">Thursday</th>
<td data-th="標題A">8:00-12:00<br />
entrusted operation<br />
(for external users)</td>
<td data-th="標題B">13:00-17:00<br />
(Training and Evaluation)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)</td>
</tr>
<tr>
<th scope="row">Friday</th>
<td data-th="標題A">8:00-12:00<br />
entrusted operation<br />
(for external users)</td>
<td data-th="標題B">13:00-17:00<br />
self operation<br />
(for Level B users)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)</td>
</tr>
<tr>
<th scope="row">Saturday</th>
<td data-th="標題A">8:00-12:00<br />
self operation<br />
(for internal Level A users)</td>
<td data-th="標題B">13:00-17:00<br />
self operation<br />
(For Level A users)</td>
<td data-th="標題C">18:00-22:00<br />
self operation<br />
(For Level A users)</td>
</tr>
</tbody>
</table>
</div>
</div>Contact information<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Contact information</strong></div>
<ul>
<li class="ed_txt">Instrument expert: Prof. Wu, Wen-Wei
<ul>
<li class="ed_txt">Ext 55395</li>
<li class="ed_txt">Email wwwu@nycu.edu.tw</li>
</ul>
</li>
<li class="ed_txt">Experiment consultation and operation service:
<ul>
<li class="ed_txt">Tsai, Jhen-Dong, rio610033@gmail.com</li>
<li class="ed_txt">Huang, Hua-Jing, huajinghuang.en11@nycu.edu.tw</li>
<li class="ed_txt">Ext 55346</li>
</ul>
</li>
</ul>
</div>Reservation and Training Application<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Reservation</strong></div>
<ul>
<li class="ed_txt">Please make reservations at the <a href="https://vir.nstc.gov.tw/" title="NSTC Instruments Informantion System">NSTC Instruments Informantion System</a></li>
</ul>
<div class="ed_txt"><strong>Training Application:<br />
Please contact technicians for details of training application:</strong></div>
<ul>
<li class="ed_txt">Tsai, Jhen-Dong, <a href="mailto:mailto:rio610033@gmail.com " title="rio610033@gmail.com">rio610033@gmail.com</a></li>
<li class="ed_txt">Huang, Hua-Jing, <a href="mailto:mailto:huajinghuang.en11@nycu.edu.tw" title="huajinghuang.en11@nycu.edu.tw">huajinghuang.en11@nycu.edu.tw</a></li>
</ul>
<div class="ed_txt">(Please email your questions to the other technician if you are not getting any response in 2 says.)</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1386628052712165376&init=YHigh Resolution Dual-Beam Focused Ion Beam Microscope
- <![CDATA[Magnetic Property Measurement System(Superconducting Quantum Interference Device)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="High Precision Magnetic Measurement System (Superconducting Quantum Interferometer)" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167396188123566080&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>Superconducting Quantum Interference Device</strong><br />
English abbreviation: SQUID<br />
Brand Model: MPMS 3</li>
<li><strong>Instrument expert: </strong>
<ul>
<li><strong>Prof. Lin, Jiunn-Yuan</strong>
<ul>
<li>ext 31653</li>
<li>Email <a href="mailto:mailto:ago@nycu.edu.tw" title="ago@nycu.edu.tw">ago@nycu.edu.tw</a> </li>
</ul>
</li>
<li><strong>Asst.Prof. Tseng, Yi</strong><strong></strong>
<ul>
<li>ext 56227</li>
<li>Email <a href="mailto:mailto:ytseng@nycu.edu.tw" title="ytseng@nycu.edu.tw">ytseng@nycu.edu.tw</a></li>
</ul>
</li>
</ul>
</li>
<li><strong>Instrument consultation and operation service: Ms. Cheng, Mei-Chuan</strong><br />
ext 56167<br />
Email <a href="mailto:mailto:meichuan@nycu.edu.tw" title="meichuan@nycu.edu.tw">meichuan@nycu.edu.tw</a></li>
<li><strong>Instrument location：Room SC028S, Science Building , Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>PhysicsInstrumentation Resource Center 2026-01-30Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information</strong></div>
<ul>
<li class="ed_txt">Brand Model: MPMS 3</li>
<li class="ed_txt">Purchase Date: April 2019</li>
</ul>
<div class="ed_txt"><strong>Instrument Important Specifications</strong></div>
<ol>
<li class="ed_txt">Applied magnetic field: ±7T</li>
<li class="ed_txt">Temperature range: 2K~350K</li>
<li class="ed_txt">Magnetic moment range: +-10emu</li>
<li class="ed_txt">AC frequency range: 0.1Hz~1000Hz</li>
<li class="ed_txt">AC amplitude: 0.1Oe~10Oe</li>
<li class="ed_txt">Oven temperature range: 300K~1000K</li>
</ol>
</div>Service items and reservation method<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong></div>
<ol>
<li class="ed_txt">Magnetic Susceptibility MT</li>
<li class="ed_txt">Hysteresis curve MH</li>
<li class="ed_txt">AC measurement</li>
<li class="ed_txt">High temperature Oven(T＞350K)</li>
<li class="ed_txt">**The instrument is calibrated and compared regularly. If the measurement data is wrong, please correct it immediately. After re-measurement, it is confirmed that there is an error, and the sample will not be charged.</li>
</ol>
<div class="ed_txt"><strong>Instrument reservation method</strong></div>
<ol>
<li class="ed_txt">Please make an appointment <a href="https://vir.nstc.gov.tw/home/Index" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> </li>
</ol>
</div>System open level<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Opening hours">
<caption> </caption>
</table>
<strong style="background-color: var(--bs-body-bg); color: var(--bs-body-color); font-family: var(--bs-body-font-family); font-size: var(--bs-body-font-size); text-align: var(--bs-body-text-align);">System open level</strong></div>
</div>
<div class="ed_model01 clearfix">
<ul>
<li class="ed_txt">System open level: Class D</li>
</ul>
<div class="ed_txt"> Class D: The technicians of the laboratory accept entrusted services<br />
and are not open to self-operating users.</div>
</div>Open hours<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Opening timetable</strong><br />
Monday~Friday 8:00AM~12:00AM, 1:00PM~5:00PM</div>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charges(Unit: NTD)</strong></div>
<div class="ed_txt">1. National Science Association plan usage fee: $275 / hour</div>
<div class="ed_txt"> High temperature and rotator measurement: $440 / hour</div>
<div class="ed_txt">2. Non-National Science and Technology Commission planning usage fee: $1,200/hour</div>
<div class="ed_txt"> High temperature and rotator measurement: $2,300/hour<br />
******************************************************************************************************************************************************</div>
<ul style="margin-left: 40px;">
<li class="ed_txt"><strong>Billable hours: Basic hours + testing hours, in hourly units, less than 1 hour is counted as 1 hour.</strong></li>
<li class="ed_txt"><strong>Basic hour: 0.5 hour for each vacuum break.</strong></li>
<li class="ed_txt"><strong>testing hours: Starting from vacuum breakage to the end of measurement and restoration of initial state (300 K and 0 Oe steady state).</strong></li>
</ul>
<div class="ed_txt"><strong> </strong>****************************************************************************************************************************************************</div>
<ul>
<li class="ed_txt">discount:<br />
If there are academic outputs (SCI, EI, IEEE published journals) derived from SQUID experimental service, please provide the paper information (author, paper name, journal name, date, volume, page number). After confirmation, the hours will be deducted directly after the next use of the equipment. Thank you for your support.<br />
