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  • Nanofabrication

  • Update Date：2025-04-11
  • Units：Instrumentation Resource Center
Laser Pattern Generator
Laser Pattern Generator
  • LASER PATTERN GENERATOR
    Brand Model: HIMT DWL-200
  • Instrument expert: Prof. Li, Pei-wen
    ext 54210
  • Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang, Mr. Ko, Ming-yi
    Mr. Ko, Ming-yi (ext. 55659, 55667)
    Email mingyi@nycu.edu.tw
    Mr. Tsai, Ching-Hsiang (ext. 55605, 55616)
    Email ch-tsai@nycu.edu.tw
  • Instrument location: Room 139, Solid State Electronic Systems Building, Guanfu Campus
Link to Nano Center Introduction Page

Instrument Information
  1. Brand Model: HIMT DWL-200
  2. Purchase period: April 2007
  3. Location: Room 139, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) 
  4. Function: Manufacture of glass photomasks (4", 5" and 6"), 5-inch quartz photomasks (contact)
  5. Important specs:
    • Laser light source 442nm(g-line) Helium _Cadmium LASER Power 125mW
    • Minimum feature size is .80um
    • Maximum effective area 200mm x 200mmdeposition)
    • *.dxf file of GDSII and Auto CAD
    • Dual CCD camera alignment system
  6. The instrument can be used with special process material.
     
Commissioning the operation of the instrument
  1. If there is a National Academy of Sciences, please come first National Science Council Basic Research Core Facility Reservation Service Management System Make an appointment and get the appointment number, then download DWL-200 OEM Application Form, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.
  2. For those without a national science account, please download directly DWL-200 OEM Application Form, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.
     
Charge information
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
  2. Cost inquiry link
List of Instruments Basic Service-Nanofabrication Pattern Generator
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