<![CDATA[Pattern Generator]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Graphics Generation System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169163857558507520&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e5%9c%96%e5%bd%a2%e7%94%a2%e7%94%9f%e7%b3%bb%e7%b5%b1pattern-generator/" rel="noreferrer noopener" target="_blank" title="PATTERN GENERATOR(Open New Windows)"><strong>PATTERN GENERATOR</strong></a><br />
Brand Model: Raith VOYAGER</li>
<li class="ed_txt"><strong>Instrument expert: Prof. Li Pei-Wen</strong><br />
ext 54210</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang</strong><br />
Extension 55605, 55616<br />
Email <a href="mailto:ch-tsai@nycu.edu.tw" title="ch-tsai@nycu.edu.tw">ch-tsai@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 118, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2024-06-12Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/pattern-generator/" title="Link to Nano Center Introduction Page">Link to Nano Center Introduction Page</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li class="ed_txt">Brand Model: Raith VOYAGER</li>
<li class="ed_txt">Purchase period: 2019</li>
<li class="ed_txt">Place of placement: Room 118, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55667)</li>
<li class="ed_txt">Function: thin film photoresist exposure and writing</li>
<li class="ed_txt">Important specs:
<ul>
<li class="ed_txt">Exposure source: Electron Beam</li>
<li class="ed_txt">Maximum beam energy: 50kV</li>
<li class="ed_txt">Maximum write field: 500μm</li>
<li class="ed_txt">50MHz Pattern Generator</li>
</ul>
</li>
<li class="ed_txt">The instrument can be used with <a href="/userfiles/orden/files/20240612091506150.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a><br />
</li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li class="ed_txt">Positive list: the surface of the test piece is flat (thickness less than 1mm) (such as Si, SiC, GaAs, GaN and other materials)</li>
<li class="ed_txt">Negative table columns (prohibited):
<ul>
<li class="ed_txt">Magnetic materials, powder materials, piezoelectric materials, synthetic photoresist</li>
<li class="ed_txt">low melting point material</li>
<li class="ed_txt">All materials that decompose or release gases and hinder the maintenance of vacuum when exposed to electron beams</li>
</ul>
</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ol>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Graphics Generation System <a class="ek-link broken_link" href="/userfiles/orden/files/20240612091951664.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a class="ek-link broken_link" href="/userfiles/orden/files/20240612092008982.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ol>
</li>
<li><a class="ek-link" href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people(Open New Windows)">Instrument opening level and number of people</a>, the relevant notes are as follows:
<ol>
<li>In principle, the same laboratory is open to 3 people to operate by themselves, not limited to master and doctoral students (but doctoral students are preferred).</li>
<li>Applicants who apply for self-operation of this equipment need to have experience in using nanocenter SEM instruments (the cumulative operating hours are at least 20 hours). <a class="ek-link" href="/userfiles/orden/files/20240612092047640.odt" rel="noreferrer noopener" target="_blank" title="knot book(odt)(Open New Windows)">knot book</a>.</li>
<li>20 hours of accumulated hours of SEM operation must be attached.</li>
<li>The number of training times for this equipment to operate by itself is 5 times.</li>
<li>Those who are the trainers of this equipment must first obtain the 24-hour self-operating authority of this equipment.</li>
<li>After passing the assessment, if the device has not been used for more than 3 months, its operating authority will be cancelled.</li>
</ol>
</li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ol>
<li><a class="ek-link" href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System (Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System </a>(get serial number)</li>
<li><a class="ek-link" href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ol>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first <a class="ek-link" href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service Management System(Open New Windows)">National Science Council Basic Research Core Facility Reservation Service Management System</a> Make an appointment and get the appointment number, then download <a class="broken_link" href="/userfiles/orden/files/20240612092107229.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Graphical Generation System(odt)(Open New Windows)">OEM Application Form for Graphical Generation System</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without a national science account, please download directly <a class="broken_link" href="/userfiles/orden/files/20240612092107229.odt" rel="noreferrer noopener" target="_blank" title="OEM Application Form for Graphical Generation System(odt)(Open New Windows)">OEM Application Form for Graphical Generation System</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">The chip is prepared by the user.</li>
<li class="ed_txt">When NFC photoresist is required for the entrusted graphic exposure and writing, the entrusted coating material fee: 800 yuan (within 2 pieces of fragments or 1 piece of 4 inches, cash charge).</li>
<li class="ed_txt">The exposure and writing of the mask depends on the pattern and will be quoted separately after evaluation.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operation: charge usage fee</li>
<li class="ed_txt">Entrusted operation: charge usage fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt"><a href="https://vir.nstc.gov.tw/VI_SearchResult?item=1" rel="noreferrer noopener" target="_blank" title="Cost inquiry link(Open New Windows)">Cost inquiry link</a></li>
</ol>
</div>https://www.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169163857558507520&init=YGraphics Generation Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabricationhttps://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=9b3d4c4f-6606-4496-9bbc-b1d1bb2ca075Laser Pattern Generator