Example:<br />
The authors gratefully acknowledge the use of "Magnetic Property Measurement System(Superconducting Quantum Interference Device)" belonging to Instrumentation Resource Center of National Yang Ming Chiao Tung University.</li>
</ul>
<div class="ed_txt"> * If the paper is an instrument-assisted research output, that is not labeled as a Core Facility Service Output, 5 hours of free lab service for each paper.</div>
<div class="ed_txt"> *10 hours of free lab service per paper if the paper is provided in the Acknowledgement section, Materials and Methods, or in the Acknowledgement section of the paper <br />
(please provide the entire paper and the location of the Acknowledgement).<br />
</div>
<ul>
<li class="ed_txt">SQUID was formulated by the "Superconducting Quantum Interferometer Management Committee" convened by instrument experts. In order to provide preferential long-term use of SQUID users, those who have accumulated more than 20,000 "experimental cash" annually will enjoy a 20% discount.</li>
</ul>
</div>Contact person<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Professor Lin, Jiunn-Yuan</li>
<li class="job-title">Instrument Instructor</li>
<li class="li"><img alt="連絡電話" src="/userfiles/editor/ic_phone.svg" />03-5712121#31653</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:mailto:ago@nycu.edu.tw" title="ago@nycu.edu.tw">ago@nycu.edu.tw</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Mr. Yu Shih-Ming</li>
<li class="job-title">Instrument consultation and operation service</li>
<li class="li"><img alt="連絡電話" src="/userfiles/editor/ic_phone.svg" /> 03-5712121#56167</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:mailto:shih-ming-yu@nycu.edu.tw" title="shih-ming-yu@nycu.edu.tw">shih-ming-yu@nycu.edu.tw</a></li>
</ul>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167396188123566080&init=YHigh Precision Magnetic Measurement System (Superconducting Quantum Interferometer)https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2004Basic Service-Physics
- <![CDATA[Spherical Aberration Corrected Scanning Transmission Electron Microscope Cs-corrected STEM]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="SPHERICAL ABERRATION CORRECTED SCANNING TRANSMISSION ELECTRON MICROSCOPE" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167392946513776640&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>Spherical Aberration Corrected Scanning Transmission Electron Microscope</strong><br />
English abbreviation: Cs-corrected STEM<br />
Brand model: JEOL ARM200F</li>
<li><strong>Instrument expert: Prof. Jian, Wen-Bin</strong><br />
ext 56159</li>
<li><strong>Instrument expert: Assoc. Prof. Chen, Chih-Yen</strong><br />
ext 56118</li>
<li><strong>Consultant : Prof. Chang, Li</strong><br />
ext 31615</li>
<li><strong>Instrument consultation and operation services: Ms. Hsu, Shu-Chi</strong><br />
ext 56156<br />
Email <a href="mailto:nctu.arm200f@gmail.com" title="nctu.arm200f@gmail.com">nctu.arm200f@gmail.com</a></li>
<li><strong>Instrument location: Room SC022, B1, Science Building 3, Guanfu Campus</strong></li>
</ul>
</div>
</div>
</div>]]>PhysicsInstrumentation Resource Center 2025-10-15Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information</strong><br />
Purchase Date: December 2011<br />
Service Start Date: June 2012<br />
Funding source: National Science Association, Ministry of Education, National Yang Ming Chiao Tung University<br />
<br />
<strong>Instrument Important Specifications</strong></div>
<ol>
<li class="ed_txt">Accelerating voltage: 200 kV</li>
<li class="ed_txt">Electron Gun System: Schottky Field Emission Gun (FEG)</li>
<li class="ed_txt">Resolution (200kV):
<ul>
<li class="ed_txt">TEM Lattice resolution: 0.072 nm</li>
<li class="ed_txt">TEM Point resolution: 0.190 nm</li>
<li class="ed_txt">TEM Optical information limit: 0.107 nm</li>
<li class="ed_txt">HRTEM mode (UHR pole piece, Cs = 0.5 mm, Cc = 1.1 mm)</li>
<li class="ed_txt">STEM BF image resolution: 0.136 nm</li>
<li class="ed_txt">STEM HAADF image resolution: 0.082 nm</li>
<li class="ed_txt">STEM aberration free area angle: 36.63 mrad</li>
</ul>
</li>
<li class="ed_txt">The tilt angle of the double-inclined test piece holder: plus or minus 25 degrees.</li>
<li class="ed_txt">STEM spherical aberration corrector (Spherical aberration Corrector).</li>
<li class="ed_txt">STEM BF/HAADF detector (High Angle Annual Dark Field Detector).</li>
<li class="ed_txt">X-ray Energy Dispersion Analyzer (EDS) : Si drift detector (SDD), Energy resolution 127eV.</li>
</ol>
</div>Service items and reservation method<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong><br />
TEM bright field image (Bright Field), high resolution image (HRTEM), STEM image (ABF/HAADF); does not provide storage of direct selective area diffraction pattern (SAD), but can store the diffraction pattern converted by software processing. Nanoscale X-ray EDS Spectroscopy (B5~U92), STEM contains EDS Point ID/Line Scan/Mapping.<br />
<br />
<strong>Instrument reservation method</strong></div>
<ol>
<li class="ed_txt">Please make an appointment <a href="https://vir.nstc.gov.tw/home/Index" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> reserve</li>
<li class="ed_txt">On the 20th of each month, TEM appointments for the following month will be opened. The appointment application form will be returned within 5 days of the appointment. If the appointment application form is not returned, the appointment will be regarded as incomplete, and the unit has the right to cancel the time slot.</li>
<li class="ed_txt">If you want to cancel the appointment, please cancel online on your own five days in advance. Those who do not arrive for the experiment on the same day and do not notify by phone will be considered as a no-show, and the three-hour fee of the original appointment will still be deducted during this time period.</li>
<li class="ed_txt">If you want to cancel the appointment but it has been less than five days (excluding the day of the experiment), and you cannot cancel it yourself, please call or write to inform you first, and the one-hour basic fee will still be deducted during this period.</li>
<li class="ed_txt">Please take a photo or scan and send it to the technician's mailbox <a href="mailto:nctu.arm200f@gmail.com" title="nctu.arm200f@gmail.com">nctu.arm200f@gmail.com</a></li>
</ol>
</div>Open period and system open level<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="Opening hours">
<tbody>
</tbody>
<caption>Opening hours</caption>
<tbody>
<tr>
<th scope="col">Opening hours<br />
(Applicable from May 2017)</th>
<th scope="col">morning</th>
<th scope="col">afternoon</th>
<th scope="col">night</th>
</tr>
<tr>
<th scope="row">Monday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Delegate operation</td>
<td data-th="afternoon">13:30 – 16:30<br />
Delegate operation</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Tuesday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Delegate operation</td>
<td data-th="afternoon">13:30 – 16:30<br />
Delegate operation</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Wednesday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Delegate operation</td>
