<![CDATA[Cold Field Emission Scanning Electron Microscope & Energy Dispersive]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Cold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrument" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168742033137864704&init=N" /></div>
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<ul>
<li><strong><a href="https://nanofc.web.nycu.edu.tw/%e5%86%b7%e5%a0%b4%e7%99%bc%e5%b0%84%e6%8e%83%e6%8f%8f%e5%bc%8f%e9%9b%bb%e5%ad%90%e9%a1%af%e5%be%ae%e9%8f%a1%e6%9a%a8%e8%83%bd%e9%87%8f%e6%95%a3%e4%bd%88%e5%88%86%e6%9e%90%e5%84%80%e5%99%a8-sem-su-80/" rel="noreferrer noopener" target="_blank" title="SEM SU-8010(Open New Windows)">SEM SU-8010</a></strong><br />
Brand Model: Hitachi SU-8010</li>
<li><strong>Instrument expert: Prof. Tan, Chih-Shan</strong><br />
03-5712121 ext 54146</li>
<li><strong>Instrument consulting and operation services: Ms. Fan, Hsiu-Lan</strong><br />
03-5712121 ext. 55337, 55672<br />
Email <a href="mailto:shiulan@nycu.edu.tw" title="shiulan@nycu.edu.tw">shiulan@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus</strong></li>
</ul>
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</div>]]>NanofabricationInstrumentation Resource Center 2026-05-21Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/cold-field-emission-scanning-electron-microscope-hitachi-su8010-energy-dispersive-spectrometer-sem-su-8010/" title="Link to Nano Center Introduction Page">Nano Fazility Center</a><br />
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Instrument Information</strong></div>
<ol>
<li>Brand Model: Hitachi SU-8010</li>
<li>Purchase period: October 2013</li>
<li>Place of placement: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus (TEL: 55337) </li>
<li>Function:
<ul>
<li>Electron Microscope Observation (SEM): High-magnification magnification to observe the microstructure or cross-sectional structure of components, films, etc.</li>
<li>Surface energy level analysis (EDS): electron energy level spectrum analysis of surface material composition at a specific location to determine the composition of surface material or pollution</li>
<li>Pre-treatment of test piece: newly purchased ion mill, with section grinding & surface grinding function, to help make the surface of the test piece smoother and facilitate SEM observation</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>Electron source: cold cathode electron gun</li>
<li>Operating voltage: 0.1kV~30kV</li>
<li>Specimen size: 50mm diameter x 50mm diameter</li>
<li>Resolution: 10A° (at 15kV) or 13A° (at 1kV)</li>
<li>The magnification is 20 times to 800,000 times (depending on the test piece itself)</li>
<li>Secondary electron resolution 1.0nm (under 15kV)</li>
<li>EDS can provide full spectrum qualitative analysis (Be<sup>4</sup>~U<sup>92</sup>), semi-quantitative analysis and element distribution map</li>
<li>Gas used in the ion mill: Argon (Ar)</li>
<li>Profile grinding range X: ≥ 7mm Y: ≥ 3mm</li>
<li>Surface grinding speed: 0°: ≥2μm/hr 60°: ≥20μm/hr</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612093820796.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Materials restricted by SEM</strong></div>
<ol>
<li class="ed_txt">Magnetic materials (including iron, cobalt, nickel components)</li>
<li class="ed_txt">Organics, polymers, powders and other materials</li>
<li class="ed_txt">All materials that decompose or release highly volatile substances or gases upon exposure to electron beams</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix"><strong>self-operated instrument</strong>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>SEM8010 instrument <a href="/userfiles/orden/files/20240612093846711.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612093901475.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people(Open New Windows)">Instrument opening level and number of people</a>3. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>NSTC Basic Research Core Facility Reservation Service Management System (get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong>
<ol>
<li>If there is an NSTC project, please go to the NSTC Basic Research Core Facility Reservation Service Management System (https://vir.nstc.gov.tw/home/Index). Make an appointment and get the reservation number, then download the <a href="/userfiles/orden/files/20240612093918739.odt" rel="noreferrer noopener" target="_blank" title="SEM8010 OEM Application Form(odt)(Open New Windows)">SEM8010 OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without an NSTC project, please download the <a href="/userfiles/orden/files/20240612093918739.odt" rel="noreferrer noopener" target="_blank" title="SEM8010 OEM Application Form(odt)(Open New Windows)">SEM8010 OEM Application Form</a> directly. Submit the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
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</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Please bring your own conductive tape or thermal paper (K65HM).</li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Self-operation: Set-up fee is charged (excluding sample surface coating/EDS)</li>
<li class="ed_txt">Entrusted operation: start-up fee + OEM fee (excluding sample surface coating/EDS)</li>
</ul>
</li>
<li class="ed_txt">Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168742033137864704&init=YCold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrumenthttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication