Electron Microscope
中文- Update Date：2025-02-20
- Units：Instrumentation Resource Center
[Guangfu] E-beam inspection tool, eScan310
- E-beam inspection tool
- Brand Model: HMI, eScan310
- Instrument expert: Prof. Chang, Yi
- ext 31536
- Instrument Operation Technician: Mr. Lin, Tsun-Guang
- ext 59495
- Email tglin@nctu.edu.tw
- Instrument location: Room SC030, Science Building 3
Instrument brand, model, year of purchase
Brand: HMI
Model: eScan310
Year of Purchase: Donated by Hanmin Microtest Company in March 2012
Important Specifications
Brand: HMI
Model: eScan310
Year of Purchase: Donated by Hanmin Microtest Company in March 2012
Important Specifications
- The sample measured has defect detection and scale line width more significant than 20 nanometers
- The total height after placement on the stage shall not be greater than or less than 850 microns
Services
- Sample defect detection
- Sample scale measurement
- This equipment has an application range of up to nanometer size and can observe a wide range of materials. Experts and scholars in different fields, such as physics, chemistry, materials, electronics, optoelectronics, and biology, are highly welcome to use this machine to engage in related research. Scholars in electrical machinery, machinery, information, optics, and other fields are also welcome to put forward new opinions on the application and functional improvement of electron beams.
Opening hours
- Monday to Friday: 08:30~05:30
- Nights, Saturdays and Sundays: closed
System opening level
- General working hours: D
- Night and holiday hours: Closed
System opening level description
- Level A: Open to students who need to use it. They can operate it on their own after training and assessment.
- Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
- Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.
- Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
| (This machine is not open for self-operation) | Delegated operation | |
|---|---|---|
| Unit Charging standard (unit: NTD) |
Academic unit Non-savings/savings members |
Manufacturers and research units Non-savings/savings members |
| Off-campus | 2300/2000 | 3000/2700 |
| On campus | 1500/1200 | — |
| Industry-university cooperative research project approved by the R&D Department | Free | — |
Note: Academic units refer to colleges and universities.
Management and Usage Methods
- Request usage application from instrument technician/assistant.
- The instrument technician/assistant will issue a payment note to the user after the experiment is completed.
- Users are requested to bring the payment notice to the cashier team for payment. Then, submit the payment notice and a copy of the receipt to the instrument technician.
- On-campus project transfer: Users can directly transfer funds to various projects implemented by professors in the school.
(Please download the transfer approval form for on-campus users of the common instrument from Downloads). After the user fills it out, ask the project leader to sign it and submit it to the instrument technician.
This machine is not open for self-operation training.
- Mr. Lin, Tsun-Guang
- Instrument operation technician
59495 (Room SC030, Basic Sciences Building)
tglin@nctu.edu.tw
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