<td data-th="afternoon">13:30 – 16:30<br />
Delegate operation</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Thursday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Delegate operation</td>
<td data-th="afternoon">13:30 – 16:30<br />
Delegate operation</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Friday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Do it yourself</td>
<td data-th="afternoon">13:30 – 16:30<br />
Do it yourself</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Saturday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Do it yourself</td>
<td data-th="afternoon">13:30 – 16:30<br />
Do it yourself</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
<tr>
<th scope="row">Sunday</th>
<td data-th="morning"><br />
09:00 – 12:00<br />
Do it yourself</td>
<td data-th="afternoon">13:30 – 16:30<br />
Do it yourself</td>
<td data-th="night">18:00 – 21:00<br />
Do it yourself</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model01 clearfix">
<div class="ed_txt"><br />
<strong>System open level</strong></div>
<ul>
<li class="ed_txt">Class A. Entrusted service, operated by technicians of this laboratory.</li>
<li class="ed_txt">Grade B. The person in charge of the instrument selects a number of students recommended by the professor to receive training. They must first pass the electron microscopy course of the institute. After passing the examination, they can operate the instrument by themselves and be responsible for the entrusted service work.</li>
<li class="ed_txt">Grade C. Each professor/laboratory is limited to one student in the doctoral class below the third grade, who must first pass the electron microscopy course of the Institute, and must have the qualification to use the JEOL-2100F assessment of the Nanotechnology Center of Jiaotong University before applying undergo training. The training time is 20 periods. The passing standard of the assessment is that the resolution of STEM is 0.08nm. The training fee is charged according to the commissioned operation fee standard. Before passing the examination, it is strictly forbidden to operate by yourself, except for the assistance of technicians or teaching assistants; after passing the license examination and obtaining the C-level qualification, you can operate by yourself.</li>
</ul>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charges</strong></div>
<ul>
<li class="ed_txt">TEM/STEM/EDS (specimen mounting, vacuum extraction, electron optical calibration, file transfer are also covered in the session)</li>
<li class="ed_txt">1. Entrusted operation: NT$1,920 per time slot. Each time slot is counted as three hours. If it is less than one time period, it will be charged as one time slot. NT$640 will be charged for more than one hour. The entrusted operation of the industry unit is charged according to the above entrusted time period, NT$19,200 / time period.</li>
<li class="ed_txt">2. Self-operation: NT$750 per time slot, each time slot is counted as three hours, and those that are less than one time period are also counted as one time slot, and NT$250 will be charged for more than one hour.</li>
<li class="ed_txt">3. The processing fee for each TEM image file and EDS file is NT$15. (This instrument has no negative film access device) To avoid equipment poisoning, data transmission with flash drives is prohibited; please prepare a burnable blank CD to store data (VCD/DVD are both acceptable).</li>
</ul>
</div>Administrative Measures and Test Strip Restrictions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and test strip restrictions</strong></div>
<ol>
<li class="ed_txt">This laboratory is not a TEM test piece production unit, please prepare observable TEM test pieces for experiments.</li>
<li class="ed_txt">The sample to be tested should be a solid material and should have appropriate and sufficient mechanical strength to avoid peeling and chipping during the process of entering and exiting the electron microscope or during the inspection process, which will not be accepted.</li>
<li class="ed_txt">Materials with low melting point such as indium, tin, etc. will cause phase transition and evaporation effect, and will not be accepted.</li>
<li class="ed_txt">Samples that will decompose or release gas under electron beam irradiation and hinder the vacuum, such as organic matter, polymer, biological or ferromagnetic powder samples, etc., will not be accepted.</li>
<li class="ed_txt">Samples or materials in powder form with strong magnetism, magnetism, or easily attracted by electromagnetic lenses, such as iron, cobalt, nickel, etc., will not be accepted.</li>
<li class="ed_txt">Radioactive or toxic samples will not be accepted.</li>
<li class="ed_txt">In-situ and heated testing services will not be accepted.</li>
<li class="ed_txt">All samples dropped on the copper mesh with aqueous solution need to be fully dried to remove moisture; after the samples are sent to the laboratory, they still need to be baked again by the laboratory staff for ten minutes before they can be used on the machine. If the test piece is full of water vapor and the machine is polluted, the reservation unit needs to jointly pay for the maintenance cost of the machine.</li>
<li class="ed_txt">If the sample to be tested cannot obtain the specified resolution due to cleanliness or other non-microscopic factors, the above-mentioned charging standard will still be charged. [STEM < 0.1 nm resolution requires longer set-up time, and the sample needs to have an appropriate area and be beam showering]</li>
<li class="ed_txt">Before entrusting the operator to get on the machine, the unit will ask again to confirm the type of samples sent for testing, and the entrusting party should declare honestly. If the declaration is found to be false, the unit will cancel the appointment qualifications of all the laboratories it belongs to for six months. If the instrument is polluted or damaged due to violation of the above regulations, the affiliated unit and its instructor shall be responsible for compensation. The compensation fee will be assessed by the original factory, and then implemented by the management committee and suspended the right to use the instrument.</li>
<li class="ed_txt">Persons with self-operating qualifications who use the CCD to directly shoot diffraction patterns or put the above-mentioned harmful samples into the instrument without authorization will be subject to aggravated punishment and their operating qualifications will be revoked for one year. If the instrument is polluted or damaged due to violation of the above regulations, the affiliated unit and its instructor shall be responsible for compensation. The compensation fee will be assessed by the original factory, and then implemented by the management committee and suspended the right to use the instrument.</li>
</ol>
</div>Contact person<h3 class="professor-name"> </h3>
<div class="ed_model21 clearfix">
<div class="row w-100 m-0 align-content-stretch">
<div class="col-12 col-md-6">
<div class="ed-model21-card">
<h3 class="professor-name">Prof. Jian, Wen-Bin</h3>
<div class="attribute d-flex">
<div class="key">Instrument expert<br />
Ext 56159</div>
</div>
</div>
</div>
<div class="col-12 col-md-6">
<div class="ed-model21-card">
