<![CDATA[III-V Molecular Beam Epitaxy System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Group III or Five Molecular Beam Epitaxy System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169160834551648256&init=N" /></div>
<ul>
<li class="ed_txt"><strong>III-V MOLECULAR BEAM EPITAXY SYSTEM</strong><br />
Brand Model: Veeco Modular GEN II solid source III-V MBE</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Lin Sheng-Di</strong><br />
ext 31240<br />
Email <a href="mailto:mailto:sdlin@nycu.edu.tw" title="sdlin@nycu.edu.tw">sdlin@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Ms. Wu, Chu-Chun</strong><br />
Extension 54248, 55665<br />
Email <a href="mailto:isabelwu@nycu.edu.tw" title="isabelwu@nycu.edu.tw">isabelwu@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2025-04-28Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Instrument Information</strong><br />
Chinese name: Group III and V Molecular Beam Epitaxy System<br />
English name: III-V Molecular Beam Epitaxy System<br />
English abbreviation: MBE<br />
Label: Veeco Modular GEN II solid source III-V MBE<br />
Instrument Location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus<br />
Purchase Date: August 2004<br />
Date of joining Guiyi: January 2015<br />
<br />
<strong>Important Specifications</strong></div>
<ol>
<li class="ed_txt">High Vacuum Growth chamber: Pressure < 5×10-10 torr</li>
<li class="ed_txt">Source Material: Ga, Al, In, As, Sb.</li>
<li class="ed_txt">Doping Source: Be, Si, Te</li>
<li class="ed_txt">Max substrate Size: 3 inches</li>
<li class="ed_txt">Epitaxy Layer thickness Variation < 5%</li>
<li class="ed_txt">The highest growth temperature: 640℃</li>
<li class="ed_txt">In-situ rsidual gas analysis (RGA) and reflection high energy electron diffraction (RHEED, 15kV):</li>
<li class="ed_txt">Regular monitoring epitaxy layer growth rate and quality.</li>
</ol>
</div>Service Items and System Open Level<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>service items</strong></div>
<ol>
<li class="ed_txt">This system is an ultra-high vacuum system. In principle, it is not open to operate by itself, but it can be accompanied on site.</li>
<li class="ed_txt">This system serves each wafer with 6 hours as a unit.</li>
<li class="ed_txt">The applicant user must contact the professor or technician in charge of the instrument to confirm that the sample meets the requirements.</li>
<li class="ed_txt">A maximum of 5 samples can be reserved per person at a time.</li>
<li class="ed_txt">Cancellation must be notified one week in advance.</li>
</ol>
<div class="ed_txt"><br />
<strong>System open level</strong><br />
At present, only the entrusted service is open, and it is operated by the technicians of this laboratory.</div>
</div>Charges<div class="ed_model06 clearfix">
<div class="ed_txt"><strong>Opening hours:</strong>This machine adopts entrusted reservation. If you need to make an appointment, please go to your instrument system to make an appointment.</div>
<div class="table01">
<table class="ed_table caption-top" summary="Charges">
<caption>Charges</caption>
<tbody>
<tr>
<th style="text-align: left;">service items</th>
<th style="text-align: left;">Charging standard (unit: NTD)</th>
</tr>
<tr>
<td data-th="service items">Arsenic sample commission</td>
<td data-th="Charging standard (unit: NTD)">Planning appointment: $4,000 /1µm<br />
Unplanned appointment: $15,000 /1µm</td>
</tr>
<tr>
<td data-th="service items">Antimonide sample commission</td>
<td data-th="Charging standard (unit: NTD)">Planning appointment: $5,000 /1µm<br />
Unplanned appointment: $25,000 /1µm</td>
</tr>
<tr>
<td data-th="service items">Special Structure Testing Fee</td>
<td data-th="Charging standard (unit: NTD)">Additional correction fees ranging from 2-6µm will be charged according to the structural difficulty</td>
</tr>
<tr>
<td data-th="service items">Substrate cost</td>
<td data-th="Charging standard (unit: NTD)">GaAs series: $7,000 / single chip<br />
GaSb series: $25,000/single chip<br />
InP series: $9,000 / single chip</td>
</tr>
</tbody>
</table>
</div>
</div>
<div class="ed_model01 clearfix">
<div class="ed_txt"><br />
</div>
<ol>
<li class="ed_txt">The charging standard is calculated based on the sample growth thickness of 1 micron. The part exceeding 1 micron or more, if it is less than 1 micron, it will be calculated as 1 micron.</li>
<li class="ed_txt">In order to maintain the stability of the system and ultra-high vacuum conditions, the request of the entruster to provide substrates is not accepted; the unit will provide the crystal growth substrates uniformly.</li>
<li class="ed_txt">If you have other special requirements, please mail or call to discuss.</li>
<li class="ed_txt">For those who need long-term entrusted services, long-term project discounts can be provided.</li>
<li class="ed_txt">The unit can also assist in evaluating the feasibility of the structure and consulting services for growth proposals.</li>
</ol>
</div>Test film restrictions and reservation method<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Management methods and test strip restrictions</strong></div>
<ol>
<li class="ed_txt">The substrates that can be grown are GaAs, InP, InAs, GaSb, and InSb.</li>
<li class="ed_txt">After submitting the appointment form, the entrusted operator must contact the technician to determine the experimental time and growth content.</li>
</ol>
<div class="ed_txt"><br />
<strong>Instrument reservation method</strong></div>
<ol>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/home/Index" title="Instrument reservation">Instrument reservation</a></li>
<li class="ed_txt">If you want to cancel the appointment, please contact the technician one week before and cancel online.</li>
<li class="ed_txt">Submit the appointment application form, please take a photo or scan it and send it to the technician's mailbox</li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169160834551648256&init=YGroup III or Five Molecular Beam Epitaxy Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication