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List of Instruments

X-ray diffractometer under extreme conditions and cutting-edge femtosecond dynamic spectrum measurement system
  • X-ray diffractometer and femtosecond transient spectroscopy under extreme conditions
  • English abbreviation: Extreme-condition spectroscopy
    Brand Model: Quantum Design Opticool
  • Instrument expert: Prof. Luo, Chi-Wei
    03-5712121 Ext. 56196, Email
  • Instrument expert: Prof. Huang, Er-wen
    03-5712121 Ext 55307, Email
  • Instrument expert: Assis. Prof. Tu, Chien-Ming
    03-5712121 Ext 56171, Email
  • Instrument expert: Assis. Prof. Lin, Yu-Chuan
    03-5712121 Ext 55328, Email
  • Instrument consultation and operation service: Dr. Nguyen Nhat Quyen
    03-5712121 Ext. 56198,Email
  • Instrument location: Science Building 3, Room SC015, GF Campus
detail
Group III or Five Molecular Beam Epitaxy System
  • III-V MOLECULAR BEAM EPITAXY SYSTEM
    Brand Model: Veeco Modular GEN II solid source III-V MBE
  • Instrument expert: Prof. Lin Sheng-Di
    03-5712121 ext 31240
    Email sdlin@nycu.edu.tw
  • Instrument consulting and operation services: Ms. Wu, Chu-Chun
    03-5712121 ext 54248, 55665
    Email isabelwu@nycu.edu.tw
  • Instrument location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus
detail
Laser Pattern Generator
  • LASER PATTERN GENERATOR
    Brand Model: HIMT DWL-200
  • Instrument expert: Prof. Li, Pei-wen
    03-5712121 ext. 54210
  • Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang, Mr. Ko, Ming-yi
    Mr. Ko, Ming-yi (03-5712121 ext. 55659, 55667)
    Email mingyi@nycu.edu.tw
    Mr. Tsai, Ching-Hsiang (03-5712121 ext. 55605, 55616)
    Email ch-tsai@nycu.edu.tw
  • Instrument location: Room 139, Solid State Electronic Systems Building, Guanfu Campus
detail
Graphics Generation System
  • PATTERN GENERATOR
    Brand Model: Raith VOYAGER
  • Instrument expert: Prof. Li Pei-Wen
    03-5712121 ext. 54210
  • Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang
    03-5712121 ext. 55605, 55616
    Email ch-tsai@nycu.edu.tw
  • Instrument location: Room 118, Solid State Electronic Systems Building, Guanfu Campus
detail
Mask Alignment Exposure Machine (A)
  • Double Side Mask Aligner
    Brand model: Keyi Technology AG1000-4D-DSMV
  • Instrument Expert: Prof. Su, Chun-Jung
    03-5712121 ext 56150
    Email cjsu@nycu.edu.tw
  • Instrument Operation Technician: Mr. Tseng, Chun-Hsien
    03-5712121 ext 55606, 55667
    Email c00465@nycu.edu.tw
  • Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Mask Alignment Exposure Machine (B)
  • Double Side Mask Aligner
    Brand model: Keyi Technology AG1000-6N-ST
  • Instrument Expert: Prof. Su, Chun-Jung
    03-5712121 ext 56150
    Mailbox cjsu@nycu.edu.tw
  • Instrument Operation Technician: Mr. Tseng, Chun-Hsien
    03-5712121 ext 55606, 55667
    Email c0045@nycu.edu.tw
  • Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Oxidative Diffusion System
  • OXIDATION & DIFFUSION FURNACES
    Brand Model: Senji SJ-CA1200-D4
  • Instrument expert: Prof.  Liu, Po-Tsun
    03-5712121 ext 52994
  • Instrument consulting and operation services: Ms. Ni, Yuech Chen
    03-5712121 ext 55668, 55610
    Email yeni@nycu.edu.tw
  • Instrument location: Room 121, Solid State Electronic Systems Building, Guanfu Campus
detail
Low pressure chemical vapor deposition system
  • Low Pressure Chemical Vapor Deposition (LPCVD)
    Brand Model: SJ-10301001-1