<h3 class="professor-name">Assoc. Prof. Chen, Chih-Yen</h3>
<div>Instrument expert</div>
<div class="attribute d-flex">
<div class="key">Ext 56118</div>
</div>
</div>
</div>
<div class="col-12 col-md-6">
<div class="ed-model21-card">
<h3 class="professor-name">Prof. Chang, Li</h3>
<div>consultant</div>
<div class="attribute d-flex">
<div class="key">Ext 31615</div>
</div>
</div>
</div>
<div class="col-12 col-md-6">
<div class="ed-model21-card">
<h3 class="professor-name">Ms. Hsu, Shu-Chi</h3>
<div>Instrument consultation and operation services</div>
<div class="attribute d-flex">
<div class="key">Ext 56156</div>
</div>
<div class="attribute d-flex">
<div class="key"><a href="mailto:mailto:nctu.arm200f@gmail.com" title="nctu.arm200f@gmail.com">nctu.arm200f@gmail.com</a></div>
</div>
</div>
</div>
</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167392946513776640&init=YSPHERICAL ABERRATION CORRECTED SCANNING TRANSMISSION ELECTRON MICROSCOPEhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2004Basic Service-Physics
- <![CDATA[High performance low temperature and multi-function X-ray diffractometer]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="HIGH PERFORMANCE LOW TEMPERATURE AND MULTI-FUNCTION X-RAY DIFFRACTOMETER" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167392403737284608&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>High performance low temperature and multi-function X-ray diffractometer</strong><br />
English abbreviation: Low Temperature XRD<br />
Brand Model: Bruker, D8 Discover X-ray Diffraction System</li>
<li><strong>Instrument Expert: Assoc. Prof. Kuo, Chang-Yang</strong><br />
ext 56179</li>
<li><strong>Instrument consultation and operation service</strong><strong>: Ms. Yang, Hsiao-Ying </strong><br />
ext 56144<br />
Email <a href="mailto:kay@nycu.edu.tw" title="kay@nycu.edu.tw">kay@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room SC026, Science Building 3, Guanfu Campus</strong></li>
<li>Welcome to direct private message <a href="https://www.facebook.com/nctuepd8" rel="noreferrer noopener" target="_blank" title="FB fan club(Open New Windows)">FB fan club</a> Ask business or data questions</li>
</ul>
</div>
</div>
</div>]]>PhysicsInstrumentation Resource Center 2025-09-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, purchase period</strong></div>
<ul>
<li class="ed_txt">Brand: Bruker</li>
<li class="ed_txt">Model: D8 Discover X-ray Diffraction System</li>
<li class="ed_txt">Purchase period: July 2013</li>
</ul>
<div class="ed_txt"><strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt">Switchable light source (Bragg Brentano/ Parallel Beam)</li>
<li class="ed_txt">Switchable detector (LYNXEYE XE-T 0D/1D)</li>
<li class="ed_txt">Ultra-low temperature sample measurement system (12 K – 300 K)</li>
<li class="ed_txt">Five-axis variable sample stage (X, Y, Z, Chi, Phi)</li>
<li class="ed_txt">Monochromator (Monochromator: 2-bounce Ge(004), 2-bounce Ge(022))</li>
<li class="ed_txt">Measurement application: Specular X-ray reflectivity measurement (X-ray reflectivity, XRR), Reciprocal Space Map measurement (Reciprocal Space Map, RSM), Residual stress measurement (Residual Stress)</li>
</ol>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong></div>
<ul>
<li class="ed_txt">Powder Sample: Wide Angle Diffraction (WAG)</li>
<li class="ed_txt">Single crystal samples: Wide Angle Diffraction (WAG), Rocking Curve</li>
<li class="ed_txt">Thin film samples: Wide Angle Diffraction (WAG), Low Grazing Angle Thin Film Diffraction (GIXRD), Rocking Curve</li>
<li class="ed_txt">Epitaxy samples: Rocking Curve, RSM, XRR</li>
<li class="ed_txt">Block, film samples: Residual Stress</li>
</ul>
</div>System open level<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>System open level</strong></div>
<ul>
<li class="ed_txt">Priority period for entrusted operations: Monday to Friday 0800-1200, 1300-1700</li>
<li class="ed_txt">Operating hours: Monday to Friday 1800-2400, Saturday to Sunday 0800-2400</li>
<li class="ed_txt">Note: A small amount of samples is recommended to be commissioned. It is recommended to study the relevant literature information before submitting the commissioned operation. It is also possible to directly send the sample and discuss it with the operator. A large number of samples can be commissioned or discussed with the instrument operator to arrange self-operation training.</li>
</ul>
</div>Management and usage<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management method and use method</strong></div>
<ol>
<li class="ed_txt">This service adopts time-scheduled appointments. Please confirm the experimental conditions, time and sample restrictions with the instrument operator before the experiment.</li>
<li class="ed_txt">This service also includes urgent sample application. If you need it, please contact the technician after making an appointment and explain.</li>
<li class="ed_txt">The system is open for service five days a week, from 8:00 am to 12:00 am and 1:00 pm to 5:00 pm every day.</li>
<li class="ed_txt">The service of this system takes one hour as a unit, and a total of 40 units of service are open every week.</li>
<li class="ed_txt">Every week, 28 units are reserved for use by off-campus programs, and 12 units are reserved for use by on-campus programs.</li>
<li class="ed_txt">Accumulated no-shows three times in one year, and stop the appointment qualification for six months.</li>
<li class="ed_txt">If the equipment is damaged due to improper use, the user will stop using it, except that the instructor is responsible for compensation.</li>
<li class="ed_txt">If the appointment period is in conflict with the manufacturer's instrument maintenance period, the instrument maintenance will take precedence.</li>
<li class="ed_txt">Please work together to maintain the cleanliness of the room, do not bring food into the laboratory, and arrange the chairs neatly when you leave.</li>
<li class="ed_txt">Do not shut down the access control computer arbitrarily, and it is strictly forbidden to install any games and illegal software, and do not change the system settings and access the Internet.</li>
<li class="ed_txt">All equipment and software in the laboratory belong to the property of the system and cannot be stolen or destroyed, otherwise relevant responsibilities will be pursued.</li>
<li class="ed_txt">For the sake of everyone and the condition of the instrument, please do not affect your right to use for your personal selfishness, so please abide by the above rules.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charges</strong><br />
For details, please refer to Annex 1</div>
</div>Instrument reservation and experimental process<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instructions for Application for Instrument Training Operation</strong><br />
The instrument will offer on-campus operation training courses of Yangming Jiaotong University from time to time. Please pass the 3-hour radiation safety course of Yangming Jiaotong University Environmental Safety System first, and then you can register for the XRD training course after obtaining the certificate. Please pay close attention to the announcement of the FB fan group, or contact Ms. Yang at the school extension 56144 to inquire about the start date of the class.<br />
