<![CDATA[Laser Pattern Generator]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Laser Pattern Generator" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169168370554114048&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e5%85%89%e7%bd%a9%e8%a3%bd%e4%bd%9c%e7%b3%bb%e7%b5%b1-laser-pattern-generator-dwl-200/" rel="noreferrer noopener" target="_blank" title="LASER PATTERN GENERATOR(Open New Windows)"><strong>LASER PATTERN GENERATOR</strong></a><br />
Brand Model: HIMT DWL-200</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Li, Pei-wen</strong><br />
ext 54210</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang</strong><strong>, Mr. Ko, Ming-yi</strong><br />
Mr. Ko, Ming-yi (ext. 55659, 55667)<br />
Email <a href="mailto:mailto:mingyi@nycu.edu.tw" title="mingyi@nycu.edu.tw">mingyi@nycu.edu.tw</a><br />
Mr. Tsai, Ching-Hsiang (ext. 55605, 55616)<br />
Email <a href="mailto:ch-tsai@nycu.edu.tw" title="ch-tsai@nycu.edu.tw">ch-tsai@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 139, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-04-11Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/laser-pattern-generator-dwl-200/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: HIMT DWL-200</li>
<li class="ed_txt">Purchase period: April 2007</li>
<li class="ed_txt">Location: Room 139, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li class="ed_txt">Function: Manufacture of glass photomasks (4", 5" and 6"), 5-inch quartz photomasks (contact)</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">Laser light source 442nm(g-line) Helium _Cadmium LASER Power 125mW</li>
<li class="ed_txt">Minimum feature size is .80um</li>
<li class="ed_txt">Maximum effective area 200mm x 200mmdeposition)</li>
<li class="ed_txt">*.dxf file of GDSII and Auto CAD</li>
<li class="ed_txt">Dual CCD camera alignment system</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612091506150.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.<br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="/userfiles/orden/files/20240612091535956.pdf" rel="noreferrer noopener" target="_blank" title="Mask Making Instructions(pdf)(Open New Windows)">Mask Making Instructions</a></div>
</div>service items<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li class="ed_txt">If there is a National Academy of Sciences, please come first <a href="https://vir.nstc.gov.tw/home/Index" title="National Science Council Basic Research Core Facility Reservation Service Management System">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612091555508.odt" rel="noreferrer noopener" target="_blank" title="DWL-200 OEM Application Form(odt)(Open New Windows)">DWL-200 OEM Application Form</a>, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.</li>
<li class="ed_txt">For those without a national science account, please download directly <a href="/userfiles/orden/files/20240612091555508.odt" rel="noreferrer noopener" target="_blank" title="DWL-200 OEM Application Form(odt)(Open New Windows)">DWL-200 OEM Application Form</a>, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.<br />
</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169168370554114048&init=YLaser Pattern Generatorhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=e990525c-7264-448e-ad41-ee81154b5695Pattern Generator