  • Instrument expert: Prof. Liu, Po-Tsun
    03-5712121 ext 52994
  • Instrument consulting and operation services: Mr. Lai, White
    03-5712121 ext 55606, 55616
    Email white@nycu.edu.tw
  • Instrument location: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Plasma Assisted Chemical Vapor Deposition System
  • Plasma-Enhanced Chemical Vapor Deposition (PECVD)
    Brand Model: Samco
  • Instrument expert: Prof. Lin, Horng-Chih
    03-5712121 ext 54193
  • Instrument consulting and operation services: Mr. Lai, White
    03-5712121 ext 55606, 55616
    Email white@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Dielectric Active Ion Etching System A
  • Dielectric Materials Reactive Ion Etching System, RIE-400iP
    Brand model: RIE-400iP made by SamCo, Japan
  • Instrument expert: Prof. Tsui, Bing-Yue
    03-5712121 ext 31570
  • Equipment management personnel: Mr. Hu, Jack
    03-5712121 ext 55607, 55666
    Email jackhu@nycu.edu.tw
  • Equipment management personnel: Mr. Lee, James
    03-5712121 ext 55660, 55666
    Email cwlee@nycu.edu.tw
  • Instrument location: Laboratory 121, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
REACTIVE ION ETCHING SYSTEM FOR DIELECTRIC MATERIALS B
  • Dielectric Materials Reactive Ion Etching System, RIE 200L
    Brand model: RIE200L made by SamCo, Japan
  • Instrument expert: Prof. Tsui, Bing-Yue
    03-5712121 ext 31570
  • Equipment management personnel: Mr.  Hu, Jack
    03-5712121 ext 55607, 55666
    Email jackhu@nycu.edu.tw
  • Equipment management personnel: Mr. Lee, James 
    03-5712121 ext 55660, 55666
    Email cwlee@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Cold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrument
  • SEM SU-8010
    Brand Model: Hitachi SU-8010
  • Instrument expert: Prof. Tan, Chih-Shan
    03-5712121 ext 54146
  • Instrument consulting and operation services: Ms. Fan, Hsiu-Lan
    03-5712121 ext. 55337, 55672
    Email shiulan@nycu.edu.tw
  • Instrument location: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus
detail
DUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEM
  • Dual beam [focused ion beam & electron beam] System FIB
    Brand model: TESCAN GAIA3
  • Instrument expert: Prof. Wu, Yew-Chung
    03-5712121 ext 31555
  • Instrument expert: Prof. Tsui, Bing-Yue
    03-5712121 ext 31570
  • Equipment management personnel: Mr. Chao , Jerry 
    03-5712121 ext 55670, 55368
    Email jychaoa@nycu.edu.tw
  • Instrument location: Room 213, Engineering Sixth Building, Guanfu Campus
detail
High Density Active Ion Etching System
  • High Density Plasma Reactive Ion Etching System, HDP-RIE
    Brand Model: Qingkang Technology
  • Instrument expert: Prof. Chen, Kuan-Neng
    03-5712121 ext 31558
  • Equipment management personnel: Mr. Hu, Jack
    03-5712121 ext 55607, 55666
    Email jackhu@nycu.edu.tw
  • Equipment management personnel: Mr. Lee, James
    03-5712121 ext 55660, 55666
    Email cwlee@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
Silicon Deep Etch System
  • Si Deep-RIE
    Brand Model: Oxford Estrelas 100
  • Instrument expert: Prof. Chen, Kuan-Neng
    03-5712121 ext 31558
  • Equipment management personnel: Mr. Hu, Jack
    03-5712121 ext 55607, 55666
    Email jackhu@nycu.edu.tw
  • Equipment management personnel: Mr. Lee, James
    03-5712121 ext 55660, 55666
    Email cwlee@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
detail
,total 40 records GO
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