<br />
<strong>Instrument reservation and experimental process</strong></div>
<ol>
<li class="ed_txt">please use <strong><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="Chrome browsertoNational Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">Chrome browsertoNational Science Council Basic Research Core Facility Reservation Service Management System</a> reservation number</strong> (If you do not know the reservation process, please refer to Annex 2). After the reservation is completed, please fill in the reservation form. If you do not know how to fill in the parameters, please fill in "Assist in Determining Parameters".</li>
<li class="ed_txt"><strong>General samples (need to accompany the measurement or send in person)</strong>: Confirm the experimental time with the technician, and then send the sample and the reservation form to Room SC026, Science Building 3, Guanfu Campus.</li>
<li class="ed_txt"><strong>General samples (direct mail): </strong>Send the sample and reservation form to<strong>"Ms. Yang Hsiaoying, Room SC026, Science Building 3, No. 1001 Daxue Road, Hsinchu City (Department of Electronic Physics, National Yangming Chaiotung University)"</strong>, the reservation person and the instructor need to sign or seal the reservation form, and the measurement will be arranged according to the order of the user's reservation and the arrival time of the sample.</li>
<li class="ed_txt"><strong>Urgent samples</strong>: Please contact Ms. Yang directly at extension 56144 to confirm. If the user or laboratory has listed the instrument in the Zhixie column before, he can arrange urgent measurement for the user, and the measurement fee will also be discounted.<br />
<a href="https://www.facebook.com/nctuepd8" rel="noreferrer noopener" target="_blank" title="FB fan group(Open New Windows)">FB fan group</a></li>
<li class="ed_txt">If the reservation cannot be made normally due to system problems, or if the reservation is full, please contact the technician directly.</li>
</ol>
</div>Contact person<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name">Associate Professor Guo Changyang</li>
<li class="job-title">Instrument experts</li>
<li class="li"><img alt="連絡電話" src="/userfiles/editor/ic_phone.svg" /> 03-5712121 ext. 56179</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:changyangkuo@nctu.edu.tw?subject=undefined&body=undefined" id="1-2" title="changyangkuo@nctu.edu.tw">changyangkuo@nctu.edu.tw</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name"> </li>
<li class="full-name">Dr. Zeng Ruoqi, an expert in powder diffraction</li>
<li class="job-title">Instrument consultant</li>
<li class="li"><img alt="mail" src="/userfiles/editor/ic_mail.svg" /> <a href="mailto:jochi.tseng@desy.de?subject=undefined&body=undefined" id="1-2" title="jochi.tseng@desy.de">jochi.tseng@desy.de</a></li>
</ul>
</div>
</div>
<hr class="ed_border01" />
<div class="ed_model22 clearfix">
<div class="row w-100 mx-0">
<ul class="col-12 col-md-12">
<li class="full-name"> </li>
<li class="full-name">Yang Hsiao-Ying Research Assistant </li>
<li class="job-title">Instrument Operating Technician</li>
<li class="li"><img alt="連絡電話" src="/userfiles/editor/ic_phone.svg" /> 03-5712121 ext. 56144</li>
</ul>
</div>
</div>
<hr class="ed_border01" /><a href="https://www.facebook.com/nctuepd8" rel="noreferrer noopener" target="_blank" title="FB fan group(Open New Windows)">FB fan group</a> Welcome to direct private message for business or data questions.https://www.nycu.edu.tw/ord/en/app/machine/doc?module=corefacilities&detailNo=1195253718837104640&type=sAttachment 1_Charge Standard 20231229-XRDhttps://www.nycu.edu.tw/ord/en/app/machine/doc?module=corefacilities&detailNo=1169111171735752704&type=sAttachment 2 - Reservation Procedure for the Valuable Instrument Information System of the Ministry of Science and Technology - 20211027-2https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167392403737284608&init=YHIGH PERFORMANCE LOW TEMPERATURE AND MULTI-FUNCTION X-RAY DIFFRACTOMETERhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2004Basic Service-Physics
- <![CDATA[Cryogenic Cathodoluminescence System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_left"> </div>
<div class="ed_pic_right"><img alt="低溫陰極螢光分析系統" src="/userfiles/orden/images/20250317112608767.jpg" /></div>
<div class="ed_title01"> </div>
<div class="ed_txt"><strong>Cryogenic Cathodoluminescence System</strong></div>
<ul>
<li class="ed_txt">English abbreviation: CL</li>
<li class="ed_txt">Brand Model: Attolight Allalin TRCL</li>
</ul>
<div class="ed_txt"><strong>Instrument expert: Prof. Chou, Wu-Ching</strong></div>
<ul>
<li class="ed_txt">ext 56129</li>
<li class="ed_txt">Email <a href="mailto:mailto:wcchou957@nycu.edu.tw" title="wcchou957@nycu.edu.tw">wcchou957@nycu.edu.tw</a> </li>
</ul>
<div class="ed_txt"><strong>Instrument consultation and operation service: Dr. Diep, Nhu Quynh</strong></div>
<ul>
<li class="ed_txt">ext 56109</li>
<li class="ed_txt">Email <a href="mailto:mailto:hoangnhi83@nycu.edu.tw" title="hoangnhi83@nycu.edu.tw">hoangnhi83@nycu.edu.tw</a> or <a href="mailto:mailto:diepnhuquynh83@gmail.com" title="diepnhuquynh83@gmail.com">diepnhuquynh83@gmail.com</a></li>
</ul>
<div class="ed_txt"><strong>Instrument location：Room SC023, Science Building 3 , Guanfu Campus</strong></div>
</div>]]>PhysicsInstrumentation Resource Center 2025-03-17Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information:</strong></div>
<ul>
<li class="ed_txt">Brand: Attolight</li>
<li class="ed_txt">Model: Allalin TRCL</li>
<li class="ed_txt">Year of purchase: 2025</li>
</ul>
<div class="ed_txt"><strong>Function:</strong><br />
In addition to low-temperature cathode fluorescence analysis, it also has time-resolution capabilities, which can obtain dynamic spectral information with nanometer/picosecond spatial/time resolutions to enable the study of carrier dynamics and lifetime.<br />
<br />
<strong>Important Specifications:</strong></div>
<ul>
<li class="ed_txt">Acceleration voltage: 2 - 10 kV</li>
<li class="ed_txt">Large FoV: 300 µm-diameter</li>
<li class="ed_txt">Detection range: 200 - 1060 nm (CCD); 200-650 nm (PMT)</li>
<li class="ed_txt">Spatial resolution:
<ul>
<li class="ed_txt">CW e-beam: < 10 nm (3-10keV)</li>
<li class="ed_txt">Pulsed e-beam: ~50 nm on average</li>
</ul>
</li>
</ul>
</div>Service items<div class="ed_model01 clearfix">
<div class="ed_txt"> <strong>Service items</strong></div>
<ul>
<li class="ed_txt">Room temp. cathodoluminescence</li>
<li class="ed_txt">Low temp./temp. dependence cathodoluminescence</li>
<li class="ed_txt">Time-resolved Cathodoluminescence</li>
</ul>
</div>System opening level<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>System opening level</strong></div>
<ul>
<li class="ed_txt">Working hours：Level D</li>
<li class="ed_txt">Nights and holidays：No service</li>
</ul>
<div class="ed_txt"><u><strong>System open level description</strong></u></div>
<ul>
<li class="ed_txt">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>
<li class="ed_txt">Level B: Each professor assigns one student to apply for training. The other students of the professor must be operated by the trained students. If a professor has too many students using the instrument, he or she may apply to the person in charge of the instrument to increase the number of students receiving training. .</li>
