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List of Instruments

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  • Nanofabrication

  • Update Date：2024-06-12
  • Units：Instrumentation Resource Center
Double Side Mask Aligner (B)
Mask Alignment Exposure Machine (B)
  • Double Side Mask Aligner
    Brand model: Keyi Technology AG1000-6N-ST
  • Instrument Expert: Assoc. Prof. Su, Chun-Jung
    ext 56150
    Mailbox cjsu@nycu.edu.tw
  • Instrument Operation Technician: Mr. Chao, Jerry 
    Extension 55670, 55667
    Email jychaoa@nycu.edu.tw
  • Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
    ext 55616 
Nano Center website introduction

Instrument Information
  1. Brand Model: Keyi Technology AG1000-6N-ST
  2. Purchase period: November 2019 
  3. Place of placement: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)
  4. Function: Alignment exposure of various components
  5. Important Specifications:
    1. Mask holder: 4″x4″ , 5″x5″
    2. Chuck: 4″
    3. Exposure size: 4″
    4. Light source: 1000W
    5. Mercury light source: NUV
  6. The instrument can be used with special process material
     
Precautions
  1. Reservations are made in one hour.
  2. The process reservation time of users with this equipment is at most one time slot per day, and repeated reservations are not allowed
  3. Reservation Cancellation: Those who cannot operate the equipment within the reservation period due to emergencies should cancel the reservation registration 24 hours before the reservation. Those who do not cancel will be charged according to the original period, and the original period must be opened by the equipment management personnel. For other users to operate and use it, the original reservation user shall be punished, and the punishment shall be determined separately.
  4. Those who do not arrive on time for the appointment registration will be deemed to have not picked up the appointment, and the time slot can be used by other users.
  5. For commissioned producers, please contact the equipment management personnel first.
self-operated instrument
  1. To apply for this machine, an additional test is required at the same time Photoresist Coater,vacuum oven,Optical microscope
  2. Instructions for obtaining the permission to use the instrument:
  3. Instrument opening level and number of people.
  4. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
Commissioning the operation of the instrument
  1. If non-standard silicon wafers or other materials must be distinguished from the front and back, the front and back sides and the surface to be processed must be marked on the application form or on the wafer. Those who do not mark or do not provide confirmation information will not be accepted.
  2. If there is a National Academy of Sciences, please come first National Science Council Basic Research Core Facility Reservation Service Management System Make an appointment and get the appointment number, then download OEM Application Form for Double-sided Mask Alignment Exposure Machine, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
  3. For those without a national science account, please download directly OEM Application Form for Double-sided Mask Alignment Exposure Machine, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
Charge information
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
  2. Photoresist only: NTD $500 per piece (4″ and fragments are charged the same).
  3. When the OEM requires the second alignment (the applicant must be present and accompanied to facilitate confirmation of the alignment position and avoid disputes).
  4. Payment method:
    • Operate by yourself:Charge usage fee
    • Delegated operation:Charge usage fee+ OEM fee
  5. Cost inquiry link
     
List of Instruments Basic Service-Nanofabrication Double Side Mask Aligner (A)
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