List of Instruments
中文Nanofabrication
- Update Date：2024-06-12
- Units：Instrumentation Resource Center
High Density Plasma Active Ion Etching System
- High Density Plasma Reactive Ion Etching System, HDP-RIE
Brand Model: Qingkang Technology - Instrument expert: Prof. Chen, Kuan-Neng
ext 31558 - Equipment management personnel: Mr. Hu, Jack
Extension 55607, 55666
Email jackhu@nycu.edu.tw - Equipment management personnel: Mr. Lee, James
Extension 55660, 55666
Email cwlee@nycu.edu.tw - Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
ext 55666
- Brand Model: SAMCO – RIE-10N
- Purchase period: March 1999
- Place of placement: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666)
- Function: dry etching, mainly etching Al material
- IMPORTANT SPECIFICATIONS: Use Gas Contains BCl3, Cl2、CF4、CHF3, Ar, O2, SF6, ICP RF maximum power 900W, Bias RF maximum power 300W, cooled by He gas system, mainly 4″ wafer
- The instrument can be used with special process material.
Precautions
- Please specify the material of the substrate wafer, what kind of substance is contained on it (such as SiO2, photoresist, etc.) and whether to clean the wafer.
- If there is no special requirement for etching, it will be done according to the central standard process.
self-operated instrument
- Instructions for obtaining the permission to use the instrument:
- Daytime permission application process description (Using permission is Monday to Friday 8:00~17:00)
- 24-hour application process description (You need to have daytime permission to apply)
- Precautions (Be sure to read carefully, so as not to lose your own rights)
- HDP-RIE instrument Operating Specifications & Exam record sheet
- Instrument opening level and number of people.
- After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
- National Science Council Basic Research Core Facility Reservation Service Management system (obtain serial number)
- Nano Center Instrument Reservation System (Use time slot reservation)
Commissioning the operation of the instrument
- If there is a National Academy of Sciences, please come first National Science Council Basic Research Core Facility Reservation Service Manage system reservations and get the reservation number, then download HDP-RIE OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
- For those without a national science account, please download directly HDP-RIE OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
Charge information
- Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
- charging method
- Do it yourself: charge a fee
- Entrusted operation: charging usage fee + OEM fee
- Cost inquiry link
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