<li class="ed_txt">Level C: The person in charge of the instrument selects a number of students recommended by the professor to receive training. After passing the assessment, they can operate the instrument themselves and be responsible for entrusted service work.</li>
<li class="ed_txt">Level D: The technical staff of this laboratory accept entrusted services and are not open for use.</li>
</ul>
</div>Charges<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Charges (NTD)</caption>
<tbody>
<tr>
<th colspan="1" rowspan="2">Billing items</th>
<th colspan="2" rowspan="1" scope="col">Reservation with NSTC project</th>
<th colspan="2" rowspan="1" scope="col">Reservation without NSTC project</th>
</tr>
<tr>
<td data-th="標題A">Entrusted Service</td>
<td data-th="標題B">Self-operation</td>
<td data-th="標題C">Entrusted Service</td>
<td data-th="標題C">Self-operation</td>
</tr>
<tr>
<th scope="row">Room temp. cathodoluminescence</th>
<td data-th="標題A">300/hr</td>
<td data-th="標題B">-</td>
<td data-th="標題C">3000/hr</td>
<td data-th="標題C">-</td>
</tr>
<tr>
<th scope="row">Low temp./temp. dependence cathodoluminescence</th>
<td data-th="標題A">800/hr</td>
<td data-th="標題B">-</td>
<td data-th="標題C">8000/hr</td>
<td data-th="標題C">-</td>
</tr>
</tbody>
</table>
</div>
</div>Opening hours<div class="ed_model19 clearfix">
<div class="table03">
<table class="ed_table caption-top" summary="預設的表格形式">
<caption>Opening hours</caption>
<tbody>
<tr>
<th> </th>
<th scope="col">Morning</th>
<th scope="col">Afternoon</th>
</tr>
<tr>
<th scope="row">Monday to Friday</th>
<td data-th="標題A">08: 30 -12: 30</td>
<td data-th="標題B">13 : 30 - 17:30</td>
</tr>
<tr>
<th scope="row">Weekend</th>
<td data-th="標題A">No service</td>
<td data-th="標題B">No service</td>
</tr>
</tbody>
</table>
</div>
</div>Contact information<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument expert：Prof. Chou, Wu-Ching</strong></div>
<ul>
<li class="ed_txt">Phone: (03)5712121#56129</li>
<li class="ed_txt">Email: <a href="mailto:mailto:wcchou957@nycu.edu.tw" title="wcchou957@nycu.edu.tw">wcchou957@nycu.edu.tw</a></li>
</ul>
<div class="ed_txt"><strong>Operation technician：Dr. Diep, Nhu Quynh</strong></div>
<ul>
<li class="ed_txt">Phone: (03)5712121# 56109</li>
<li class="ed_txt">Email: <a href="mailto:mailto:hoangnhi83@nycu.edu.tw" title="hoangnhi83@nycu.edu.tw">hoangnhi83@nycu.edu.tw</a></li>
</ul>
</div>Management and reservation<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Reservation instructions:</strong></div>
<ul>
<li class="ed_txt">Link for reservation: https://vir.nstc.gov.tw/</li>
<li class="ed_txt">Pre-experiment consulting line:
<ul>
<li class="ed_txt">Phone: (03)5712121# 56109</li>
<li class="ed_txt">Email: hoangnhi83@nycu.edu.tw or diepnhuquynh83@gmail.com</li>
</ul>
</li>
<li class="ed_txt">Open for reservations:<strong> </strong>10:00 AM on the 25th of each month / Available reservations period: 1 month / Reservation should be executed at least 3 days in advance (except weekends and holidays).</li>
</ul>
<div class="ed_txt"><strong>Service schedule: 8 hours/day, 5 days/week</strong></div>
<ul>
<li class="ed_txt"> Note: Everyday 8:30-9:00 and 17:00-17:30 are dedicated for system maintenance.</li>
</ul>
<div class="ed_txt"><strong>Reservation cancellations:</strong></div>
<ul>
<li class="ed_txt">Cancellations are only available by informing the technician at least 24 hours before the experiment schedule.</li>
<li class="ed_txt">Please also mention the reasons of cancellation in the email.</li>
<li class="ed_txt">If the users cancel their reservations late, their reservation license will be suspended for one month from the day of cancellation.</li>
<li class="ed_txt">Accumulating 3 times of late cancellation per year, the reservation license will be suspended for six months from the day of the last cancellation.</li>
</ul>
<div class="ed_txt"><strong>Others:</strong></div>
<ul>
<li class="ed_txt">If the reservation schedule conflicts with the training schedule, the training schedule will take priority.</li>
<li class="ed_txt">If the reservation schedule conflicts with the manufacturer's maintenance schedule, the manufacturer's maintenance schedule will take priority.</li>
<li class="ed_txt">To maintain the cleanliness of the experiment condition, no foods or drinks are allowed in the laboratory.</li>
</ul>
</div>Operational training application<div class="ed_model01 clearfix">
<div class="ed_txt">Currently, the CL system does not open for user training.</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1351040486588026880&init=YCryogenic Cathodoluminescence Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2004Basic Service-Physics
- <![CDATA[Fourier Transform Electric Field Orbitrap and Linear Ion Trap Hybrid Mass Spectrometer (LUMOS)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Fourier Transform Electric Field Orbitrap and Linear Ion Trap Hybrid Mass Spectrometer" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167387467540598784&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul style="list-style-type: circle;">
<li><strong>Orbitrap Fusion Lumos Tribrid Mass Spectrometer</strong><br />
English abbreviation: Orbitrap Fusion Lumos<br />
Brand: ThermoFisher</li>
<li><strong>Instrument expert: Prof. Tsay,</strong> <strong>Yeou-Guang</strong>
<ul>
<li>Ext. 67119</li>
</ul>
</li>
<li><strong>Instrument expert: Dr. Liao, Chen-Chung </strong>
<ul>
<li>Ext. 67382</li>
</ul>
</li>
<li><strong>Instrument consultation and operation service: Ms. Huang, Pei-Hsuan & Ms. Li, Jie-Ling</strong>
<ul>
<li>Ext. 67382</li>
<li>Direct call 02-28267382</li>
<li>Email <a href="mailto:phhuang@nycu.edu.tw" title="phhuang@nycu.edu.tw">phhuang@nycu.edu.tw</a></li>
</ul>
</li>
<li><strong>Instrument location: Room 647, Library, Information & Research Building, Yangming Campus</strong></li>
</ul>
</div>
</div>
</div>]]>BiologyInstrumentation Resource Center 2026-01-16Instrument Introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument brand, model, purchase period</strong></div>
<ul>
<li class="ed_txt">Brand: ThermoFisher</li>
<li class="ed_txt">Model: Orbitrap Fusion™ Lumos™ Tribrid™ Mass Spectrometer</li>
<li class="ed_txt">Purchase period: 2022</li>
</ul>
<div class="ed_txt"><br />
<strong>Important Specifications</strong><br />
Orbitrap Fusion Lumos also includes a quadrupole mass selector, a two-stage linear ion trap mass analyzer and a Fourier transform electric field orbitrap mass analyzer, equipped with a nano-microflow liquid chromatography system (Vanquish Neo UHPLC), with collision-induced dissociation technology (CID) and high-energy collision-induced dissociation (HCD).</div>
</div>Opening hours<div class="ed_model01 clearfix">
<ol>
<li class="ed_txt"><strong>Reservation is required for instrument use: please consult with the administrator to confirm the analysis mode and make a reservation at the <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Information System(Open New Windows)">NSTC Basic Research Core Facility Reservation Information Management System</a>.</strong></li>
<li class="ed_txt">Samples to be tested can be delivered in person or by package delivery to the office.
