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Electron Microscope

exchangealt 中文
  • Update Date：2025-02-20
  • Units：Instrumentation Resource Center
[Guangfu] SEM (JSM IT-300) and EBL
Scanning Electron Microscope and Electron Beam Lithography System
  • Scanning electron microscope and E-beam lithography
    • English abbreviation: SEM and EBL
    • Brand Model: JEOL, JSM IT-300
  • Instrument expert: Prof. Jian, Wen-Bin
    • ext 56159
  • Contact person and instrument operation technician: Kao, Wei-Jyun
    • ext 56183
  • Instrument location: Room SC009, Science Building 3
Instrument brand, model, year of purchase:
Brand: JEOL
Model: JSM IT-300
Year of Purchase: April 2016

Important Specifications
Magnify the image of the object and control the stage and electron beam.

Instrument performance:
  1. Electron source: hot filament electron gun
  2. Operating voltage: 0.3 kV to 30 kV
  3. Resolution: 3.0 nm (30 kV) 15.0 nm (1.0 kV)
  4. Magnification: ×5 to ×300,000 (depending on the test strip itself)
  5. Probe current: 1 pA to 1μA
  6. Test piece size: 12mm x 12mm
  7. Minimum line width: 50nm (PMMA)
Services
Explore sample morphology and electron beam lithography.

Opening hours:
  1. Monday to Friday period:
    • Tuesday: 9:00~12:00, 13:00~19:00
    • Wednesday: 9:00~12:00, 13:00~19:00
    • Thursday: 9:00~12:00, 13:00~19:00
    • Friday: 9:00~12:00
  2. Closed at night and on weekends
System opening level
  1. General Office Hours: Level A, B, C, D
  2. Night and Holiday Hours: closed
System opening level description
  • Level A: Open to students who need to use it. They can operate it on their own after training and assessment.
  • Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
  • Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.
  • Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
Charging standards
  Delegated operation Self-operation
Charging standard (NTD) Academic unit
Academic unit (Department of Electronic Physics, NYCU)		 Manufacturers and research units Academic units Manufacturers and research units
Secondary electronic imaging NT$1,200/hour NT$600/hour NT$1,500/hour NT$300/hour Not open
Electron beam lithography
(2-hour minimum)		 NT$1,600/hour NT$800/hour NT$2,500/hour NT$500/hour Not open

Remarks: Academic units refer to colleges and universities.
Management and Usage Methods:
  1. Reservations are only open to students who pass the assessment. Please fill in the laboratory, personal names, and contact numbers on the record form.
  2. If the appointment period conflicts with the instrument assistant training, the teaching assistant training will take priority.
  3. If the reservation period conflicts with the instrument maintenance period, instrument maintenance will take priority.
  4. No food is allowed in the laboratory. The experimental table must be cleaned and the chairs arranged neatly when leaving. Anyone who fails to comply will be given a warning.
  5. you will be suspended for one month when the warnings accumulate thrice.
  6. Please do not shut down your computer arbitrarily. It is strictly prohibited to install any external software. You cannot change system settings or access the Internet without authorization. Anyone who fails to comply will be suspended.
  7. All equipment and software in the laboratory are the property of the Department of Electronic Physics and must not be stolen or damaged. Otherwise, you will be held responsible.
  8. No magnetic (containing iron, cobalt, nickel), powder, polymer, or biological material test pieces. You must inform the instrument assistant beforehand if you have special test pieces.
  9. Please bring your own blank CD-R/DVD to access files, and do not use USB to access files.
Application for Instrument Operation Training
  1. Fill in the common instrument application form.
  2. Educational training will be charged for an additional session.
  3. With the approval of the instrument teaching assistant, the training session will be arranged.
  4. From the date of passing the assessment, users are required to use the computer once within one month.
Instrument Operation Reservation:
  1. For self-operation, please contact the teaching assistant and complete the common instrument application form.
  2. Using the equipment outside opening hours is strictly prohibited.
  3. Please register the user name, laboratory, and laboratory extension when making an appointment.
Instrument List of Guangfu and Boai Campus Other EM
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