<ul>
<li class="ed_txt">Receiving time: Monday to Friday 9:00~17:00</li>
<li class="ed_txt">Receiving Address: R648, Library, Information & Research Building, No. 155, Section 2, Linong Street, Beitou District, Taipei City 11221</li>
<li class="ed_txt">Receiving Unit: Mass Spectrometer Facility of Instrumentation Resource Center, National Yang Ming Chiao Tung University</li>
</ul>
</li>
</ol>
<div class="ed_txt">Contact Person: Ms. Huang, Pei-Hsuan</div>
<ul>
<li class="ed_txt">Tel: 02-28267382</li>
<li class="ed_txt">Fax: 02-28212863</li>
<li class="ed_txt">Mail: <a href="mailto:phhuang@nycu.edu.tw" title="phhuang@nycu.edu.tw">phhuang@nycu.edu.tw</a></li>
</ul>
</div>Service Items and Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Service items and charging standards:</strong></div>
<ul>
<li class="ed_txt">This mass spectrometer only accepts entrusted services, which are all operated by management personnel, and the instrument is not open for personal operation</li>
<li class="ed_txt">Confirm the analysis mode with management before sending samples.</li>
<li class="ed_txt">The sample to be tested must not contain salts and surfactants.</li>
<li class="ed_txt">The charge for this mass spectrometer is accumulatively billed according to the number of scheduled hours, and it needs to be calculated and registered together with the system cleaning and equilibration time when the instrument is running.</li>
</ul>
</div>
<div class="ed_model06 clearfix">
<div class="table01">
<table class="ed_table caption-top" summary="Service items and charging standards">
<caption>Service items and charging standards</caption>
<tbody>
<tr>
<th>Service items</th>
<th>Note</th>
<th>Academic unit<br />
(reservations with NSTC<br />
projects)</th>
<th>Academic unit<br />
(reservations <em>without</em> NSTC<br />
projects)</th>
<th>industry unit</th>
</tr>
<tr>
<td class="ed_pc_center" data-th="service items">Mass spectrometer Usage Fee<br />
(Unit: NTD)</td>
<td data-th="Note">Cumulative charge based on the actual analysis time of the samples (together with the calculation of the system cleaning and equilibrating time).</td>
<td data-th="academic unit National Science and Technology Association planning appointment fee">$1,200 /hr</td>
<td data-th="academic unit Non-National Academy of Sciences Plan Appointment Charges">$1,800/hr</td>
<td data-th="industry unit charges">$3,600 /hr</td>
</tr>
</tbody>
</table>
</div>
</div>Management and Usage<div class="ed_model01 clearfix">
<ol>
<li class="ed_txt">Consult management staff to confirm sample delivery details</li>
<li class="ed_txt"><strong>to <a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Information System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Information System</a> Make an appointment for the boarding slot and fill in the relevant documents.</strong></li>
<li class="ed_txt">Send the samples to be tested according to the agreed time period.</li>
<li class="ed_txt">After receiving the samples, the manager will arrange to board the machine according to the condition of the instrument.</li>
<li class="ed_txt">Once the analysis is complete, the data can be retrieved.</li>
</ol>
</div>Related Links<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://www.thermofisher.com/tw/zt/home/industrial/mass-spectrometry/liquid-chromatography-mass-spectrometry-lc-ms/lc-ms-systems/orbitrap-lc-ms/orbitrap-tribrid-mass-spectrometers/orbitrap-fusion-lumos-mass-spectrometer.html" rel="noreferrer noopener" target="_blank" title="ThermoFisher(Open New Windows)"><img alt="ThermoFisher" src="/userfiles/orden/images/thermo.png" /></a><br />
Official website introduction</div>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167387467540598784&init=YFourier Transform Electric Field Orbitrap and Linear Ion Trap Hybrid Mass Spectrometerhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2008Basic Service-Biologyhttps://ord.edu.tw/ord/en/app/artwebsite/view?module=artwebsite&id=2027&serno=2e6eb727-14c5-46fd-a3bf-680207ed052cMass Spectrometry Facility of YM Campus
- <![CDATA[Small Animal Computed Tomography]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Small animal computed tomography" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1167384550016290816&init=N" /></div>
<div class="ed_txt">
<div class="ed_list">
<ul>
<li><strong>Milabs U-CT<sup>HR</sup></strong></li>
<li><strong>Instrument expert: Prof. Lin, Ching-Po</strong><br />
On-campus extension 67338</li>
<li><strong>Management unit: Yangming Campus</strong> <a href="https://saic.brc.nycu.edu.tw/uct/" rel="noreferrer noopener" target="_blank" title="Small Animal Imaging Core of Brain Research Center(Open New Windows)">Small Animal Imaging Core of Brain Research Center</a></li>
<li><strong>Instrument consultation and operation service: Mr. You, Chung-Hsun</strong><br />
Direct call: (02) 2821-3571<br />
Email: <a href="mailto:mailto:nycu.saic@gmail.com?subject=undefined&body=undefined" title="nycu.saic@gmail.com">nycu.saic@gmail.com</a></li>
<li><strong>Instrument location: East side of Experimental Animal Center on Yangming Campus</strong></li>
</ul>
</div>
</div>
</div>]]>BiologyInstrumentation Resource Center 2025-04-16Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt">Milabs CT is capable of fast scanning and ultra-high-resolution scanning under low-dose X-rays, and the highest resolution can reach 10um.</div>
</div>Experimental application<div class="ed_model01 clearfix">
<div class="ed_txt">
<ul>
<li>bone image<br />
<img alt="bone image" src="/userfiles/orden/images/20231020163250985.png" /></li>
<li>lung imaging<br />
<img alt="lung imaging" src="/userfiles/orden/images/20231020163403299.png" /></li>
<li>3D surface image simulation of teeth<br />
<img alt="3D surface image simulation of teeth" src="/userfiles/orden/images/20231020163509502.png" /></li>
<li>Contrast vascular imaging 3D simulation<br />
<img alt="Contrast vascular imaging 3D simulation" src="/userfiles/orden/images/20231020163606482.jpg" /></li>
</ul>
</div>
</div>Opening hours<div class="ed_model01 clearfix">
<ol>
<li class="ed_txt">It is currently open Monday to Friday from 9:00 am to 5:00 pm (closed on holidays).</li>
<li class="ed_txt">The rest of the period will be open after further announcement depending on the use of the equipment and the status of the technicians.<br />
</li>
</ol>
</div>Reservation and usage rules<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Make an appointment</strong></div>
<ol>
<li class="ed_txt">Please email(<a href="mailto:nycu.saic@gmail.com" title="nycu.saic@gmail.com">nycu.saic@gmail.com</a>), confirm the experimental content and related parameter settings with the operator, after confirmation, you must pass【<a href="https://vir.nstc.gov.tw/home/Index" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">NSTC Basic Research Core Facility Reservation Service Management System</a>】Log in to make an appointment and obtain the electronic appointment serial number before accepting the appointment.</li>
<li class="ed_txt">Because the operation of the instrument requires personnel with a license to operate the equipment that can generate ionizing radiation, it is currently operated by the management personnel on its behalf, and it is not open for personal operation for the time being.</li>
<li class="ed_txt">Services are billed in units of one hour.</li>
<li class="ed_txt">When the experiment exceeds the appointment time, if there are other units making an appointment later, the use can be extended for up to ten minutes with the consent of the unit; if there is no subsequent appointment by other units, the user can extend the use time. If the extension exceeds twenty minutes, the time will be charged , less than one hour is counted as one hour.</li>
<li class="ed_txt">Please arrive on time according to the reserved time slot. Latecomers are not allowed to delay the boarding. If you arrive 30 minutes late, you will be considered as a no-show and will cancel the time slot without refund. If you are late or do not show up many times, the facility will The user will be suspended.</li>
</ol>
<div class="ed_txt"><br />
<strong>Specifications for the use of the instrument</strong></div>
<ol>
<li class="ed_txt">Due to the limited storage space of the computer, the image files can be kept for a maximum of 30 days. If the machine is damaged, the files are not responsible for damage.</li>
<li class="ed_txt">Currently, general animals (bred on behalf of animal centers or in a temporary room approved by animal centers), tissue and cell samples are mainly used. Infectious animals and samples are temporarily closed.</li>
<li class="ed_txt">At present, only machine imaging services are provided, and analysis services, contrast agents (CT contrast agent, luminescence, etc....), anesthetics (isoflurane only provides gas anesthesia machines) and consumables (needles, black cardboard, etc....) are not provided.</li>
<li class="ed_txt">Gas anesthesia devices prohibit the use of gas anesthetics other than Isoflurane.</li>
<li class="ed_txt">Applying for angiography means agreeing to undertake the use of Isoflurane anesthesia or the administration of contrast agent during the angiography process. The animal may die during the experiment due to physical weakness or other irresistible factors, resulting in abnormal conditions such as hypothermia and respiratory distress.</li>
<li class="ed_txt">This core facility is not responsible for keeping items deposited by users.</li>
</ol>
</div>Reward usage rules<div class="ed_model01 clearfix">
<ul>
<li class="ed_txt">Each full-time staff of Yangming Chiaotung University has two hours of free operation hours to facilitate the acquisition of preliminary research materials (including the teacher himself can only use the free operation quota of three teachers at most).</li>
<li class="ed_txt">Article published in the name of Yangming Chaiotung University, and thanks to the small animal imaging core facility of Yangming Jiaotong University Brain Science Research Center in the acknowledgment section. Each article will be deducted the usage fee of the article equivalent to impact factor x hours (in rounds, less than one point is calculated by one point). Only one application can be made per article.</li>
<li class="ed_txt">thank you<br />
We thank the Molecular Imaging Facility Small Animal Instrument Name and Brain Research Center at National Yang Ming Chiao Tung University for the technical support.</li>
</ul>
</div>Fees and Application Process<div class="ed_model06 clearfix">
<div class="table01">
<table class="ed_table caption-top" summary="Charges">
<caption>Charges</caption>
<tbody>
<tr>
<th style="text-align: left;">unit of use</th>
<th style="text-align: left;">National Academy of Sciences</th>
<th style="text-align: left;">Non-Science Accounting</th>
</tr>
<tr>
<td class="ed_pc_center" data-th="unit of use" style="text-align: left;">academic unit</td>
<td data-th="National Academy of Sciences">NT$2,000/hour</td>
<td data-th="Non-Science Accounting">NT$3,000/hour</td>
</tr>
<tr>
<td class="ed_pc_center" data-th="unit of use" style="text-align: left;">Industrial unit</td>
<td data-th="National Academy of Sciences">-</td>
<td data-th="Non-Science Accounting">NT$4,000/hour</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model01 clearfix">
<div class="ed_txt">
<ul>
<li>The equipment usage fee does not include the cost of luminescence, contrast agent, gas anesthesia agent and positron contrast agent.</li>
<li>Consumables such as luminescent element, contrast agent and isoflurane must be provided by the user, which is not provided by this small animal imaging core facility.</li>
</ul>
</div>
</div>
<div class="content"><strong>application process</strong><br />
Please email(<a href="mailto:mailto:nycu.saic@gmail.com?subject=undefined&body=undefined" title="nycu.saic@gmail.com">nycu.saic@gmail.com</a>), confirm the experimental content and related parameter settings with the operator, after confirmation, you must pass【<a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a>】Log in to make an appointment and obtain the electronic appointment serial number before accepting the appointment.</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1167384550016290816&init=YSmall animal computed tomographyhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=2008Basic Service-Biology